#FIPS	TRACTKEY	AD91	SD91	CD91	BEDIST	CNGDEM1	CNGDEM2	CNGDEM3	CNGDEM4	CNGDEM5	CNGDEM6	CNGDEM7	CNGDEM8	CNGDEM9	CNGREP1	CNGREP2	CNGREP3	CNGREP4	CNGREP5	CNGREP6	CNGREP7	CNGREP8	CNGREP9	CNGAIP1	CNGAIP2	CNGGRN1	CNGGRN2	CNGLIB1	CNGLIB2	CNGNLP1	CNGNLP2	CNGPAF1	CNGPAF2	CNGREF1	CNGREF2	ASSDEM1	ASSDEM2	ASSDEM3	ASSDEM4	ASSDEM5	ASSDEM6	ASSDEM7	ASSDEM8	ASSDEM9	ASSREP1	ASSREP2	ASSREP3	ASSREP4	ASSREP5	ASSREP6	ASSREP7	ASSREP8	ASSREP9	ASSAIP1	ASSAIP2	ASSGRN1	ASSGRN2	ASSLIB1	ASSLIB2	ASSNLP1	ASSNLP2	ASSPAF1	ASSPAF2	ASSREF1	ASSREF2	SENDEM1	SENDEM2	SENDEM3	SENDEM4	SENDEM5	SENDEM6	SENDEM7	SENDEM8	SENDEM9	SENREP1	SENREP2	SENREP3	SENREP4	SENREP5	SENREP6	SENREP7	SENREP8	SENREP9	SENAIP1	SENAIP2	SENGRN1	SENGRN2	SENLIB1	SENLIB2	SENNLP1	SENNLP2	SENPAF1	SENPAF2	SENREF1	SENREF2	BOEDEM1	BOEDEM2	BOEDEM3	BOEDEM4	BOEDEM5	BOEDEM6	BOEDEM7	BOEDEM8	BOEDEM9	BOEREP1	BOEREP2	BOEREP3	BOEREP4	BOEREP5	BOEREP6	BOEREP7	BOEREP8	BOEREP9	BOEAIP1	BOEAIP2	BOEGRN1	BOEGRN2	BOELIB1	BOELIB2	BOENLP1	BOENLP2	BOEPAF1	BOEPAF2	BOEREF1	BOEREF2	RTOTREG	RGL_TOT	AGE_TOT	RGL_NUM	AGE_NUM	HISPDEM	HISPREP	HISPDCL	HISPOTH	JEWDEM	JEWREP	JEWDCL	JEWOTH	MR	MRS	MISS	MS	MALE	FEMALE	DEM	REP	AIP	PAF	MISC	LIB	NLP	GREEN	REF	DCL	MAGEUNK	M1825	M2635	M3645	M4655	M5664	M65PL	FAGEUNK	F1825	F2635	F3645	F4655	F5664	F65PL	DREG1G	DREG2G	DREG3G	DREG4G	DREG5G	RREG1G	RREG2G	RREG3G	RREG4G	RREG5G	KORDEM	KORREP	KORDCL	KOROTH	JAPDEM	JAPREP	JAPDCL	JAPOTH	ASNDEM	ASNREP	ASNDCL	ASNOTH	DM1835	DM3655	DM56PL	DMUNK	DF1835	DF3655	DF56PL	DFUNK	RM1835	RM3655	RM56PL	RMUNK	RF1835	RF3655	RF56PL	RFUNK	IM1835	IM3655	IM56PL	IMUNK	IF1835	IF3655	IF56PL	IFUNK
67	060670004	9	6	5	2	668	0	0	0	0	0	0	0	0	58	31	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	45	117	99	114	309	0	0	0	0	22	47	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	59	579	0	0	0	0	0	0	0	28	32	57	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	255	264	0	0	0	0	0	0	0	108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2636	13826	101926	2636	2576	235	38	42	14	189	54	40	35	857	231	254	518	1279	1357	1578	412	65	38	10	28	17	84	27	378	22	145	448	319	209	72	64	38	196	459	261	195	93	115	323	539	197	155	363	74	177	47	27	87	18	2	2	0	7	0	3	2	9	0	3	0	263	327	90	17	387	324	146	26	111	87	26	4	80	52	39	12	127	68	17	0	104	46	17	0
67	060670005	9	6	5	2	360	0	0	0	0	0	0	0	0	25	18	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	34	80	58	51	158	0	0	0	0	15	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	301	0	0	0	0	0	0	0	15	19	29	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	124	173	0	0	0	0	0	0	0	62	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1975	7701	77623	1975	1953	245	25	41	27	146	45	45	18	702	160	204	323	1025	950	1131	298	54	11	4	18	20	45	50	343	9	133	323	237	167	73	83	13	182	317	163	130	63	82	279	445	142	82	183	72	132	33	28	33	15	1	1	2	5	1	2	2	1	0	1	0	199	237	105	7	280	193	100	13	77	73	20	2	63	38	24	0	119	57	22	0	93	38	14	0
67	060670006	9	6	5	2	84	0	0	0	0	0	0	0	0	8	8	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	10	15	17	12	36	0	0	0	0	6	7	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	10	71	0	0	0	0	0	0	0	6	7	7	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	31	41	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	504	1868	21209	504	500	73	7	12	7	37	12	11	8	182	38	41	65	284	220	296	70	11	2	1	5	8	13	19	80	2	25	74	77	48	29	29	2	36	58	49	36	21	21	69	118	41	24	44	22	25	5	5	12	2	1	1	1	1	1	1	0	1	1	1	0	45	70	36	1	56	56	31	1	18	18	8	1	11	8	6	1	25	16	7	1	17	11	4	0
67	060670007	9	6	5	2	62	0	0	0	0	0	0	0	0	9	17	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	9	7	5	18	19	0	0	0	0	18	11	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2	53	0	0	0	0	0	0	0	2	11	24	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	22	26	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	525	1942	31027	525	524	28	6	2	3	45	10	9	10	206	65	19	48	313	211	270	131	13	8	1	2	14	4	10	71	1	10	28	70	65	38	103	0	4	12	25	19	15	135	68	107	30	24	40	19	42	28	11	31	12	11	5	2	4	10	3	1	10	6	11	1	14	62	82	0	7	24	80	0	9	33	32	1	3	14	40	0	10	19	14	0	4	4	20	0
67	060670008	9	6	5	2	306	0	0	0	0	0	0	0	0	54	44	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	20	46	36	44	162	0	0	0	0	18	59	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	240	0	0	0	0	0	0	0	19	42	56	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	70	150	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1132	6336	64238	1132	1116	54	10	4	1	93	67	24	5	363	229	66	158	529	603	590	377	15	2	0	4	3	4	8	129	3	22	102	101	117	54	130	13	22	69	58	79	60	302	115	181	86	58	150	54	122	58	35	108	7	5	0	0	2	3	1	0	4	2	1	1	53	111	87	1	46	92	195	5	42	64	69	2	25	29	139	7	14	38	26	0	13	14	23	1
67	060670009	9	6	5	2	39	0	0	0	0	0	0	0	0	6	4	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	2	7	4	6	19	0	0	0	0	4	6	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4	32	0	0	0	0	0	0	0	2	5	7	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	11	17	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	176	739	7819	176	175	12	3	3	1	13	7	2	3	63	13	18	32	95	81	94	45	5	1	0	1	1	3	2	24	1	7	26	22	16	9	15	1	12	22	14	12	7	13	22	33	13	9	16	11	14	7	5	8	0	1	0	0	1	1	0	0	0	0	0	0	14	21	14	1	17	16	12	0	11	8	6	0	9	5	6	0	6	6	3	0	5	3	1	0
67	060670010	9	6	5	2	26	0	0	0	0	0	0	0	0	3	4	0	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	3	4	4	6	10	0	0	0	0	4	3	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2	23	0	0	0	0	0	0	0	1	3	4	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	9	13	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	178	660	8782	178	178	19	3	2	2	15	3	3	3	66	17	11	20	103	75	100	33	4	2	0	1	4	4	5	27	1	6	19	26	19	11	21	0	8	14	14	10	6	23	24	39	13	9	15	8	11	5	2	7	2	2	1	0	1	1	0	0	1	1	2	0	11	23	20	0	13	14	18	0	5	9	7	0	2	4	7	0	6	6	4	0	4	3	4	0
67	060670011	9	6	5	2	132	0	0	0	0	0	0	0	0	10	11	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	11	28	20	20	55	0	0	0	0	4	13	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	16	102	0	0	0	0	0	0	0	8	10	16	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	42	57	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	632	2345	24544	632	628	43	7	6	5	53	14	16	10	242	37	61	105	348	284	349	107	12	7	2	6	5	22	12	108	0	44	132	70	53	20	25	2	47	106	53	34	14	27	93	129	47	30	50	25	39	17	8	16	1	1	0	0	2	0	0	1	0	0	0	0	78	66	27	0	86	61	29	0	35	23	7	0	20	10	6	0	39	18	6	0	31	9	4	0
67	060670012	9	6	5	2	410	0	0	0	0	0	0	0	0	49	38	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	33	80	68	60	185	0	0	0	0	32	52	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	348	0	0	0	0	0	0	0	20	39	58	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	130	182	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2075	7725	86178	2075	2062	130	26	29	21	157	64	49	36	786	127	213	356	1123	952	1125	409	60	19	5	24	18	67	39	308	5	120	358	251	184	90	114	7	168	275	172	133	76	120	281	431	152	92	169	112	139	62	35	62	6	6	3	0	9	4	2	1	3	2	2	0	204	248	123	4	235	185	119	5	99	81	44	1	84	50	50	3	100	70	22	0	66	35	16	0
67	060670013	9	6	5	2	484	0	0	0	0	0	0	0	0	33	37	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	44	88	84	48	237	0	0	0	0	18	39	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	407	0	0	0	0	0	0	0	16	36	55	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	174	182	0	0	0	0	0	0	0	114	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2131	8629	80273	2131	2113	153	22	26	17	166	44	53	28	738	136	257	430	1078	1053	1242	347	39	26	5	26	11	87	35	313	7	116	406	262	175	76	37	11	193	403	198	129	54	64	319	475	140	107	200	63	153	43	29	59	11	4	1	0	10	2	2	0	8	6	5	0	249	264	74	4	331	234	82	3	99	74	24	3	81	36	23	6	97	53	7	0	110	34	9	2
67	060670014	9	6	5	2	428	0	0	0	0	0	0	0	0	39	42	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	33	72	62	61	207	0	0	0	0	18	41	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	353	0	0	0	0	0	0	0	19	31	56	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	146	189	0	0	0	0	0	0	0	101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1837	9434	80015	1837	1806	97	15	10	9	162	49	41	27	570	177	199	344	855	982	1034	339	32	16	7	23	9	67	30	280	11	86	311	174	114	55	107	21	132	304	123	106	57	239	206	353	138	114	225	57	110	48	30	95	4	2	0	0	12	4	0	2	1	1	2	3	173	158	97	7	243	155	188	12	66	59	42	4	54	26	82	9	92	47	9	0	81	32	18	0
67	060670015	9	6	5	2	1003	0	0	0	0	0	0	0	0	212	105	0	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	29	164	115	136	533	0	0	0	0	72	205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	81	746	0	0	0	0	0	0	0	69	171	200	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	263	365	0	0	0	0	0	0	0	411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3364	30687	142066	3364	3160	145	43	13	6	259	136	45	21	876	600	284	594	1441	1923	1835	1030	42	9	3	13	3	45	24	360	68	93	397	317	315	118	132	136	123	517	361	369	130	288	220	412	225	194	785	124	248	141	97	420	15	7	5	0	11	4	0	1	12	6	2	0	189	348	124	40	341	483	230	81	187	169	110	28	155	164	163	55	79	81	10	0	104	65	22	0
67	060670017	9	6	5	2	818	0	0	0	0	0	0	0	0	115	83	0	0	0	0	0	0	0	0	0	0	0	37	0	0	0	0	0	0	0	60	81	112	121	464	0	0	0	0	53	130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	67	636	0	0	0	0	0	0	0	62	72	149	0	0	0	0	0	0	0	0	0	0	50	0	0	0	0	0	0	0	241	321	0	0	0	0	0	0	0	280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2953	29765	136933	2953	2817	185	29	30	15	264	102	41	22	647	619	186	492	1211	1742	1791	698	51	9	7	20	3	36	25	314	50	90	284	280	217	75	216	87	101	352	369	273	120	443	232	377	197	179	806	87	159	91	58	305	7	6	5	0	16	3	2	1	3	2	2	1	166	278	174	37	258	453	363	61	101	127	88	13	93	100	154	25	72	64	22	0	66	62	28	1
67	060670018	9	6	5	2	492	0	0	0	0	0	0	0	0	38	35	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	33	67	62	114	240	0	0	0	0	11	32	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	48	440	0	0	0	0	0	0	0	13	28	41	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	160	230	0	0	0	0	0	0	0	84	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2324	16124	96302	2324	2257	265	20	36	21	229	34	31	26	620	345	201	364	1045	1279	1511	322	56	24	4	13	21	35	42	298	20	121	249	273	214	70	100	46	164	321	304	197	90	158	264	449	175	155	470	52	101	45	31	93	15	1	0	1	6	4	4	0	4	0	3	0	177	317	115	14	298	353	197	40	68	77	31	5	47	60	26	6	70	61	16	1	80	50	18	0
67	060670019	9	6	5	2	425	0	0	0	0	0	0	0	0	43	33	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	37	96	66	67	160	0	0	0	0	28	45	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	342	0	0	0	0	0	0	0	20	33	57	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	133	180	0	0	0	0	0	0	0	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1833	10399	71131	1833	1779	150	20	25	12	143	45	31	29	583	157	204	328	882	951	1091	314	38	22	4	16	13	43	38	253	21	105	281	217	146	57	54	33	156	278	194	152	60	79	224	362	147	110	247	53	99	49	25	87	13	4	5	2	21	4	2	0	20	6	9	1	192	220	73	15	241	239	95	18	69	68	19	6	61	44	33	14	76	39	15	0	78	39	6	1
67	060670020	9	6	5	2	204	0	0	0	0	0	0	0	0	31	18	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	16	40	23	30	91	0	0	0	0	22	33	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	18	153	0	0	0	0	0	0	0	11	25	34	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	91	77	0	0	0	0	0	0	0	63	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1107	6736	43794	1107	1059	100	15	19	15	83	14	14	17	339	125	118	151	543	564	625	185	39	23	3	14	8	25	14	171	18	65	172	118	78	25	66	29	91	158	116	72	30	69	139	229	67	55	134	26	51	36	11	62	32	16	16	5	18	11	7	2	46	40	26	7	109	99	56	11	145	124	64	17	29	41	20	5	30	23	24	13	59	31	12	2	40	23	6	0
67	060670021	9	6	5	2	194	0	0	0	0	0	0	0	0	19	12	0	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	18	36	31	38	76	0	0	0	0	12	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	14	164	0	0	0	0	0	0	0	6	16	19	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	69	81	0	0	0	0	0	0	0	46	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	963	5966	38565	963	918	95	18	16	13	65	15	17	20	302	110	97	133	466	497	545	155	29	12	8	8	8	22	22	154	17	58	133	111	66	21	61	29	71	120	113	72	31	60	113	179	67	44	143	26	47	35	11	35	15	11	9	1	32	10	5	2	30	22	18	2	78	103	47	14	95	121	64	23	32	24	20	2	34	20	18	5	50	24	9	1	37	25	6	0
67	060670022	9	6	5	2	532	0	0	0	0	0	0	0	0	54	35	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	27	77	60	60	281	0	0	0	0	36	58	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	32	420	0	0	0	0	0	0	0	39	47	66	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	150	197	0	0	0	0	0	0	0	149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1913	18256	79718	1913	1772	157	19	20	19	141	34	20	19	429	360	163	272	777	1136	1213	367	47	23	2	4	6	19	25	205	56	70	165	181	124	65	113	83	134	253	242	163	75	184	192	300	146	112	462	46	94	37	43	146	23	14	9	7	98	20	8	0	63	33	16	11	118	176	106	38	224	306	184	61	59	68	47	13	53	46	57	21	28	41	18	6	62	36	14	0
67	060670023	9	6	5	2	783	0	0	0	0	0	0	0	0	108	70	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	22	154	63	67	483	0	0	0	0	36	120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	62	594	0	0	0	0	0	0	0	49	107	128	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	184	296	0	0	0	0	0	0	0	264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2290	24867	95824	2290	2092	123	30	14	8	185	77	27	19	549	464	155	375	991	1299	1326	650	23	9	3	13	4	32	21	208	66	58	219	238	231	75	103	133	81	265	283	275	83	180	154	240	150	158	623	73	160	71	49	298	14	9	3	0	51	11	4	0	16	9	5	0	123	264	97	41	189	387	146	81	98	132	61	26	93	98	96	49	33	51	18	0	44	53	9	2
67	060670024	9	6	5	2	1114	0	0	0	0	0	0	0	0	253	100	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	41	220	95	96	673	0	0	0	0	87	229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	79	822	0	0	0	0	0	0	0	76	221	238	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	218	419	0	0	0	0	0	0	0	544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3292	41535	141970	3292	2928	128	41	11	9	237	168	36	15	736	803	179	479	1428	1865	1733	1186	25	10	2	15	1	41	20	262	129	97	255	301	324	158	167	237	96	275	375	394	159	332	193	263	190	176	913	88	208	123	117	651	17	8	3	0	63	18	5	0	27	7	5	0	137	313	158	62	192	494	264	111	137	214	145	59	106	191	209	124	44	73	15	5	48	56	14	4
67	060670025	9	6	5	2	473	0	0	0	0	0	0	0	0	62	38	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	8	51	41	39	352	0	0	0	0	17	64	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	422	0	0	0	0	0	0	0	23	46	49	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	93	224	0	0	0	0	0	0	0	122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1229	13131	51273	1229	1129	53	4	5	2	147	32	21	7	300	215	54	251	563	666	809	257	10	3	1	6	1	17	12	113	35	29	97	148	158	50	46	64	33	103	186	174	50	55	86	120	100	97	405	22	44	29	27	133	4	2	0	2	11	0	2	0	7	0	2	1	51	210	65	18	84	275	70	35	42	52	24	17	24	41	28	29	21	31	6	1	20	28	5	0
67	060670026	9	6	5	2	511	0	0	0	0	0	0	0	0	63	31	0	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	28	74	46	75	304	0	0	0	0	23	55	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	29	447	0	0	0	0	0	0	0	21	54	59	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	135	230	0	0	0	0	0	0	0	141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1614	13686	65728	1614	1525	143	18	19	11	124	37	24	20	410	253	100	293	723	891	1024	279	27	13	3	15	10	44	13	187	35	71	157	186	174	52	48	54	90	188	229	178	66	86	156	246	115	111	395	38	65	26	20	129	5	1	1	1	17	2	1	0	11	3	3	1	105	236	56	23	165	288	111	41	41	62	31	11	40	51	31	12	41	41	9	1	44	43	8	1
67	060670027	9	6	5	2	348	0	0	0	0	0	0	0	0	32	20	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	28	42	50	99	144	0	0	0	0	12	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	36	293	0	0	0	0	0	0	0	14	23	37	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	101	168	0	0	0	0	0	0	0	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1596	10930	64234	1596	1529	160	14	28	20	170	38	28	25	418	247	152	239	693	901	1070	218	44	10	3	9	18	27	21	174	21	79	170	181	135	45	64	45	124	227	218	132	64	91	210	319	91	103	350	47	70	22	16	65	1	2	4	0	7	0	0	0	5	2	0	0	113	209	82	16	227	261	128	36	47	45	16	5	44	41	12	9	56	29	4	0	46	31	9	0
67	060670028	9	6	5	2	247	0	0	0	0	0	0	0	0	12	12	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	18	7	39	108	66	0	0	0	0	14	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	208	0	0	0	0	0	0	0	9	12	11	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	86	109	0	0	0	0	0	0	0	38	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1221	10057	50425	1221	1142	186	16	22	10	153	15	27	15	272	216	128	127	509	712	880	104	30	13	2	3	13	6	23	146	25	57	106	126	84	35	75	54	100	138	158	107	57	96	146	237	83	87	327	11	38	18	8	29	4	3	0	1	6	0	1	0	1	0	2	1	88	136	89	22	157	206	131	49	23	26	6	3	16	18	9	3	23	29	11	0	44	28	9	2
67	060670029	9	6	5	2	775	0	0	0	0	0	0	0	0	96	78	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	44	89	88	88	527	0	0	0	0	38	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	60	630	0	0	0	0	0	0	0	44	94	114	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	246	289	0	0	0	0	0	0	0	234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2701	30862	110633	2701	2393	268	48	41	13	201	85	35	18	572	624	173	410	1101	1600	1708	583	42	9	2	14	5	40	23	275	118	91	221	248	207	69	147	191	122	282	358	264	106	275	186	330	160	178	854	52	142	77	62	249	8	4	1	1	14	7	1	1	7	2	0	0	135	260	141	93	228	432	266	154	92	105	59	25	80	93	92	36	51	62	10	0	64	69	18	0
67	060670030	9	6	5	2	950	0	0	0	0	0	0	0	0	206	121	0	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	74	111	103	151	578	0	0	0	0	91	153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	91	703	0	0	0	0	0	0	0	85	166	191	0	0	0	0	0	0	0	0	0	0	40	0	0	0	0	0	0	0	289	429	0	0	0	0	0	0	0	408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3414	42020	140397	3414	2986	431	66	70	26	228	113	36	25	710	858	234	360	1458	1957	2081	815	59	19	4	12	12	34	20	359	173	132	236	319	248	118	229	254	176	318	405	314	138	346	224	365	164	225	1102	64	180	108	103	362	16	7	5	2	28	6	3	0	10	6	10	1	170	311	207	130	270	487	296	208	94	143	102	43	106	131	155	45	64	83	31	0	83	72	28	2
67	06067003101	9	6	5	2	384	0	0	0	0	0	0	0	0	69	58	0	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	28	50	22	58	265	0	0	0	0	33	56	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	30	301	0	0	0	0	0	0	0	28	76	63	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	128	168	0	0	0	0	0	0	0	148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1609	19039	61637	1609	1390	293	38	28	16	113	42	15	13	359	438	101	146	705	903	1016	356	37	11	2	9	2	7	10	159	82	67	154	144	108	62	89	137	108	153	170	159	72	105	98	225	63	116	513	21	90	35	36	173	2	2	1	1	21	1	1	0	5	2	1	1	109	140	97	71	153	210	122	114	58	63	40	7	54	67	43	22	38	30	9	3	35	36	6	1
67	06067003102	9	6	5	2	346	0	0	0	0	0	0	0	0	81	50	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	30	35	48	47	211	0	0	0	0	44	64	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	27	259	0	0	0	0	0	0	0	31	54	88	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	93	163	0	0	0	0	0	0	0	174	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1423	17978	57812	1423	1238	211	26	21	10	105	55	20	10	310	375	96	143	601	821	857	370	33	9	1	6	2	9	6	128	68	34	129	129	102	44	95	117	65	134	186	125	68	128	88	165	61	92	453	28	78	44	41	179	0	3	1	0	3	0	1	0	1	6	1	0	68	116	87	49	116	199	137	87	57	68	46	19	34	63	53	30	25	31	4	0	28	34	5	0
67	06067003201	9	6	5	2	442	0	0	0	0	0	0	0	0	49	33	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	27	48	53	92	213	0	0	0	0	32	43	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	345	0	0	0	0	0	0	0	34	38	55	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	147	204	0	0	0	0	0	0	0	100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2033	15727	81667	2033	1916	327	44	46	20	155	17	15	12	543	411	182	180	919	1114	1304	333	57	30	4	6	14	7	15	264	49	121	178	236	161	78	96	68	157	239	264	172	91	122	185	341	145	116	517	35	83	80	40	94	32	14	22	5	10	3	2	4	46	41	29	14	152	226	128	43	228	296	165	65	57	105	27	6	44	61	29	3	60	42	14	0	82	52	14	0
67	06067003202	9	6	5	2	483	0	0	0	0	0	0	0	0	92	64	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	45	33	34	70	315	0	0	0	0	54	89	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	346	0	0	0	0	0	0	0	39	72	121	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	154	212	0	0	0	0	0	0	0	198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1850	22059	84852	1850	1673	249	30	30	11	142	54	25	7	391	526	131	175	762	1089	1143	448	31	16	1	5	4	8	11	185	65	55	125	143	132	69	173	113	109	150	167	158	107	287	143	226	68	119	585	40	95	50	46	219	8	4	3	4	5	2	2	2	15	8	6	4	92	150	154	46	143	218	253	88	43	70	70	19	42	71	111	22	32	30	16	1	55	25	22	3
67	060670033	9	6	5	2	921	0	0	0	0	0	0	0	0	212	110	0	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	36	204	95	105	481	0	0	0	0	89	177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	51	701	0	0	0	0	0	0	0	72	164	218	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	241	352	0	0	0	0	0	0	0	415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2756	42899	119518	2756	2328	126	23	11	8	187	117	16	9	539	769	144	257	1221	1536	1550	913	28	7	1	14	1	19	14	206	174	75	143	240	246	111	233	256	83	164	255	297	120	363	111	190	122	133	993	44	123	96	75	575	30	17	13	4	148	50	13	2	80	65	13	4	86	255	187	101	129	365	274	152	82	154	135	69	67	123	183	102	35	57	14	5	36	45	13	2
67	060670034	9	6	5	2	891	0	0	0	0	0	0	0	0	199	89	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	44	133	132	182	383	0	0	0	0	79	171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	81	639	0	0	0	0	0	0	0	68	174	162	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	191	380	0	0	0	0	0	0	0	423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2675	38486	115868	2675	2257	163	32	23	8	213	98	24	11	465	776	160	232	1150	1525	1585	823	33	7	0	1	5	9	20	192	174	99	119	207	211	113	229	245	105	164	224	264	140	384	156	236	96	120	977	45	116	71	63	530	35	26	8	0	77	32	5	1	57	46	12	2	105	241	171	103	156	343	308	160	60	114	150	65	61	102	189	82	34	44	12	6	44	32	19	3
67	06067003501	9	6	5	2	406	0	0	0	0	0	0	0	0	74	35	0	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	26	51	54	68	186	0	0	0	0	47	56	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	315	0	0	0	0	0	0	0	29	49	65	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	116	151	0	0	0	0	0	0	0	148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1449	17841	60579	1449	1291	157	21	19	9	106	31	25	10	308	353	102	171	626	822	898	323	16	11	4	4	10	11	17	155	55	68	108	129	122	48	99	102	85	130	166	133	46	159	119	174	87	86	433	23	57	37	32	173	17	15	5	0	36	4	4	0	27	21	9	1	72	150	92	37	130	210	127	79	44	55	40	16	29	54	62	23	39	29	10	1	40	24	11	0
67	06067003502	9	6	5	2	487	0	0	0	0	0	0	0	0	93	44	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	40	59	55	90	232	0	0	0	0	39	79	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	39	373	0	0	0	0	0	0	0	43	62	99	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	137	186	0	0	0	0	0	0	0	194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1597	22847	64434	1597	1356	214	24	14	4	91	31	13	4	330	428	122	163	693	903	1020	381	16	9	1	7	2	4	14	144	100	64	126	122	117	49	112	141	80	129	180	129	65	179	90	161	69	103	598	32	62	52	33	203	18	8	2	1	49	23	8	0	36	24	24	2	85	147	103	80	123	210	164	109	60	55	42	18	44	62	68	33	34	30	15	2	33	25	9	1
67	060670036	9	6	5	2	321	0	0	0	0	0	0	0	0	40	14	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	22	37	44	69	154	0	0	0	0	10	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	254	0	0	0	0	0	0	0	24	22	38	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	96	147	0	0	0	0	0	0	0	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1076	10535	43422	1076	988	261	28	26	15	73	26	16	7	232	246	91	144	419	658	745	176	24	7	2	5	3	6	9	100	27	42	89	100	81	36	44	61	77	141	151	92	49	87	90	187	66	85	317	22	39	35	20	59	4	3	0	3	3	1	0	0	9	1	2	2	70	124	56	25	140	174	104	52	26	35	16	2	32	31	23	9	16	11	5	0	31	30	6	0
67	060670037	9	6	5	2	260	0	0	0	0	0	0	0	0	8	16	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	33	31	39	78	91	0	0	0	0	11	8	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	214	0	0	0	0	0	0	0	11	11	18	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	79	141	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1228	9419	50618	1228	1160	283	28	52	21	121	16	12	8	295	239	107	136	518	710	874	137	32	13	1	4	9	4	9	144	20	72	97	106	90	56	75	48	106	147	155	111	53	89	155	255	75	71	316	18	41	23	14	42	7	2	1	2	4	0	0	0	6	4	5	1	92	123	104	18	165	209	115	45	23	37	20	2	14	27	12	3	36	21	6	0	49	20	12	1
67	060670038	9	6	5	2	763	0	0	0	0	0	0	0	0	80	49	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	50	63	125	332	214	0	0	0	0	25	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	82	586	0	0	0	0	0	0	0	38	57	104	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	238	331	0	0	0	0	0	0	0	192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2494	31372	104918	2494	2190	256	35	38	14	271	67	35	11	480	684	182	239	1018	1476	1778	422	37	11	2	10	5	5	21	204	120	109	158	188	150	100	193	185	134	226	278	219	165	273	168	334	131	164	983	25	73	43	47	237	12	3	2	0	55	23	1	2	11	3	5	0	152	218	206	94	245	381	338	147	53	58	71	26	34	62	84	38	44	44	10	1	51	43	13	0
67	060670039	9	6	5	2	822	0	0	0	0	0	0	0	0	182	78	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	40	165	81	97	399	0	0	0	0	66	168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	49	592	0	0	0	0	0	0	0	62	154	178	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	189	311	0	0	0	0	0	0	0	400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2346	36794	103140	2346	1968	109	26	7	4	154	84	12	12	455	671	109	217	1051	1294	1349	766	23	5	0	5	2	9	13	175	152	57	124	187	197	102	231	225	67	118	209	226	115	332	110	175	98	100	866	42	110	66	64	484	34	24	8	0	128	28	12	1	65	50	24	0	79	211	170	87	109	293	259	142	57	118	143	60	42	88	179	78	29	45	14	4	26	40	10	5
67	06067004001	9	6	5	2	1145	0	0	0	0	0	0	0	0	260	132	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	68	161	158	204	519	0	0	0	0	98	240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	91	762	0	0	0	0	0	0	0	96	201	295	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	269	422	0	0	0	0	0	0	0	598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3573	48386	157984	3573	3109	178	34	20	9	257	129	28	10	680	1006	230	332	1564	2010	2077	1104	42	8	3	6	1	9	13	309	198	112	229	264	217	203	340	264	133	259	302	329	252	468	189	321	137	177	1253	79	163	77	94	690	69	50	15	4	226	67	20	2	142	127	43	8	154	247	304	130	226	389	450	175	119	157	203	66	82	158	235	86	49	63	34	2	62	63	31	3
67	06067004004	9	6	5	2	1267	0	0	0	0	0	0	0	0	278	135	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	89	214	143	216	538	0	0	0	0	115	262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	69	873	0	0	0	0	0	0	0	91	273	286	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	263	479	0	0	0	0	0	0	0	620	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4102	39793	196022	4102	4016	161	54	21	7	278	150	44	13	1006	1000	213	473	1843	2259	2170	1403	31	10	2	15	5	8	23	435	37	172	222	322	516	278	296	49	195	264	454	616	297	385	193	322	202	232	1220	124	246	170	127	738	69	73	39	0	234	81	24	5	111	87	35	6	153	412	308	22	226	636	378	34	138	310	226	12	129	302	271	14	72	102	34	3	88	108	28	0
67	06067004005	9	6	5	2	827	0	0	0	0	0	0	0	0	254	78	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	38	134	85	122	425	0	0	0	0	65	213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	54	542	0	0	0	0	0	0	0	77	206	225	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	158	317	0	0	0	0	0	0	0	492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2862	30084	134762	2862	2700	96	35	21	2	206	127	31	8	653	754	192	312	1233	1629	1423	1096	21	2	1	15	3	6	14	281	64	123	181	159	270	194	241	97	149	237	240	337	216	354	175	285	99	147	718	90	201	101	110	593	40	35	7	2	116	43	13	1	63	71	29	2	113	189	200	33	209	344	286	49	116	169	204	30	98	176	254	47	53	59	25	1	65	51	25	1
67	06067004006	9	6	5	2	833	0	0	0	0	0	0	0	0	159	72	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	36	118	85	161	390	0	0	0	0	70	170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	56	564	0	0	0	0	0	0	0	63	171	170	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	194	308	0	0	0	0	0	0	0	402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2810	28788	120987	2810	2580	149	46	25	9	183	102	42	7	634	679	220	327	1203	1607	1570	870	35	6	1	7	7	10	20	284	95	126	206	201	231	135	208	136	177	259	284	323	170	258	195	346	140	134	754	91	152	78	69	480	37	34	9	3	133	41	20	1	89	66	29	4	145	234	180	48	233	403	249	77	108	131	140	44	101	142	149	55	52	59	18	3	74	50	25	3
67	06067004007	9	6	5	2	2054	0	0	0	0	0	0	0	0	400	218	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	128	276	284	393	824	0	0	0	0	134	437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	141	1414	0	0	0	0	0	0	0	147	429	426	0	0	0	0	0	0	0	0	0	0	46	0	0	0	0	0	0	0	423	803	0	0	0	0	0	0	0	970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	8236	50284	361573	8236	8183	477	154	81	12	520	299	97	29	2685	1746	607	1156	3696	4539	4101	2888	117	21	2	26	4	16	25	1037	27	268	713	1056	902	369	362	26	372	994	1355	979	354	457	624	1003	432	457	1584	355	744	393	346	1051	119	139	66	5	269	173	64	7	242	238	111	17	371	882	322	15	683	1368	447	14	396	777	323	10	396	684	292	11	166	258	77	2	217	249	65	1
67	06067004008	9	6	5	2	644	0	0	0	0	0	0	0	0	111	62	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	46	89	59	91	305	0	0	0	0	48	132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	437	0	0	0	0	0	0	0	45	133	114	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	137	236	0	0	0	0	0	0	0	288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2187	15176	98106	2187	2174	122	36	28	8	147	94	18	6	687	474	110	291	1010	1177	1109	765	35	6	0	8	1	4	7	250	8	60	181	307	254	93	106	5	82	212	383	271	102	122	123	209	107	158	513	86	148	115	94	318	30	31	18	0	90	45	12	4	48	60	23	3	97	259	95	4	143	373	132	5	95	217	81	3	90	199	78	1	34	74	20	1	46	63	13	0
67	060670041	9	6	5	2	389	0	0	0	0	0	0	0	0	62	37	0	0	0	0	0	0	0	0	0	0	0	5	0	0	0	0	0	0	0	43	34	51	94	156	0	0	0	0	29	67	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	32	307	0	0	0	0	0	0	0	25	52	51	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	124	176	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1553	15549	65564	1553	1436	275	23	41	7	118	24	12	9	377	370	127	124	701	854	1030	267	31	18	1	2	8	5	19	175	53	83	121	148	124	67	104	63	101	177	171	111	80	149	138	239	99	87	465	23	51	40	29	122	18	9	5	3	54	11	7	3	21	16	19	1	102	174	119	43	165	197	176	51	41	51	29	10	47	35	40	11	36	31	18	0	41	38	9	0
67	06067004201	9	6	5	2	656	0	0	0	0	0	0	0	0	66	44	0	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	49	51	113	278	175	0	0	0	0	29	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	57	531	0	0	0	0	0	0	0	30	48	88	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	233	291	0	0	0	0	0	0	0	159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2234	24890	91180	2234	1993	235	30	25	11	273	35	24	13	439	572	175	203	928	1306	1626	325	47	13	1	2	13	4	17	187	106	101	154	209	137	89	132	135	148	218	239	230	144	193	189	333	127	142	836	32	53	30	34	176	9	4	1	0	23	7	2	0	16	7	4	2	152	232	172	81	253	377	256	103	32	63	30	21	44	46	58	31	47	33	11	2	40	35	17	1
67	06067004202	9	6	5	2	574	0	0	0	0	0	0	0	0	49	34	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	37	41	94	266	150	0	0	0	0	22	35	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	49	471	0	0	0	0	0	0	0	24	38	60	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	193	274	0	0	0	0	0	0	0	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2064	19447	90500	2064	1938	274	30	38	12	242	31	28	12	444	487	169	208	843	1221	1521	254	42	15	2	5	7	2	16	198	46	99	150	184	123	85	157	81	139	226	227	179	147	224	205	340	145	150	680	27	58	33	27	110	8	4	3	2	20	6	0	0	8	4	5	3	154	206	194	38	253	310	298	69	36	48	31	8	33	37	50	10	38	40	14	1	48	36	18	2
67	06067004203	9	6	5	2	323	0	0	0	0	0	0	0	0	28	14	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	25	18	47	140	88	0	0	0	0	11	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	257	0	0	0	0	0	0	0	16	20	24	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	103	157	0	0	0	0	0	0	0	51	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1305	10314	55141	1305	1263	204	27	29	15	127	19	24	13	280	282	116	145	531	774	958	149	37	12	1	6	4	3	7	130	19	61	108	133	79	56	75	24	109	174	167	120	92	87	158	247	80	102	370	19	40	18	11	60	8	2	1	0	7	0	0	0	7	5	2	2	112	138	104	12	194	230	151	19	23	33	15	6	29	22	16	4	23	26	11	0	37	22	10	1
67	060670043	9	6	5	2	554	0	0	0	0	0	0	0	0	38	26	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	64	34	102	225	136	0	0	0	0	20	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	60	439	0	0	0	0	0	0	0	24	31	51	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	177	256	0	0	0	0	0	0	0	101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2140	17717	87270	2140	2037	270	36	38	21	228	29	31	12	514	417	228	217	929	1211	1518	266	47	21	3	4	11	10	24	234	44	162	183	205	133	91	113	58	197	244	251	169	150	142	227	357	125	165	645	45	74	33	24	91	16	15	4	1	18	2	2	0	19	5	11	2	194	217	150	37	295	327	249	48	56	59	28	6	42	44	23	9	59	42	23	1	58	37	14	1
67	06067004401	9	6	5	2	434	0	0	0	0	0	0	0	0	38	30	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	40	34	62	111	179	0	0	0	0	31	42	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	357	0	0	0	0	0	0	0	22	35	52	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	145	204	0	0	0	0	0	0	0	91	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1636	16805	69008	1636	1464	267	27	30	18	138	27	19	13	374	376	134	147	731	905	1126	258	42	17	1	6	8	6	13	159	66	78	128	157	120	61	124	106	104	142	175	127	74	179	141	287	96	95	507	31	61	41	26	96	5	6	1	2	6	0	0	0	3	3	8	3	113	175	131	55	145	219	195	93	39	57	30	11	32	35	40	14	35	26	18	0	41	28	10	0
67	06067004402	9	6	5	2	290	0	0	0	0	0	0	0	0	25	25	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	29	28	36	88	114	0	0	0	0	14	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	230	0	0	0	0	0	0	0	17	23	27	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	93	152	0	0	0	0	0	0	0	54	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1172	10693	48209	1172	1074	214	17	32	14	109	10	8	8	268	250	96	126	489	683	852	146	21	11	1	3	7	2	11	119	35	65	93	115	78	41	61	64	86	111	153	100	55	113	131	218	73	84	347	21	40	21	15	50	3	2	1	0	4	0	0	0	3	4	3	2	95	136	79	29	125	195	138	56	24	33	14	6	21	23	19	6	27	17	8	0	33	23	11	0
67	060670045	9	6	5	2	486	0	0	0	0	0	0	0	0	97	55	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	59	42	70	113	194	0	0	0	0	54	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	58	360	0	0	0	0	0	0	0	40	73	86	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	134	250	0	0	0	0	0	0	0	194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2292	20819	103923	2292	2127	320	56	46	18	186	53	27	11	510	556	185	221	928	1364	1473	468	54	10	3	2	12	1	27	242	61	96	155	176	135	82	223	106	175	223	251	146	126	338	249	392	126	116	590	43	117	57	36	216	18	6	4	0	19	6	3	0	13	4	5	4	135	181	197	43	249	278	306	83	47	74	79	16	42	57	135	17	47	43	21	1	71	36	18	5
67	06067004601	9	6	5	2	575	0	0	0	0	0	0	0	0	98	59	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	73	52	68	131	270	0	0	0	0	57	82	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	66	434	0	0	0	0	0	0	0	50	65	111	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	181	282	0	0	0	0	0	0	0	210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2493	25531	100358	2493	2239	412	58	51	24	170	49	28	18	557	569	197	267	1070	1423	1573	508	70	28	3	14	8	6	11	271	100	123	199	251	168	82	146	155	179	269	287	203	109	222	215	378	132	161	688	45	121	86	50	208	11	13	6	3	5	5	1	0	11	4	10	4	151	245	139	83	256	335	239	124	70	94	68	15	70	88	73	31	62	61	15	0	72	44	15	0
67	06067004602	9	6	5	2	369	0	0	0	0	0	0	0	0	70	47	0	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	47	30	55	79	164	0	0	0	0	43	52	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	292	0	0	0	0	0	0	0	24	48	73	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	106	178	0	0	0	0	0	0	0	145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1607	16609	63056	1607	1437	262	30	37	22	136	39	19	13	346	380	135	164	660	947	1058	293	36	17	4	0	9	2	12	177	66	72	121	170	95	56	81	102	120	197	194	123	79	131	148	259	95	97	458	34	65	28	30	135	10	3	6	1	9	3	3	0	3	4	2	1	108	158	89	53	195	216	156	85	35	58	39	14	37	52	42	17	29	41	7	0	52	36	12	1
67	060670047	9	6	5	2	643	0	0	0	0	0	0	0	0	126	82	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	67	73	103	167	238	0	0	0	0	63	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	65	466	0	0	0	0	0	0	0	53	98	118	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	209	279	0	0	0	0	0	0	0	242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2623	26505	104958	2623	2351	273	45	40	18	239	82	41	17	540	692	211	258	1062	1561	1683	555	58	16	3	6	13	7	25	255	107	124	189	223	183	76	159	164	183	325	302	231	133	221	243	414	155	132	740	42	122	57	53	280	19	2	5	1	27	9	1	0	17	10	13	2	169	222	155	75	318	372	251	121	62	111	62	29	77	83	86	43	56	51	12	3	67	53	14	0
67	06067004801	9	6	5	2	365	0	0	0	0	0	0	0	0	58	29	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	27	25	40	133	160	0	0	0	0	26	35	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	47	285	0	0	0	0	0	0	0	20	32	50	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	126	165	0	0	0	0	0	0	0	107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1561	12246	64905	1561	1492	103	18	18	13	154	21	20	18	382	354	147	156	681	880	986	265	51	30	2	9	12	3	12	189	25	101	148	140	126	56	86	43	131	180	184	138	85	119	150	214	92	93	437	24	72	54	35	79	19	28	10	5	5	1	1	2	25	31	27	18	135	138	94	24	179	230	144	42	46	66	33	1	43	41	35	1	39	46	11	0	51	29	16	0
67	06067004802	9	6	5	2	368	0	0	0	0	0	0	0	0	97	56	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	44	52	52	97	142	0	0	0	0	44	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	258	0	0	0	0	0	0	0	41	63	83	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	143	134	0	0	0	0	0	0	0	186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1747	17082	74380	1747	1646	168	30	24	4	113	51	16	11	411	423	122	166	765	982	1045	452	43	8	1	4	5	1	6	183	44	79	151	181	115	85	110	57	118	183	207	178	98	142	137	218	84	118	488	36	92	61	50	213	13	7	4	2	9	2	1	0	13	6	5	3	117	167	109	32	168	248	160	44	68	84	67	11	63	80	66	13	32	29	13	1	49	46	11	0
67	06067004903	9	6	5	2	421	0	0	0	0	0	0	0	0	44	29	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	31	31	82	163	108	0	0	0	0	34	44	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	45	330	0	0	0	0	0	0	0	17	35	52	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	120	222	0	0	0	0	0	0	0	110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2055	12873	91860	2055	2037	179	27	21	12	219	34	23	12	499	443	171	242	824	1230	1357	373	50	16	4	3	7	5	16	224	7	97	138	200	159	101	123	11	173	272	278	196	110	191	236	408	144	119	451	29	89	53	37	165	18	14	7	5	7	4	4	0	27	25	18	5	148	232	139	5	288	344	194	8	40	70	59	2	50	64	86	2	30	40	21	0	68	48	16	1
67	06067004904	9	6	5	2	726	0	0	0	0	0	0	0	0	179	107	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	73	99	86	162	281	0	0	0	0	57	192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	45	465	0	0	0	0	0	0	0	180	135	160	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	246	254	0	0	0	0	0	0	0	385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2634	31171	107113	2634	2311	231	30	18	17	228	143	38	13	562	746	158	257	1136	1498	1536	794	52	9	3	6	2	5	23	204	128	118	175	237	193	110	176	195	146	251	278	248	162	220	164	319	115	149	790	60	140	94	72	429	11	6	3	3	11	3	1	0	16	4	7	1	129	245	172	78	226	341	228	119	99	133	97	47	101	121	124	73	45	33	11	3	48	42	19	3
67	06067004905	9	6	5	2	674	0	0	0	0	0	0	0	0	103	60	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	73	74	93	215	215	0	0	0	0	58	84	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	85	513	0	0	0	0	0	0	0	39	77	114	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	209	309	0	0	0	0	0	0	0	215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2562	22283	114093	2562	2435	282	53	41	14	239	52	43	15	549	630	206	280	1041	1521	1689	511	51	21	1	5	7	4	15	259	70	119	180	210	160	125	177	57	214	266	249	238	206	291	220	413	168	152	735	43	128	66	47	227	10	10	3	3	18	7	3	2	12	7	6	3	157	225	209	52	287	351	363	43	62	81	69	15	86	81	104	13	54	50	17	3	76	34	24	1
67	06067004906	9	6	5	2	159	0	0	0	0	0	0	0	0	33	22	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	21	21	42	52	36	0	0	0	0	22	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	13	121	0	0	0	0	0	0	0	13	30	29	0	0	0	0	0	0	0	0	0	0	5	0	0	0	0	0	0	0	49	70	0	0	0	0	0	0	0	71	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	795	4405	33960	795	795	55	17	8	2	72	19	9	1	224	182	58	93	320	476	469	205	17	4	1	3	1	3	3	89	0	32	79	95	53	21	39	0	51	125	137	76	38	48	60	123	64	81	140	20	37	48	31	69	7	5	6	1	4	1	0	0	4	13	11	3	51	75	40	0	102	137	63	0	36	46	14	0	41	50	18	0	14	19	6	0	25	21	4	0
67	06067005001	9	6	5	2	707	0	0	0	0	0	0	0	0	131	94	0	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	90	96	117	155	248	0	0	0	0	76	120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	72	495	0	0	0	0	0	0	0	68	121	131	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	224	328	0	0	0	0	0	0	0	277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3125	25430	137812	3125	3029	329	81	49	22	223	86	40	16	763	757	220	328	1365	1761	1873	764	66	19	3	10	19	10	13	349	37	189	252	260	248	174	206	60	215	345	347	313	218	263	281	434	191	197	771	62	169	115	94	324	10	11	8	2	38	13	6	3	15	25	12	7	217	269	223	28	347	439	309	43	100	152	122	8	99	138	128	17	81	62	28	1	80	63	34	0
67	06067005002	9	6	5	2	471	0	0	0	0	0	0	0	0	122	65	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	32	59	82	112	169	0	0	0	0	58	105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	56	328	0	0	0	0	0	0	0	55	62	117	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	141	195	0	0	0	0	0	0	0	223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2135	14145	111403	2135	2105	166	33	30	6	189	80	31	11	539	542	143	265	844	1290	1318	516	43	10	0	6	3	4	15	218	11	65	148	158	106	74	280	18	119	208	192	157	127	467	196	355	135	192	439	38	142	80	88	167	8	6	4	0	8	3	2	0	15	5	11	0	106	153	204	11	205	239	386	12	51	62	116	0	42	75	164	5	34	36	28	0	58	24	37	1
67	060670053	9	6	5	2	45	0	0	0	0	0	0	0	0	4	8	0	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	3	7	6	16	13	0	0	0	0	7	4	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	8	38	0	0	0	0	0	0	0	1	4	10	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	13	32	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	588	2180	26061	588	580	46	7	4	4	40	6	13	25	229	60	35	48	344	245	270	85	24	13	3	2	14	4	89	85	0	19	74	125	64	22	39	8	30	47	66	28	14	52	76	108	25	17	45	18	30	17	9	12	4	4	1	2	1	2	1	0	8	4	6	0	34	77	38	0	39	37	41	5	12	31	9	0	9	7	13	3	18	31	8	0	12	9	6	0
67	06067005402	9	6	5	2	194	0	0	0	0	0	0	0	0	45	36	0	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	25	30	30	28	66	0	0	0	0	17	57	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	18	127	0	0	0	0	0	0	0	22	32	67	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	56	71	0	0	0	0	0	0	0	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1221	4404	48826	1221	1213	65	18	20	3	75	53	23	2	456	193	161	180	566	655	587	428	22	5	2	3	2	7	6	159	3	113	244	91	45	19	51	5	155	206	78	56	29	126	170	244	76	42	55	104	160	80	33	51	7	7	0	3	4	1	1	0	7	2	0	0	145	61	32	2	184	80	79	4	145	47	32	1	101	36	65	1	48	24	6	0	57	15	9	0
67	06067005502	9	6	5	2	396	0	0	0	0	0	0	0	0	104	67	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	50	58	68	80	147	0	0	0	0	51	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	51	279	0	0	0	0	0	0	0	38	77	114	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	128	182	0	0	0	0	0	0	0	207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2122	18690	83610	2122	1932	142	32	42	14	139	72	42	15	547	472	191	262	914	1208	1104	585	59	13	7	13	6	10	19	307	82	106	215	193	148	59	112	107	158	285	226	180	87	166	191	298	109	98	409	59	173	70	47	237	8	11	1	2	3	3	1	0	6	5	5	4	129	146	89	60	218	220	164	79	102	108	59	21	94	99	75	28	61	62	19	1	89	64	11	1
67	06067005804	5	6	5	2	540	0	0	0	0	0	0	0	0	248	81	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	149	95	0	0	0	0	0	0	0	404	31	111	18	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	60	292	0	0	0	0	0	0	0	50	241	183	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	118	176	0	0	0	0	0	0	0	422	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2069	26362	97733	2069	1921	25	27	7	4	144	131	24	10	486	594	99	172	991	1078	768	1075	27	3	0	4	2	7	6	177	70	105	113	138	219	153	193	78	63	105	165	249	187	231	60	99	73	72	464	78	138	92	90	677	12	11	10	1	16	5	6	0	2	7	3	0	62	122	111	29	57	194	163	30	109	182	214	40	79	178	226	47	36	41	19	1	21	35	23	1
67	06067005901	5	6	3	2	29	103	492	35	0	0	0	0	0	410	11	736	73	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	362	247	0	0	0	0	0	0	0	695	89	350	55	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	174	601	0	0	0	0	0	0	0	157	436	456	0	0	0	0	0	0	0	0	0	0	39	0	0	0	0	0	0	0	342	351	0	0	0	0	0	0	0	935	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4581	56409	214572	4581	4028	102	54	14	8	301	285	53	21	1010	1487	212	354	2006	2578	1871	2203	64	10	7	15	5	14	16	390	218	151	219	365	342	225	492	338	162	225	418	467	272	703	162	291	151	175	1096	173	367	297	233	1137	14	16	5	1	14	12	4	0	6	9	6	0	96	274	244	130	155	418	385	176	172	340	418	87	150	354	534	156	68	73	48	3	62	87	50	7
67	06067005902	5	6	3	2	28	100	449	50	0	0	0	0	0	356	7	550	87	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	358	256	0	0	0	0	0	0	0	511	95	303	40	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	169	585	0	0	0	0	0	0	0	127	376	340	0	0	0	0	0	0	0	0	0	0	49	0	0	0	0	0	0	0	390	313	0	0	0	0	0	0	0	736	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4797	51710	213113	4797	4456	116	60	25	14	297	255	66	35	1134	1267	344	556	2065	2732	2067	1986	109	18	7	23	9	32	39	507	140	206	329	424	398	207	362	202	296	406	537	502	238	553	266	427	192	191	990	190	424	219	185	967	17	7	6	1	7	5	3	2	2	2	2	1	160	314	236	77	268	515	385	113	220	356	282	60	252	376	353	87	88	112	34	2	123	108	37	2
67	06067006001	5	6	3	2	19	70	388	54	0	0	0	0	0	289	8	420	54	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	292	173	0	0	0	0	0	0	0	495	55	192	37	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	142	475	0	0	0	0	0	0	0	100	285	266	0	0	0	0	0	0	0	0	0	0	43	0	0	0	0	0	0	0	258	282	0	0	0	0	0	0	0	615	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3467	40178	147580	3467	3094	105	44	19	6	217	197	46	15	833	921	204	373	1579	1888	1556	1419	71	15	1	15	8	23	16	344	157	152	247	308	290	157	269	217	176	259	363	333	213	327	168	276	163	147	803	127	285	162	150	696	14	8	2	2	19	13	2	1	9	5	3	0	112	252	182	83	190	353	262	125	177	262	204	69	142	242	233	90	67	57	31	6	74	69	37	2
67	06067006002	5	6	5	2	563	0	0	0	0	0	0	0	0	262	101	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	184	159	0	0	0	0	0	0	0	299	54	175	21	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	73	373	0	0	0	0	0	0	0	88	191	187	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	220	164	0	0	0	0	0	0	0	413	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2616	26346	108366	2616	2362	75	33	16	6	142	124	39	21	658	651	195	343	1108	1508	1223	1010	59	15	3	19	1	8	16	262	92	111	228	230	210	86	151	162	167	261	296	257	106	259	162	278	106	129	548	119	259	130	91	411	2	2	1	1	3	4	1	0	6	5	0	0	114	173	102	63	189	291	190	101	137	195	116	29	135	183	155	60	48	52	17	0	71	58	15	1
67	06067006202	9	6	5	2	225	0	0	0	0	0	0	0	0	78	42	0	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	41	29	39	39	87	0	0	0	0	37	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	23	157	0	0	0	0	0	0	0	36	51	72	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	88	92	0	0	0	0	0	0	0	139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1487	11730	60981	1487	1391	118	23	22	12	116	65	34	14	393	338	127	186	641	846	762	399	53	16	3	5	4	7	12	225	35	65	123	167	121	50	80	62	108	184	187	139	64	102	148	197	73	84	260	56	115	53	34	141	3	1	0	0	4	0	3	0	2	2	0	0	68	128	70	21	146	185	98	46	55	86	48	12	59	72	55	12	43	48	9	2	63	49	7	3
67	060670063	9	6	5	2	331	0	0	0	0	0	0	0	0	74	48	0	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	46	49	63	64	142	0	0	0	0	36	67	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	236	0	0	0	0	0	0	0	31	71	76	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	129	155	0	0	0	0	0	0	0	142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1827	14875	80205	1827	1759	142	31	36	12	142	61	36	18	488	413	137	193	827	1000	1012	398	69	16	2	8	6	23	20	274	23	77	129	241	167	83	108	45	109	210	226	161	88	162	197	198	93	109	415	54	95	56	57	137	1	2	2	3	4	1	2	0	4	1	2	0	100	192	114	15	144	241	170	37	47	99	57	9	63	60	57	8	29	79	13	0	72	64	17	0
67	060670064	9	6	5	2	366	0	0	0	0	0	0	0	0	82	59	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	66	36	72	70	133	0	0	0	0	44	78	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	251	0	0	0	0	0	0	0	42	51	88	0	0	0	0	0	0	0	0	0	0	31	0	0	0	0	0	0	0	154	143	0	0	0	0	0	0	0	166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2093	15989	90753	2093	2009	151	32	38	8	169	45	36	32	495	453	146	211	923	1170	1230	418	70	18	6	14	11	13	34	278	29	93	192	238	163	77	131	55	121	238	269	206	97	183	245	235	113	156	481	62	120	58	48	131	5	3	0	0	4	2	1	1	2	0	1	0	113	222	140	25	182	277	221	52	63	91	42	3	73	103	41	3	65	58	17	0	64	60	15	0
67	060670065	9	6	5	2	377	0	0	0	0	0	0	0	0	60	35	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	48	37	103	107	91	0	0	0	0	41	53	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	287	0	0	0	0	0	0	0	22	58	52	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	133	172	0	0	0	0	0	0	0	109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2188	14591	93029	2188	2112	129	36	29	18	259	51	39	28	568	458	164	221	946	1242	1428	329	70	22	3	11	8	7	38	276	30	120	186	273	140	74	126	47	156	252	306	199	116	169	287	368	128	143	504	56	99	47	48	81	17	8	1	1	1	0	1	1	1	3	3	0	147	238	142	27	233	355	243	44	63	83	30	2	59	67	25	3	56	56	15	1	71	63	14	0
67	060670066	9	6	5	2	329	0	0	0	0	0	0	0	0	52	48	0	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	42	40	66	64	109	0	0	0	0	35	63	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	36	231	0	0	0	0	0	0	0	46	46	66	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	130	131	0	0	0	0	0	0	0	128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2110	14963	89352	2110	2008	172	24	29	20	185	62	43	29	554	429	184	250	911	1199	1277	398	70	22	3	11	19	8	28	271	37	107	165	237	169	81	111	64	137	254	295	159	113	175	252	362	106	133	423	67	115	44	36	133	10	2	3	0	4	0	1	0	1	1	0	0	114	216	126	27	215	301	225	49	60	92	39	10	68	67	43	15	61	63	18	0	64	55	9	0
67	06067006701	9	6	5	2	483	0	0	0	0	0	0	0	0	149	60	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	73	60	101	106	166	0	0	0	0	59	108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	53	360	0	0	0	0	0	0	0	59	81	122	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	186	203	0	0	0	0	0	0	0	239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2629	14906	108190	2629	2613	228	56	57	13	200	96	53	14	801	567	204	268	1195	1434	1438	694	66	15	3	12	4	9	23	365	4	146	297	326	227	94	100	12	172	394	404	234	108	109	263	350	155	224	445	71	183	105	117	217	16	4	4	0	3	6	2	0	7	5	1	2	188	273	102	4	312	403	145	9	122	184	66	0	122	144	52	3	93	77	19	0	94	67	15	0
67	06067006702	9	6	5	2	334	0	0	0	0	0	0	0	0	29	11	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	32	21	80	118	91	0	0	0	0	14	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	47	262	0	0	0	0	0	0	0	12	12	26	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	123	143	0	0	0	0	0	0	0	44	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1803	12833	73135	1803	1727	140	8	33	11	223	18	23	19	414	362	182	183	741	1062	1288	165	68	27	4	7	17	4	24	198	23	102	156	185	133	56	85	52	169	241	248	138	89	123	230	342	103	131	482	17	63	23	20	40	24	9	1	9	0	2	0	0	1	0	0	0	153	231	111	21	252	294	182	45	29	32	15	2	35	26	17	7	41	35	9	0	63	40	9	0
67	060670068	9	6	5	2	372	0	0	0	0	0	0	0	0	57	42	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	45	44	53	79	161	0	0	0	0	37	58	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	277	0	0	0	0	0	0	0	26	53	64	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	121	179	0	0	0	0	0	0	0	126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2100	16667	85598	2100	1976	342	45	60	25	157	53	26	25	491	443	180	229	887	1213	1288	378	66	27	5	8	37	9	23	259	49	121	177	210	144	89	99	76	175	250	280	183	89	162	240	341	140	104	463	53	102	62	34	129	5	3	1	3	3	0	2	1	2	3	5	1	145	195	115	38	235	311	189	61	59	74	55	10	52	69	45	15	53	51	14	0	84	47	11	0
67	060670069	9	6	5	2	500	0	0	0	0	0	0	0	0	112	60	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	37	58	75	108	262	0	0	0	0	42	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	63	367	0	0	0	0	0	0	0	48	88	96	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	162	196	0	0	0	0	0	0	0	216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2246	19676	100690	2246	2105	186	33	27	15	186	70	28	16	585	468	166	273	1002	1244	1298	555	68	14	4	11	10	14	16	256	49	75	171	230	205	119	152	92	103	232	242	210	120	244	206	350	115	116	510	67	130	65	52	240	5	3	0	0	6	1	2	0	4	4	2	1	107	222	158	32	184	288	240	66	62	116	84	16	56	96	99	25	42	65	25	0	57	49	18	0
67	06067007001	9	6	5	2	203	0	0	0	0	0	0	0	0	33	26	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	37	23	26	37	95	0	0	0	0	18	32	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	19	179	0	0	0	0	0	0	0	14	26	33	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	57	113	0	0	0	0	0	0	0	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1037	7723	43707	1037	991	289	37	38	18	44	27	17	9	286	203	86	102	485	552	641	196	36	10	3	5	8	4	18	119	17	52	104	124	76	52	60	29	77	121	119	81	41	84	111	172	57	57	245	32	52	33	28	50	1	1	1	1	2	0	0	0	0	2	1	0	69	105	77	14	123	134	95	26	34	51	21	3	28	37	22	3	27	30	12	0	26	19	4	0
67	06067007003	5	6	5	2	352	0	0	0	0	0	0	0	0	143	60	0	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	98	106	0	0	0	0	0	0	0	195	24	70	13	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	34	216	0	0	0	0	0	0	0	45	101	115	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	91	119	0	0	0	0	0	0	0	259	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2510	12783	105024	2510	2480	97	43	28	12	146	139	50	10	875	425	225	447	1168	1342	1012	1065	61	8	1	9	3	17	22	312	11	87	430	205	208	103	124	19	136	462	229	228	112	156	206	346	105	117	238	183	395	135	104	248	9	5	3	1	10	3	2	0	2	4	4	0	157	144	90	6	235	238	128	14	239	195	120	5	229	151	122	4	87	54	14	0	94	50	13	0
67	06067007004	9	6	5	2	476	0	0	0	0	0	0	0	0	91	64	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	56	55	75	93	208	0	0	0	0	46	83	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	393	0	0	0	0	0	0	0	28	66	93	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	122	239	0	0	0	0	0	0	0	187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2534	11754	99227	2534	2531	244	59	60	16	213	64	48	14	802	431	246	361	1110	1424	1428	626	68	17	3	4	2	9	23	356	2	113	339	361	171	56	67	2	208	458	397	210	79	72	298	450	171	171	337	117	190	87	71	162	8	5	5	1	5	6	3	0	6	13	10	1	186	277	69	2	401	387	104	2	135	152	44	0	131	132	33	0	89	86	10	0	89	73	12	0
67	06067007005	9	6	5	2	1047	0	0	0	0	0	0	0	0	176	111	0	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	84	126	147	168	487	0	0	0	0	90	175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	62	832	0	0	0	0	0	0	0	94	139	179	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	292	442	0	0	0	0	0	0	0	408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4373	22515	176593	4373	4366	409	101	79	23	321	142	72	17	1359	730	368	739	1893	2480	2422	1231	102	14	1	22	6	29	21	520	3	191	483	605	382	126	104	4	337	668	733	452	164	125	406	671	329	341	675	181	379	183	132	356	11	17	6	1	14	10	3	3	16	19	7	1	300	526	124	2	532	759	177	2	216	318	86	1	253	266	88	2	109	104	12	0	161	113	20	0
67	06067007006	9	6	5	2	1164	0	0	0	0	0	0	0	0	214	122	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	128	149	181	221	466	0	0	0	0	110	201	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	99	889	0	0	0	0	0	0	0	86	170	235	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	316	577	0	0	0	0	0	0	0	433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4763	29101	196150	4763	4671	615	105	88	46	367	166	66	25	1358	927	394	745	2053	2710	2703	1224	98	29	8	21	8	23	44	609	39	199	468	567	433	177	168	53	330	657	745	529	198	195	439	765	299	307	894	193	377	173	119	360	16	4	7	0	23	14	10	3	20	7	6	5	284	526	215	30	560	775	270	39	197	306	92	8	197	311	98	12	129	121	27	1	166	140	22	0
67	06067007007	9	6	5	2	605	0	0	0	0	0	0	0	0	74	51	0	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	60	71	106	111	248	0	0	0	0	48	73	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	496	0	0	0	0	0	0	0	49	50	73	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	164	315	0	0	0	0	0	0	0	170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2086	20174	90742	2086	1996	484	51	62	22	130	44	18	8	470	496	149	201	904	1182	1342	426	41	11	4	6	4	7	12	229	37	94	169	216	167	80	143	52	123	229	260	231	111	174	154	262	112	138	675	34	109	57	60	168	9	2	1	1	7	4	6	0	3	7	0	1	129	222	151	29	213	328	230	42	70	107	50	5	56	87	41	10	44	40	16	3	59	56	11	2
67	060670071	5	6	3	2	7	26	32	10	0	0	0	0	0	34	1	54	19	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	27	47	0	0	0	0	0	0	0	52	19	37	4	0	0	0	0	0	0	0	0	0	5	0	0	0	0	0	0	0	16	71	0	0	0	0	0	0	0	17	37	49	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	46	41	0	0	0	0	0	0	0	79	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	261	2836	10774	261	232	44	5	4	3	14	11	1	1	77	60	14	19	133	128	151	68	6	1	1	3	0	3	3	25	14	9	13	39	29	10	19	15	11	16	29	31	10	16	9	18	20	16	88	8	14	12	9	25	1	1	0	0	2	0	0	0	0	0	0	0	11	35	14	12	14	36	17	12	5	20	12	1	7	14	7	2	4	7	2	1	3	6	1	1
67	06067007201	5	6	3	2	25	88	241	48	0	0	0	0	0	278	13	327	91	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	182	187	0	0	0	0	0	0	0	237	197	227	46	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	106	324	0	0	0	0	0	0	0	99	200	342	0	0	0	0	0	0	0	0	0	0	53	0	0	0	0	0	0	0	297	176	0	0	0	0	0	0	0	522	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3360	29398	147373	3360	3270	116	48	25	16	200	183	55	22	906	916	206	273	1556	1804	1441	1300	107	19	2	24	9	13	47	408	43	173	236	417	335	176	184	48	207	292	484	367	198	214	135	237	134	179	759	117	256	212	166	554	6	7	4	1	2	2	0	1	7	4	3	0	110	268	199	25	177	404	240	29	186	324	128	17	182	311	141	19	65	106	26	4	94	91	25	3
67	06067007202	5	6	3	2	14	46	132	20	0	0	0	0	0	146	9	156	51	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	98	122	0	0	0	0	0	0	0	131	52	127	25	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	54	163	0	0	0	0	0	0	0	43	83	216	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	170	88	0	0	0	0	0	0	0	267	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1857	17541	80429	1857	1757	86	16	14	10	133	92	23	14	465	524	129	153	835	1023	881	652	49	15	2	9	3	6	19	219	42	75	122	213	154	105	121	58	109	185	249	185	111	125	94	170	82	68	465	57	155	82	72	284	5	9	0	0	1	2	0	0	0	3	0	0	63	143	127	27	115	216	146	42	80	160	77	12	84	151	71	15	33	45	16	2	60	46	16	0
67	06067007203	5	6	3	2	16	83	277	51	0	0	0	0	0	270	14	325	109	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	215	231	0	0	0	0	0	0	0	275	124	229	41	0	0	0	0	0	0	0	0	0	31	0	0	0	0	0	0	0	105	326	0	0	0	0	0	0	0	97	182	426	0	0	0	0	0	0	0	0	0	0	40	0	0	0	0	0	0	0	323	187	0	0	0	0	0	0	0	531	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3763	31717	164667	3763	3629	156	43	25	9	239	188	58	37	1095	1052	202	302	1756	2006	1765	1325	117	25	5	21	5	11	35	448	55	178	314	467	349	174	217	78	188	333	551	371	203	279	185	293	189	224	874	122	326	225	184	466	5	2	0	2	4	1	2	0	5	8	1	2	153	325	226	44	187	459	308	57	204	339	126	7	187	305	134	19	77	105	26	2	94	112	28	0
67	06067007204	5	6	5	2	388	0	0	0	0	0	0	0	0	105	92	0	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	137	141	0	0	0	0	0	0	0	124	38	91	21	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	64	234	0	0	0	0	0	0	0	39	90	132	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	154	141	0	0	0	0	0	0	0	223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1950	12570	80902	1950	1896	142	28	19	12	132	89	29	11	636	482	117	188	940	1010	995	595	54	10	1	13	2	10	20	250	21	76	221	281	195	78	68	33	91	243	286	196	81	80	145	228	138	177	307	64	153	103	129	146	3	2	1	1	4	0	0	1	8	1	0	1	129	218	83	16	158	261	103	27	102	166	44	5	93	139	40	6	50	63	14	0	58	52	13	0
67	060670073	5	6	3	2	2	6	18	2	0	0	0	0	0	20	2	18	4	0	0	0	0	0	0	0	0	0	3	0	0	0	0	0	0	0	14	13	0	0	0	0	0	0	0	17	2	18	2	0	0	0	0	0	0	0	0	0	3	0	0	0	0	0	0	0	9	22	0	0	0	0	0	0	0	5	16	15	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	15	13	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	248	2223	10778	248	242	10	5	4	2	16	14	6	3	77	65	13	19	127	121	104	100	6	2	0	2	1	1	5	31	3	23	25	29	17	13	21	4	18	24	25	18	13	22	18	21	9	11	47	14	25	15	13	36	1	1	0	1	1	1	0	0	0	1	1	1	14	17	16	1	18	21	18	4	19	22	15	1	14	15	16	2	10	7	2	0	7	7	2	0
67	06067007402	5	6	3	2	24	65	252	33	0	0	0	0	0	202	13	217	49	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	192	176	0	0	0	0	0	0	0	203	56	165	29	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	118	325	0	0	0	0	0	0	0	68	147	174	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	235	192	0	0	0	0	0	0	0	340	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2712	28543	113421	2712	2480	119	38	42	18	215	111	36	24	666	738	155	236	1230	1483	1397	852	78	13	5	9	13	13	38	305	95	139	204	304	192	116	188	139	153	253	337	213	153	242	149	247	117	128	761	90	191	119	118	339	6	4	2	2	3	4	1	1	4	5	0	0	120	214	180	73	174	274	260	109	129	194	92	22	120	167	107	29	63	57	23	2	72	67	24	1
67	06067007403	5	6	3	2	9	37	173	21	0	0	0	0	0	117	8	132	31	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	128	116	0	0	0	0	0	0	0	125	25	86	21	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	66	207	0	0	0	0	0	0	0	49	82	102	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	152	112	0	0	0	0	0	0	0	207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1748	18332	73122	1748	1606	87	25	20	9	141	75	26	17	435	480	102	157	791	957	902	548	46	13	3	6	7	8	19	198	49	90	139	185	133	77	115	91	97	162	220	138	103	147	103	148	73	94	486	57	127	85	66	214	5	3	2	1	3	1	0	0	3	2	0	0	80	142	110	38	110	190	158	76	89	116	59	11	82	106	70	15	36	41	18	0	43	45	16	1
67	06067007404	5	6	3	2	10	36	159	16	0	0	0	0	0	107	4	112	30	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	119	125	0	0	0	0	0	0	0	92	23	90	16	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	62	203	0	0	0	0	0	0	0	38	77	84	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	149	97	0	0	0	0	0	0	0	185	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2079	14978	82043	2079	1984	87	35	30	9	175	84	42	23	596	488	179	243	918	1161	1032	619	69	16	3	10	6	15	36	269	36	128	234	213	139	71	99	59	201	275	257	153	100	113	190	267	106	100	369	80	176	94	86	182	5	2	3	1	6	0	0	0	4	2	2	0	116	164	91	27	222	234	131	45	140	124	51	8	116	105	60	13	66	42	17	0	82	45	16	1
67	06067007406	5	6	3	2	25	71	366	41	0	0	0	0	0	250	15	344	70	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	295	235	0	0	0	0	0	0	0	311	78	205	34	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	113	469	0	0	0	0	0	0	0	122	186	252	0	0	0	0	0	0	0	0	0	0	30	0	0	0	0	0	0	0	307	242	0	0	0	0	0	0	0	510	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3813	32449	163376	3813	3669	166	61	36	16	278	206	74	22	1042	985	263	366	1711	2104	1867	1320	80	21	5	12	7	10	31	469	61	185	353	420	284	172	239	85	238	429	520	319	236	280	206	367	155	216	926	149	336	214	176	450	9	9	6	1	9	9	3	0	9	10	6	3	177	280	227	48	281	452	339	69	243	303	136	10	232	256	132	13	81	91	42	2	116	101	39	2
67	06067007408	5	6	3	2	24	50	398	45	0	0	0	0	0	285	15	351	57	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	302	227	0	0	0	0	0	0	0	377	52	218	34	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	129	499	0	0	0	0	0	0	0	93	258	235	0	0	0	0	0	0	0	0	0	0	39	0	0	0	0	0	0	0	309	241	0	0	0	0	0	0	0	555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3774	34531	165407	3774	3608	153	78	33	18	222	194	52	25	1026	971	255	377	1723	2051	1756	1405	96	18	3	19	12	10	29	429	62	182	328	426	285	196	249	106	219	371	425	328	279	328	206	319	194	182	860	113	329	199	172	597	10	5	4	1	6	10	2	2	3	8	0	1	150	288	229	33	248	407	351	56	231	297	165	26	194	244	208	46	81	93	39	3	98	80	39	5
67	06067007410	5	6	3	2	89	179	1055	127	0	0	0	0	0	1109	35	1349	270	0	0	0	0	0	0	0	0	0	79	0	0	0	0	0	0	0	726	696	0	0	0	0	0	0	0	1427	277	838	139	0	0	0	0	0	0	0	0	0	85	0	0	0	0	0	0	0	336	1438	0	0	0	0	0	0	0	460	778	1064	0	0	0	0	0	0	0	0	0	0	138	0	0	0	0	0	0	0	892	782	0	0	0	0	0	0	0	2052	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	15040	74329	606816	15040	15006	575	361	152	44	767	936	232	90	5424	4159	876	1425	7042	7997	5615	6961	314	55	11	62	14	43	125	1838	12	665	1844	2388	1233	509	391	22	847	2384	2555	1254	522	412	739	1481	885	1043	1468	792	2015	1668	1221	1264	44	52	24	10	25	47	10	2	44	57	29	11	657	1151	426	9	1123	1716	510	18	1297	1885	377	2	1466	1575	350	4	407	449	70	0	462	386	62	0
67	06067007411	5	6	3	2	41	90	493	78	0	0	0	0	0	440	10	522	94	0	0	0	0	0	0	0	0	0	44	0	0	0	0	0	0	0	420	341	0	0	0	0	0	0	0	461	106	332	61	0	0	0	0	0	0	0	0	0	50	0	0	0	0	0	0	0	176	682	0	0	0	0	0	0	0	170	304	403	0	0	0	0	0	0	0	0	0	0	65	0	0	0	0	0	0	0	440	364	0	0	0	0	0	0	0	797	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	6622	39466	272287	6622	6552	292	118	82	26	385	332	113	52	2097	1641	475	741	2999	3621	2871	2535	176	28	7	35	12	21	60	868	28	350	764	853	522	236	237	41	450	943	992	591	286	317	423	752	340	380	969	333	749	387	326	736	10	20	9	1	13	11	0	0	8	17	11	2	341	545	239	24	540	782	361	32	494	593	193	4	514	544	177	9	182	169	29	0	240	193	44	0
67	06067007412	5	6	3	2	12	30	173	24	0	0	0	0	0	125	5	154	35	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	147	126	0	0	0	0	0	0	0	121	34	92	19	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	64	241	0	0	0	0	0	0	0	50	80	117	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	169	121	0	0	0	0	0	0	0	217	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2721	16410	106747	2721	2634	111	35	25	11	223	101	49	29	805	602	261	387	1149	1572	1326	839	108	21	2	13	6	24	30	347	33	153	316	280	169	91	102	53	301	410	319	216	131	138	253	385	147	155	380	140	282	131	88	194	6	2	3	0	5	3	1	0	4	6	1	1	160	203	97	26	330	306	160	39	174	161	74	7	194	133	79	13	84	51	13	0	112	61	21	0
67	06067007413	5	6	3	2	6	36	160	16	0	0	0	0	0	109	7	132	26	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	115	111	0	0	0	0	0	0	0	124	28	94	21	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	64	183	0	0	0	0	0	0	0	54	77	114	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	127	98	0	0	0	0	0	0	0	216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2159	15678	96883	2159	2101	94	33	21	15	128	100	24	16	595	535	157	248	914	1245	1021	752	54	23	4	16	8	13	19	249	25	106	214	202	117	90	160	33	141	272	229	181	123	267	166	258	120	112	367	104	194	90	105	259	4	3	0	1	3	3	2	0	1	2	4	1	96	141	135	14	195	220	201	18	119	126	96	11	112	122	152	14	63	32	14	1	64	50	27	1
67	06067007501	5	6	3	2	18	62	320	37	0	0	0	0	0	247	11	361	46	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	213	211	0	0	0	0	0	0	0	344	58	201	45	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	121	412	0	0	0	0	0	0	0	102	203	238	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	246	210	0	0	0	0	0	0	0	502	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3722	31751	153386	3722	3461	115	40	33	11	254	233	61	29	1005	898	296	468	1624	2099	1609	1441	111	16	3	18	14	16	36	460	102	175	340	374	260	140	233	159	283	434	419	324	178	300	256	347	177	173	655	152	379	202	151	555	9	11	4	1	4	2	5	1	4	11	3	1	164	225	166	50	300	373	242	89	212	290	163	50	222	249	187	66	81	83	28	2	136	88	36	4
67	06067007502	5	6	3	2	21	72	289	27	0	0	0	0	0	253	12	319	44	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	222	185	0	0	0	0	0	0	0	314	55	194	41	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	107	361	0	0	0	0	0	0	0	84	229	223	0	0	0	0	0	0	0	0	0	0	42	0	0	0	0	0	0	0	257	193	0	0	0	0	0	0	0	485	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3686	29962	156699	3686	3490	135	52	27	9	214	215	55	29	998	852	273	501	1625	2059	1582	1438	83	21	2	35	9	24	39	447	77	188	347	353	282	159	216	116	260	394	416	355	195	320	221	374	202	178	603	174	376	181	166	538	13	11	5	1	7	3	3	0	14	12	5	0	167	225	147	45	282	400	250	62	216	311	180	28	191	237	220	52	94	71	36	2	121	89	29	0
67	06067007601	5	6	3	2	20	68	292	23	0	0	0	0	0	290	7	413	51	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	189	181	0	0	0	0	0	0	0	400	70	222	35	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	91	381	0	0	0	0	0	0	0	107	273	257	0	0	0	0	0	0	0	0	0	0	37	0	0	0	0	0	0	0	202	200	0	0	0	0	0	0	0	602	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3575	32458	170940	3575	3448	83	40	21	6	205	226	57	20	911	947	250	436	1510	2064	1499	1562	59	8	8	12	1	18	21	384	48	162	270	277	259	178	315	78	209	299	352	360	238	526	210	340	152	141	656	161	369	203	132	698	8	14	5	0	8	5	3	2	6	6	0	0	111	206	207	22	197	348	373	34	197	256	241	23	185	271	343	44	85	63	37	3	85	72	36	1
67	06067007602	5	6	3	2	7	50	195	17	0	0	0	0	0	191	6	245	34	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	137	138	0	0	0	0	0	0	0	246	39	120	29	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	86	237	0	0	0	0	0	0	0	66	162	178	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	163	142	0	0	0	0	0	0	0	358	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2171	20034	98795	2171	2064	42	23	11	4	128	147	31	13	542	579	110	273	928	1243	951	906	39	7	4	7	1	11	14	229	51	91	167	209	185	78	145	56	109	169	265	239	139	264	100	165	105	101	479	95	221	105	78	405	6	0	0	1	6	5	4	0	3	4	1	0	70	153	92	30	111	249	206	38	125	178	110	21	95	184	175	16	44	44	16	0	52	51	20	1
67	06067007701	5	6	3	2	8	52	206	26	0	0	0	0	0	196	6	296	44	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	143	161	0	0	0	0	0	0	0	256	49	164	22	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	99	289	0	0	0	0	0	0	0	70	172	204	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	199	149	0	0	0	0	0	0	0	387	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2649	21455	122902	2649	2583	62	36	14	7	167	135	44	20	745	635	175	332	1214	1435	1166	1064	53	7	4	15	1	19	12	305	26	109	219	279	269	112	198	39	124	247	323	264	129	306	153	291	122	124	476	125	280	149	108	402	10	7	8	2	9	7	4	0	4	5	1	0	96	203	127	21	167	287	236	26	145	243	154	5	120	206	178	13	61	72	25	0	61	68	17	0
67	06067007702	5	6	11	2	403	0	0	0	0	0	0	0	0	610	0	0	0	0	0	0	0	0	0	0	0	0	44	0	0	0	0	0	0	0	195	146	0	0	0	0	0	0	0	484	37	158	33	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	77	368	0	0	0	0	0	0	0	88	295	231	0	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	162	210	0	0	0	0	0	0	0	568	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2870	33851	135064	2870	2654	49	44	10	3	196	210	32	14	666	850	153	267	1293	1577	1130	1442	37	1	0	8	2	10	11	229	85	125	148	212	280	162	281	131	110	183	276	348	164	365	117	187	109	102	615	87	278	147	147	783	8	12	2	1	11	4	0	0	7	8	2	0	82	188	147	38	110	282	218	65	125	244	269	46	123	286	283	66	48	44	19	1	44	47	26	0
67	06067007801	5	6	3	2	15	52	325	20	0	0	0	0	0	299	9	367	51	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	207	162	0	0	0	0	0	0	0	412	54	220	34	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	125	351	0	0	0	0	0	0	0	94	289	233	0	0	0	0	0	0	0	0	0	0	45	0	0	0	0	0	0	0	203	204	0	0	0	0	0	0	0	577	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3330	33011	148802	3330	3137	55	31	16	7	215	239	68	24	847	843	209	370	1522	1810	1384	1438	70	12	4	18	8	30	18	360	77	153	220	342	332	181	221	118	171	295	370	372	169	320	150	273	129	132	704	127	302	176	145	692	5	8	5	1	11	9	1	2	7	10	3	1	97	250	167	37	184	364	227	67	167	322	202	40	159	281	223	51	77	70	29	2	86	70	30	1
67	06067007802	5	6	3	2	10	50	344	22	0	0	0	0	0	243	4	378	37	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	246	143	0	0	0	0	0	0	0	395	49	177	28	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	102	378	0	0	0	0	0	0	0	86	266	225	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	213	199	0	0	0	0	0	0	0	530	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3076	28944	134573	3076	2904	57	31	12	5	180	205	59	24	781	786	199	373	1369	1705	1274	1320	59	11	2	16	4	19	17	345	68	129	216	321	285	147	200	103	164	295	393	319	173	255	148	280	126	124	593	135	259	151	127	645	5	6	2	0	6	7	0	1	5	4	1	0	90	215	130	34	195	362	187	54	161	295	179	31	138	246	216	47	66	67	27	1	84	77	18	1
67	06067007901	5	6	3	2	26	82	415	37	0	0	0	0	0	452	13	576	71	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	263	217	0	0	0	0	0	0	0	676	101	304	36	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	165	495	0	0	0	0	0	0	0	122	412	389	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	277	283	0	0	0	0	0	0	0	870	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4550	52674	203391	4550	4165	58	44	15	6	246	290	69	28	1063	1333	230	389	2103	2447	1797	2151	76	15	2	20	6	33	23	424	173	193	291	389	395	275	386	211	199	306	472	493	322	442	136	306	151	164	1039	181	390	211	208	1160	6	8	3	1	21	12	2	0	2	4	1	3	111	275	237	92	181	453	328	118	236	398	366	78	201	395	387	90	86	76	49	2	87	84	37	2
67	06067007903	5	6	3	2	20	45	248	30	0	0	0	0	0	257	6	315	49	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	169	140	0	0	0	0	0	0	0	332	46	186	38	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	93	304	0	0	0	0	0	0	0	96	208	234	0	0	0	0	0	0	0	0	0	0	38	0	0	0	0	0	0	0	183	173	0	0	0	0	0	0	0	481	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2578	30455	113516	2578	2334	53	20	10	5	163	130	35	13	594	758	121	220	1192	1387	1099	1153	37	9	6	15	2	8	18	235	109	96	180	229	212	138	232	137	97	219	255	247	178	258	92	170	85	100	653	98	214	113	106	624	4	7	2	1	9	9	3	0	1	3	3	1	74	156	151	63	126	253	199	80	136	206	195	44	123	188	209	56	42	55	19	2	49	48	22	2
67	06067007904	5	6	4	2	506	0	0	0	0	0	0	0	0	846	0	0	0	0	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	249	221	0	0	0	0	0	0	0	466	82	283	58	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	155	434	0	0	0	0	0	0	0	125	340	288	0	0	0	0	0	0	0	0	0	0	56	0	0	0	0	0	0	0	309	218	0	0	0	0	0	0	0	685	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4173	43292	181927	4173	3904	123	45	16	6	275	243	49	28	1057	1191	258	388	1910	2263	1778	1818	93	11	2	23	5	17	20	409	118	177	342	430	334	200	310	151	208	397	482	407	256	363	165	312	160	173	970	178	422	223	207	788	6	12	2	1	14	11	5	0	9	9	0	0	144	287	235	72	213	422	320	88	254	358	227	46	269	350	253	63	80	91	38	1	82	81	38	0
67	06067008005	5	6	4	2	387	0	0	0	0	0	0	0	0	784	0	0	0	0	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	171	143	0	0	0	0	0	0	0	547	39	256	33	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	134	324	0	0	0	0	0	0	0	118	311	274	0	0	0	0	0	0	0	0	0	0	30	0	0	0	0	0	0	0	210	180	0	0	0	0	0	0	0	656	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3469	29172	160406	3469	3391	58	52	19	7	138	241	37	13	1017	993	158	300	1643	1827	1113	1887	52	6	4	17	2	10	21	370	34	122	215	357	473	239	212	47	162	219	423	551	224	211	118	178	113	135	574	187	380	224	275	825	6	10	8	0	9	11	10	0	7	5	6	0	74	220	131	19	110	403	144	24	182	487	278	15	197	462	255	23	61	100	37	2	56	89	33	1
67	06067008006	5	6	4	2	409	0	0	0	0	0	0	0	0	814	0	0	0	0	0	0	0	0	0	0	0	0	49	0	0	0	0	0	0	0	190	133	0	0	0	0	0	0	0	621	37	224	23	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	131	326	0	0	0	0	0	0	0	106	301	342	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	204	177	0	0	0	0	0	0	0	678	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3463	33523	158383	3463	3333	52	47	13	4	185	216	44	19	931	947	176	308	1652	1810	1234	1763	53	9	4	22	2	19	21	335	61	140	228	313	434	237	236	68	150	262	380	478	223	248	106	201	105	145	676	160	348	182	203	870	7	12	6	1	16	13	2	0	4	6	4	0	85	228	164	38	126	350	200	39	191	402	281	22	200	395	241	29	58	91	21	1	59	84	20	1
67	06067008007	5	6	4	2	145	0	0	0	0	0	0	0	0	388	0	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	71	54	0	0	0	0	0	0	0	258	26	117	18	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	45	131	0	0	0	0	0	0	0	53	184	130	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	96	72	0	0	0	0	0	0	0	333	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1772	17747	85147	1772	1693	45	18	10	3	90	99	30	6	452	502	111	165	799	973	573	940	27	4	3	4	3	5	18	201	34	66	109	127	153	132	182	45	80	144	155	193	157	202	64	104	55	51	303	77	156	103	107	498	7	4	2	0	4	2	3	0	4	4	2	0	40	76	90	17	70	128	134	24	89	155	190	19	98	166	207	21	31	38	29	0	45	45	13	2
67	06067008008	5	6	4	2	350	0	0	0	0	0	0	0	0	681	0	0	0	0	0	0	0	0	0	0	0	0	53	0	0	0	0	0	0	0	191	142	0	0	0	0	0	0	0	413	45	208	34	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	116	319	0	0	0	0	0	0	0	88	252	260	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	207	172	0	0	0	0	0	0	0	560	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3181	30806	146031	3181	3003	64	56	16	1	182	229	38	13	810	859	176	331	1437	1744	1249	1539	45	10	3	18	0	16	21	281	86	109	220	268	312	205	241	93	133	264	335	383	218	320	127	243	104	133	642	153	345	155	139	749	6	7	1	0	9	2	0	0	5	3	1	0	78	202	146	52	136	332	250	54	185	283	256	32	179	311	256	39	40	69	37	1	54	58	24	0
67	06067008009	5	6	4	2	439	0	0	0	0	0	0	0	0	702	0	0	0	0	0	0	0	0	0	0	0	0	49	0	0	0	0	0	0	0	209	134	0	0	0	0	0	0	0	524	47	210	34	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	116	373	0	0	0	0	0	0	0	83	301	267	0	0	0	0	0	0	0	0	0	0	42	0	0	0	0	0	0	0	207	209	0	0	0	0	0	0	0	608	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3192	32901	138041	3192	2954	54	29	12	6	179	208	43	16	813	841	181	340	1484	1708	1238	1486	62	12	2	17	3	26	19	324	99	132	222	312	331	191	196	139	141	267	347	403	189	220	120	218	132	128	639	135	301	173	160	716	5	7	1	1	1	9	4	2	3	7	0	1	89	220	148	47	145	341	180	67	173	309	215	45	162	311	200	68	55	84	19	6	67	66	22	3
67	06067008010	5	6	4	2	475	0	0	0	0	0	0	0	0	707	0	0	0	0	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	250	156	0	0	0	0	0	0	0	511	52	183	35	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	111	431	0	0	0	0	0	0	0	102	265	273	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	275	216	0	0	0	0	0	0	0	583	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3499	35272	155064	3499	3270	58	46	23	4	214	219	48	20	935	927	180	357	1621	1878	1411	1556	50	8	3	13	3	27	20	405	103	162	245	319	354	195	241	126	147	298	347	448	224	286	136	254	131	142	746	158	340	155	147	755	7	8	8	0	10	4	4	0	8	5	2	1	112	251	137	57	162	390	221	78	193	291	251	43	171	304	253	47	72	102	36	2	82	79	31	0
67	06067008102	5	6	4	2	304	0	0	0	0	0	0	0	0	563	0	0	0	0	0	0	0	0	0	0	0	0	55	0	0	0	0	0	0	0	174	148	0	0	0	0	0	0	0	247	41	233	45	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	98	263	0	0	0	0	0	0	0	97	195	225	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	236	146	0	0	0	0	0	0	0	441	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3407	26473	135754	3407	3236	98	39	22	13	174	190	44	29	1004	862	311	372	1525	1883	1394	1380	104	17	4	26	1	23	46	417	77	183	368	369	249	126	158	95	282	456	428	310	126	190	199	308	129	144	617	214	443	198	140	387	7	6	3	0	3	2	1	1	5	3	4	0	134	219	136	65	249	345	178	72	274	288	119	13	291	259	117	22	88	82	19	1	131	89	11	0
67	06067008107	5	6	4	2	354	0	0	0	0	0	0	0	0	741	0	0	0	0	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	201	146	0	0	0	0	0	0	0	365	56	265	53	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	113	346	0	0	0	0	0	0	0	114	241	274	0	0	0	0	0	0	0	0	0	0	49	0	0	0	0	0	0	0	271	167	0	0	0	0	0	0	0	550	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4240	29060	179241	4240	4127	125	66	46	24	235	234	63	45	1299	1066	363	455	1899	2342	1616	1861	130	30	4	22	5	29	56	491	50	229	427	481	306	176	233	65	345	530	526	359	205	315	264	376	182	173	623	240	562	292	205	564	11	10	0	5	7	6	4	2	4	11	4	4	143	262	184	38	319	370	259	44	347	372	190	11	337	366	223	20	102	101	24	1	138	102	26	1
67	06067008111	5	6	3	2	10	53	225	28	0	0	0	0	0	249	6	298	46	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	165	162	0	0	0	0	0	0	0	269	49	212	37	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	92	311	0	0	0	0	0	0	0	82	181	212	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	224	163	0	0	0	0	0	0	0	436	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2909	26123	136185	2909	2818	85	46	19	7	176	176	36	19	778	837	170	259	1316	1594	1198	1280	56	10	4	15	3	8	36	305	40	117	218	296	253	141	255	53	151	247	331	291	189	334	127	225	107	126	616	132	284	170	139	558	8	9	3	0	4	4	1	1	1	5	0	1	89	200	167	25	139	289	260	34	150	265	183	15	179	244	228	20	56	68	29	1	56	69	28	1
67	06067008112	5	6	3	2	25	72	334	58	0	0	0	0	0	326	12	487	63	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	266	245	0	0	0	0	0	0	0	420	71	289	51	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	151	447	0	0	0	0	0	0	0	129	285	322	0	0	0	0	0	0	0	0	0	0	45	0	0	0	0	0	0	0	334	222	0	0	0	0	0	0	0	655	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3998	33622	191062	3998	3891	115	52	26	10	232	241	64	25	1097	1129	232	355	1803	2195	1674	1712	88	11	4	23	4	15	40	437	47	169	307	388	328	201	372	64	197	352	411	389	265	530	177	314	143	198	849	169	419	219	189	724	6	11	5	2	12	7	1	0	3	6	1	0	133	252	252	28	200	374	402	41	220	344	261	17	220	310	326	24	80	86	47	3	85	85	57	0
67	06067008113	5	6	4	2	201	0	0	0	0	0	0	0	0	325	0	0	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	99	106	0	0	0	0	0	0	0	136	22	125	33	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	62	152	0	0	0	0	0	0	0	40	118	145	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	136	81	0	0	0	0	0	0	0	279	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1943	15473	77271	1943	1831	69	39	20	10	79	109	28	21	553	493	142	224	866	1076	819	755	57	13	4	14	1	19	35	223	54	97	186	225	149	65	88	58	141	249	266	168	98	95	101	192	82	98	345	101	232	92	79	250	6	2	0	0	1	1	1	0	0	5	0	2	73	144	72	42	139	206	96	45	128	161	67	11	147	149	78	13	48	48	6	0	60	48	12	0
67	06067008114	5	6	3	2	21	51	242	37	0	0	0	0	0	273	12	342	43	0	0	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	178	192	0	0	0	0	0	0	0	282	65	224	44	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	105	313	0	0	0	0	0	0	0	107	224	239	0	0	0	0	0	0	0	0	0	0	51	0	0	0	0	0	0	0	259	171	0	0	0	0	0	0	0	505	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3404	23235	147410	3404	3348	130	66	24	8	213	184	58	32	1059	953	197	316	1557	1847	1359	1470	80	15	0	26	2	18	37	394	22	179	342	429	285	131	168	33	174	411	480	338	156	253	152	314	145	156	590	169	395	234	181	490	4	6	4	2	3	3	3	1	3	0	3	0	123	242	151	14	198	388	223	19	253	362	123	7	239	321	152	13	94	76	16	0	104	77	26	1
67	06067008115	5	6	3	2	24	78	392	55	0	0	0	0	0	363	17	566	79	0	0	0	0	0	0	0	0	0	31	0	0	0	0	0	0	0	303	283	0	0	0	0	0	0	0	500	79	323	60	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	164	521	0	0	0	0	0	0	0	157	305	388	0	0	0	0	0	0	0	0	0	0	53	0	0	0	0	0	0	0	379	258	0	0	0	0	0	0	0	781	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4563	37171	216827	4563	4474	120	51	24	5	269	278	58	22	1273	1327	238	381	2070	2493	1904	1984	92	13	2	24	2	10	42	470	35	192	344	463	401	226	394	49	216	414	519	453	261	561	202	335	168	230	958	195	487	266	218	803	5	7	3	0	9	5	0	0	2	4	0	0	139	306	277	24	236	451	426	30	267	421	276	10	253	388	338	18	84	96	50	0	90	96	44	0
67	06067008116	5	6	3	2	21	70	280	36	0	0	0	0	0	276	8	400	45	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	258	176	0	0	0	0	0	0	0	343	60	205	41	0	0	0	0	0	0	0	0	0	30	0	0	0	0	0	0	0	125	384	0	0	0	0	0	0	0	102	230	251	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	290	201	0	0	0	0	0	0	0	509	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3994	32148	174693	3994	3847	111	59	30	10	257	213	67	25	1030	939	308	574	1648	2345	1714	1611	89	14	5	15	9	25	35	475	62	191	401	342	247	154	249	83	268	515	435	380	249	414	265	374	179	168	727	218	442	213	148	588	10	5	3	0	12	7	4	0	9	2	2	0	165	238	193	34	298	407	327	49	268	252	175	27	297	274	283	33	95	74	25	0	133	101	45	0
67	06067008117	5	6	3	2	10	30	150	18	0	0	0	0	0	174	3	210	29	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	111	82	0	0	0	0	0	0	0	213	33	131	28	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	64	190	0	0	0	0	0	0	0	64	136	152	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	120	111	0	0	0	0	0	0	0	309	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1588	19492	71241	1588	1444	39	13	4	4	94	78	23	6	352	486	71	117	736	851	677	712	20	3	1	7	1	6	11	146	63	54	108	141	135	89	142	80	52	130	152	148	113	172	51	90	55	62	418	58	122	67	65	399	3	2	0	0	2	3	0	0	0	1	1	0	40	97	101	39	67	148	133	49	84	135	115	23	72	118	131	29	27	31	11	1	30	26	16	1
67	06067008118	5	6	3	2	18	62	260	37	0	0	0	0	0	273	9	401	44	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	209	171	0	0	0	0	0	0	0	351	74	214	44	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	126	355	0	0	0	0	0	0	0	84	209	302	0	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	205	214	0	0	0	0	0	0	0	525	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3681	26399	194647	3681	3600	84	54	17	4	234	233	48	19	948	1010	239	503	1421	2259	1519	1667	75	6	3	21	3	8	23	351	35	126	273	225	207	146	406	44	151	319	296	321	227	899	202	401	173	159	582	261	460	203	180	561	6	7	7	1	5	5	1	0	0	1	2	0	87	153	221	20	161	310	543	20	225	204	285	14	192	221	503	19	55	55	37	1	66	65	66	3
67	06067008119	5	6	4	2	309	0	0	0	0	0	0	0	0	578	0	0	0	0	0	0	0	0	0	0	0	0	30	0	0	0	0	0	0	0	172	138	0	0	0	0	0	0	0	299	40	194	27	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	96	271	0	0	0	0	0	0	0	81	198	218	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	188	156	0	0	0	0	0	0	0	461	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3039	29523	133769	3039	2871	84	42	17	9	194	165	45	20	803	852	195	269	1392	1649	1275	1298	76	10	3	25	0	10	29	315	67	134	241	307	277	157	211	103	146	286	353	318	179	266	134	216	116	142	668	118	309	170	147	555	4	4	2	0	3	4	0	0	5	3	1	0	105	209	148	42	151	325	226	70	171	274	184	22	179	256	179	33	57	78	25	1	62	62	30	0
67	06067008120	5	6	4	2	304	0	0	0	0	0	0	0	0	563	0	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	146	126	0	0	0	0	0	0	0	299	54	208	35	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	97	266	0	0	0	0	0	0	0	92	221	192	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	190	157	0	0	0	0	0	0	0	468	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2747	18970	123148	2747	2733	78	33	19	3	151	178	49	23	869	706	185	258	1290	1458	1009	1243	61	18	2	13	3	18	35	351	8	173	279	256	293	144	143	8	166	242	315	363	163	205	106	227	98	116	464	136	355	191	148	415	6	11	4	2	9	9	9	1	6	3	2	1	99	175	119	5	134	306	169	5	218	279	129	5	172	278	165	4	91	70	28	0	68	71	25	0
67	06067008121	5	6	4	2	529	0	0	0	0	0	0	0	0	1199	0	0	0	0	0	0	0	0	0	0	0	0	78	0	0	0	0	0	0	0	247	241	0	0	0	0	0	0	0	622	92	460	76	0	0	0	0	0	0	0	0	0	40	0	0	0	0	0	0	0	208	449	0	0	0	0	0	0	0	187	458	381	0	0	0	0	0	0	0	0	0	0	73	0	0	0	0	0	0	0	347	246	0	0	0	0	0	0	0	976	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	5345	44293	235557	5345	5221	104	81	25	9	247	333	78	35	1582	1507	316	451	2507	2838	1845	2650	124	12	2	33	4	26	44	610	51	300	394	600	594	296	278	74	301	479	671	694	292	330	166	311	161	215	993	260	639	369	298	1086	8	20	10	0	11	6	3	0	9	5	5	0	155	352	227	36	226	530	269	54	352	654	290	13	375	659	289	20	120	138	44	1	122	132	54	0
67	06067008122	5	6	4	2	147	0	0	0	0	0	0	0	0	314	0	0	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	69	60	0	0	0	0	0	0	0	181	24	113	16	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	52	120	0	0	0	0	0	0	0	48	122	114	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	94	67	0	0	0	0	0	0	0	261	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1454	12017	65859	1454	1409	35	18	9	3	68	106	24	9	432	404	78	141	674	780	495	744	30	4	1	6	0	9	13	156	19	70	103	143	162	95	82	25	72	118	177	189	91	109	53	95	49	63	236	67	177	91	84	324	2	4	3	2	4	6	3	1	4	5	0	0	38	92	58	10	51	152	82	14	83	172	101	10	96	169	103	11	30	32	14	1	30	36	14	1
67	06067008123	5	6	4	2	486	0	0	0	0	0	0	0	0	951	0	0	0	0	0	0	0	0	0	0	0	0	51	0	0	0	0	0	0	0	263	210	0	0	0	0	0	0	0	541	86	332	35	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	138	441	0	0	0	0	0	0	0	134	367	354	0	0	0	0	0	0	0	0	0	0	44	0	0	0	0	0	0	0	288	231	0	0	0	0	0	0	0	802	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	5018	39005	228201	5018	4851	118	70	40	13	246	313	82	40	1457	1259	371	602	2238	2777	1877	2303	111	27	1	25	3	23	45	590	64	252	451	417	411	257	375	99	315	513	494	493	317	538	256	435	212	216	752	284	604	302	237	874	15	12	3	0	8	9	2	0	4	7	2	0	181	281	220	29	310	409	382	56	323	412	350	33	316	415	400	43	116	107	43	0	136	126	55	0
67	06067008124	5	6	4	2	329	0	0	0	0	0	0	0	0	684	0	0	0	0	0	0	0	0	0	0	0	0	50	0	0	0	0	0	0	0	162	157	0	0	0	0	0	0	0	354	68	244	29	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	86	313	0	0	0	0	0	0	0	118	247	245	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	216	155	0	0	0	0	0	0	0	555	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2949	24824	130965	2949	2903	70	43	22	2	162	195	48	16	834	825	199	222	1386	1564	1093	1407	59	7	6	11	3	14	17	337	22	162	196	332	355	178	140	25	164	266	382	401	160	168	97	168	96	104	629	128	314	207	177	583	1	8	3	0	6	3	2	0	2	3	1	0	80	236	127	15	135	331	155	17	189	361	156	5	198	344	149	7	57	72	27	0	71	91	20	1
67	06067008125	5	6	4	2	292	0	0	0	0	0	0	0	0	693	0	0	0	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	157	131	0	0	0	0	0	0	0	335	57	259	37	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	103	264	0	0	0	0	0	0	0	109	232	253	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	170	152	0	0	0	0	0	0	0	561	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2887	23156	137880	2887	2846	61	46	17	6	133	187	28	11	853	878	152	216	1324	1561	1039	1427	59	6	0	10	0	12	18	302	17	129	183	317	306	145	218	21	139	219	364	321	153	336	113	186	82	111	543	167	326	180	173	575	2	3	1	0	4	7	1	0	1	1	0	0	62	187	143	12	108	275	229	15	166	338	187	4	173	320	227	5	56	72	24	0	48	68	28	0
67	06067008201	5	6	4	2	510	0	0	0	0	0	0	0	0	1150	0	0	0	0	0	0	0	0	0	0	0	0	72	0	0	0	0	0	0	0	235	225	0	0	0	0	0	0	0	659	82	355	96	0	0	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	160	442	0	0	0	0	0	0	0	144	476	411	0	0	0	0	0	0	0	0	0	0	49	0	0	0	0	0	0	0	281	244	0	0	0	0	0	0	0	933	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	5180	40642	257382	5180	5075	84	64	18	7	262	374	61	17	1605	1561	241	431	2407	2777	1758	2792	70	5	7	21	2	11	24	504	49	180	282	486	599	346	473	62	184	324	560	638	358	658	181	311	202	228	841	287	598	379	351	1183	15	11	4	4	10	14	5	0	9	19	6	2	110	296	277	30	153	445	423	33	246	638	472	18	261	622	516	28	76	128	59	2	73	110	65	1
67	06067008202	5	6	4	2	366	0	0	0	0	0	0	0	0	834	0	0	0	0	0	0	0	0	0	0	0	0	82	0	0	0	0	0	0	0	186	164	0	0	0	0	0	0	0	427	74	284	92	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	186	271	0	0	0	0	0	0	0	118	307	318	0	0	0	0	0	0	0	0	0	0	57	0	0	0	0	0	0	0	252	186	0	0	0	0	0	0	0	676	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3933	33755	173224	3933	3739	80	46	15	7	199	244	61	24	1148	1087	230	367	1835	2096	1442	1882	93	13	2	23	5	13	33	423	76	180	244	473	407	210	244	116	195	312	564	417	202	288	152	252	110	147	780	198	470	243	252	718	7	7	6	0	2	12	1	1	1	13	3	0	89	253	183	55	161	401	226	72	217	497	232	18	211	440	224	42	73	95	30	2	94	95	31	0
67	06067008203	5	6	4	2	243	0	0	0	0	0	0	0	0	547	0	0	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	108	126	0	0	0	0	0	0	0	278	35	201	34	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	120	185	0	0	0	0	0	0	0	73	214	175	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	159	119	0	0	0	0	0	0	0	425	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2359	21512	108571	2359	2286	47	19	11	1	104	150	25	17	649	695	121	178	1101	1258	857	1152	46	5	0	7	1	7	23	259	33	128	138	240	279	124	157	39	112	171	284	300	117	232	87	99	70	109	491	104	266	150	140	491	1	7	0	0	1	4	0	0	2	2	0	1	47	153	113	23	85	237	167	29	155	274	139	8	130	276	157	10	45	68	21	1	47	55	20	0
67	06067008204	5	6	4	2	294	0	0	0	0	0	0	0	0	637	0	0	0	0	0	0	0	0	0	0	0	0	42	0	0	0	0	0	0	0	152	131	0	0	0	0	0	0	0	331	47	250	30	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	129	230	0	0	0	0	0	0	0	85	243	245	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	205	120	0	0	0	0	0	0	0	538	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2790	26093	125258	2790	2643	53	34	14	5	111	164	44	19	776	811	154	232	1290	1501	985	1370	57	8	2	12	0	9	29	315	59	119	207	315	260	148	179	87	138	222	328	300	156	268	86	160	96	123	517	114	301	186	165	603	2	9	2	1	5	3	1	1	2	4	0	0	71	178	123	30	101	245	181	53	182	294	173	28	174	282	203	32	47	78	23	1	59	75	31	0
67	06067008206	5	6	4	2	218	0	0	0	0	0	0	0	0	447	0	0	0	0	0	0	0	0	0	0	0	0	39	0	0	0	0	0	0	0	96	102	0	0	0	0	0	0	0	254	35	150	37	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	91	177	0	0	0	0	0	0	0	71	160	175	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	146	99	0	0	0	0	0	0	0	376	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2341	17443	103450	2341	2297	55	36	14	3	115	153	38	23	719	609	129	261	1081	1259	831	1095	66	4	4	11	1	15	22	285	14	113	193	281	222	119	135	28	131	237	345	241	111	162	109	167	86	102	365	120	284	155	122	412	4	5	1	1	2	5	1	1	3	0	1	0	59	150	105	8	107	236	143	18	169	267	119	5	162	253	107	9	43	67	21	0	67	62	18	1
67	06067008207	5	6	4	2	348	0	0	0	0	0	0	0	0	574	0	0	0	0	0	0	0	0	0	0	0	0	41	0	0	0	0	0	0	0	147	123	0	0	0	0	0	0	0	351	39	181	63	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	141	246	0	0	0	0	0	0	0	96	203	210	0	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	206	149	0	0	0	0	0	0	0	485	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2738	24298	120579	2738	2616	46	31	16	5	110	194	35	16	795	752	153	289	1275	1463	980	1306	57	6	3	15	1	13	14	338	47	109	223	312	250	160	172	76	122	244	369	296	160	194	103	191	86	123	476	136	296	163	139	568	3	2	1	0	4	8	0	0	2	0	4	0	75	160	131	25	117	273	149	46	165	301	169	20	158	284	174	29	68	71	24	1	69	78	24	0
67	060670083	5	6	4	2	48	0	0	0	0	0	0	0	0	152	0	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	24	21	0	0	0	0	0	0	0	79	9	44	18	0	0	0	0	0	0	0	0	0	3	0	0	0	0	0	0	0	14	55	0	0	0	0	0	0	0	22	43	57	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	30	28	0	0	0	0	0	0	0	115	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	586	3514	25044	586	580	20	6	4	2	23	53	8	2	211	187	25	48	274	312	188	323	9	1	1	3	0	1	3	59	4	21	39	113	61	21	19	4	23	66	110	61	25	26	20	40	38	31	60	35	83	70	53	83	0	2	0	0	1	2	1	0	2	2	1	0	14	42	14	2	26	67	23	2	33	112	21	1	48	86	24	2	8	16	5	0	13	16	3	0
67	06067008301	5	6	4	2	33	0	0	0	0	0	0	0	0	75	0	0	0	0	0	0	0	0	0	0	0	0	3	0	0	0	0	0	0	0	20	16	0	0	0	0	0	0	0	39	8	18	6	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	13	30	0	0	0	0	0	0	0	7	25	30	0	0	0	0	0	0	0	0	0	0	3	0	0	0	0	0	0	0	21	18	0	0	0	0	0	0	0	60	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	261	2400	16075	261	256	3	2	1	1	15	15	4	1	68	91	8	22	109	152	96	136	3	1	0	1	0	0	1	24	1	7	9	10	13	9	59	3	5	15	13	12	16	89	11	18	8	8	51	16	25	15	13	67	0	0	0	0	0	0	0	0	0	0	0	0	4	6	25	1	6	10	41	2	8	13	36	0	9	10	58	1	4	3	6	0	3	4	4	0
67	06067008401	5	6	4	2	259	0	0	0	0	0	0	0	0	510	0	0	0	0	0	0	0	0	0	0	0	0	39	0	0	0	0	0	0	0	134	123	0	0	0	0	0	0	0	253	29	151	73	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	78	238	0	0	0	0	0	0	0	87	162	188	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	158	145	0	0	0	0	0	0	0	393	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2830	16931	123594	2830	2752	71	48	22	7	135	178	38	16	957	746	155	364	1289	1541	1010	1324	60	12	3	17	3	16	20	367	29	104	328	349	218	102	161	48	111	373	379	262	117	251	160	273	127	100	351	224	452	206	116	328	4	11	5	2	5	5	3	0	5	3	2	0	81	163	105	20	159	271	182	30	244	289	125	10	221	269	151	17	81	88	25	0	73	76	25	2
67	06067008402	5	6	4	2	254	0	0	0	0	0	0	0	0	634	0	0	0	0	0	0	0	0	0	0	0	0	34	0	0	0	0	0	0	0	111	128	0	0	0	0	0	0	0	266	40	191	151	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	82	239	0	0	0	0	0	0	0	86	202	254	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	171	126	0	0	0	0	0	0	0	484	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2869	21062	125084	2869	2807	56	47	19	8	126	181	49	15	957	830	144	248	1363	1507	947	1475	62	11	2	16	2	6	18	328	25	127	226	425	315	114	130	37	143	261	466	307	110	182	88	194	106	115	445	153	342	210	198	571	3	8	2	0	4	4	3	1	9	7	7	0	70	189	89	14	104	322	137	23	200	436	124	10	206	353	133	13	61	87	21	0	67	73	15	0
67	06067008598	5	6	4	2	949	0	0	0	0	0	0	0	0	2075	0	0	0	0	0	0	0	0	0	0	0	0	104	0	0	0	0	0	0	0	458	382	0	0	0	0	0	0	0	1161	140	597	237	0	0	0	0	0	0	0	0	0	48	0	0	0	0	0	0	0	207	911	0	0	0	0	0	0	0	304	733	804	0	0	0	0	0	0	0	0	0	0	82	0	0	0	0	0	0	0	455	494	0	0	0	0	0	0	0	1698	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	9785	50526	427256	9785	9744	193	198	58	9	432	731	137	34	3773	2952	360	886	4712	5070	2965	5420	150	9	4	38	2	19	25	1140	13	309	871	1634	1086	358	430	23	313	1127	1756	1015	364	462	458	708	510	464	818	731	1456	1060	904	1264	27	52	16	1	26	40	19	0	19	29	17	0	216	719	262	8	402	1015	319	14	725	1605	453	5	777	1402	433	8	179	340	61	0	206	284	61	0
67	06067009601	9	6	5	2	594	0	0	0	0	0	0	0	0	64	62	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	35	36	133	194	187	0	0	0	0	33	83	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	468	0	0	0	0	0	0	0	44	66	81	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	189	270	0	0	0	0	0	0	0	179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2434	14989	104307	2434	2427	265	67	34	12	227	48	21	14	726	536	174	241	1102	1332	1559	502	41	14	5	6	11	5	14	277	2	145	193	300	251	104	106	5	160	260	400	294	96	116	213	372	181	211	582	61	110	65	63	202	26	12	15	3	6	2	5	1	35	28	18	6	186	315	140	2	266	487	158	5	63	162	45	0	82	114	34	0	67	53	19	0	46	75	16	0
67	06067009602	9	6	5	2	1115	0	0	0	0	0	0	0	0	158	113	0	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	104	101	208	340	354	0	0	0	0	70	186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	106	837	0	0	0	0	0	0	0	107	115	202	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	344	529	0	0	0	0	0	0	0	373	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	5157	31359	214325	5157	5079	589	94	97	32	490	128	85	33	1343	1088	434	609	2179	2978	3225	1056	114	39	3	18	15	16	37	634	39	303	458	560	387	190	242	39	479	693	738	482	258	289	560	948	403	362	952	123	268	189	124	352	38	17	14	3	30	8	5	0	48	36	24	8	410	550	271	31	731	824	381	27	163	239	114	8	185	220	116	12	120	115	36	0	186	138	40	0