#FIPS	TRACTKEY	AD91	SD91	CD91	BEDIST	CNGDEM1	CNGDEM2	CNGDEM3	CNGDEM4	CNGDEM5	CNGDEM6	CNGDEM7	CNGDEM8	CNGDEM9	CNGREP1	CNGREP2	CNGREP3	CNGREP4	CNGREP5	CNGREP6	CNGREP7	CNGREP8	CNGREP9	CNGAIP1	CNGAIP2	CNGGRN1	CNGGRN2	CNGLIB1	CNGLIB2	CNGNLP1	CNGNLP2	CNGPAF1	CNGPAF2	CNGREF1	CNGREF2	ASSDEM1	ASSDEM2	ASSDEM3	ASSDEM4	ASSDEM5	ASSDEM6	ASSDEM7	ASSDEM8	ASSDEM9	ASSREP1	ASSREP2	ASSREP3	ASSREP4	ASSREP5	ASSREP6	ASSREP7	ASSREP8	ASSREP9	ASSAIP1	ASSAIP2	ASSGRN1	ASSGRN2	ASSLIB1	ASSLIB2	ASSNLP1	ASSNLP2	ASSPAF1	ASSPAF2	ASSREF1	ASSREF2	SENDEM1	SENDEM2	SENDEM3	SENDEM4	SENDEM5	SENDEM6	SENDEM7	SENDEM8	SENDEM9	SENREP1	SENREP2	SENREP3	SENREP4	SENREP5	SENREP6	SENREP7	SENREP8	SENREP9	SENAIP1	SENAIP2	SENGRN1	SENGRN2	SENLIB1	SENLIB2	SENNLP1	SENNLP2	SENPAF1	SENPAF2	SENREF1	SENREF2	BOEDEM1	BOEDEM2	BOEDEM3	BOEDEM4	BOEDEM5	BOEDEM6	BOEDEM7	BOEDEM8	BOEDEM9	BOEREP1	BOEREP2	BOEREP3	BOEREP4	BOEREP5	BOEREP6	BOEREP7	BOEREP8	BOEREP9	BOEAIP1	BOEAIP2	BOEGRN1	BOEGRN2	BOELIB1	BOELIB2	BOENLP1	BOENLP2	BOEPAF1	BOEPAF2	BOEREF1	BOEREF2	RTOTREG	RGL_TOT	AGE_TOT	RGL_NUM	AGE_NUM	HISPDEM	HISPREP	HISPDCL	HISPOTH	JEWDEM	JEWREP	JEWDCL	JEWOTH	MR	MRS	MISS	MS	MALE	FEMALE	DEM	REP	AIP	PAF	MISC	LIB	NLP	GREEN	REF	DCL	MAGEUNK	M1825	M2635	M3645	M4655	M5664	M65PL	FAGEUNK	F1825	F2635	F3645	F4655	F5664	F65PL	DREG1G	DREG2G	DREG3G	DREG4G	DREG5G	RREG1G	RREG2G	RREG3G	RREG4G	RREG5G	KORDEM	KORREP	KORDCL	KOROTH	JAPDEM	JAPREP	JAPDCL	JAPOTH	ASNDEM	ASNREP	ASNDCL	ASNOTH	DM1835	DM3655	DM56PL	DMUNK	DF1835	DF3655	DF56PL	DFUNK	RM1835	RM3655	RM56PL	RMUNK	RF1835	RF3655	RF56PL	RFUNK	IM1835	IM3655	IM56PL	IMUNK	IF1835	IF3655	IF56PL	IFUNK
67	060670004	9	6	5	2	668	0	0	0	0	0	0	0	0	58	31	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	45	117	99	114	309	0	0	0	0	22	47	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	59	579	0	0	0	0	0	0	0	28	32	57	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	255	264	0	0	0	0	0	0	0	108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2636	13826	101926	2636	2576	235	38	42	14	189	54	40	35	857	231	254	518	1279	1357	1578	412	65	38	10	28	17	84	27	378	22	145	448	319	209	72	64	38	196	459	261	195	93	115	323	539	197	155	363	74	177	47	27	87	18	2	2	0	7	0	3	2	9	0	3	0	263	327	90	17	387	324	146	26	111	87	26	4	80	52	39	12	127	68	17	0	104	46	17	0
67	060670005	9	6	5	2	360	0	0	0	0	0	0	0	0	25	18	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	34	80	58	51	158	0	0	0	0	15	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	301	0	0	0	0	0	0	0	15	19	29	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	124	173	0	0	0	0	0	0	0	62	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1975	7701	77623	1975	1953	245	25	41	27	146	45	45	18	702	160	204	323	1025	950	1131	298	54	11	4	18	20	45	50	343	9	133	323	237	167	73	83	13	182	317	163	130	63	82	279	445	142	82	183	72	132	33	28	33	15	1	1	2	5	1	2	2	1	0	1	0	199	237	105	7	280	193	100	13	77	73	20	2	63	38	24	0	119	57	22	0	93	38	14	0
67	060670006	9	6	5	2	84	0	0	0	0	0	0	0	0	8	8	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	10	15	17	12	36	0	0	0	0	6	7	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	10	71	0	0	0	0	0	0	0	6	7	7	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	31	41	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	504	1868	21209	504	500	73	7	12	7	37	12	11	8	182	38	41	65	284	220	296	70	11	2	1	5	8	13	19	80	2	25	74	77	48	29	29	2	36	58	49	36	21	21	69	118	41	24	44	22	25	5	5	12	2	1	1	1	1	1	1	0	1	1	1	0	45	70	36	1	56	56	31	1	18	18	8	1	11	8	6	1	25	16	7	1	17	11	4	0
67	060670007	9	6	5	2	62	0	0	0	0	0	0	0	0	9	17	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	9	7	5	18	19	0	0	0	0	18	11	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2	53	0	0	0	0	0	0	0	2	11	24	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	22	26	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	525	1942	31027	525	524	28	6	2	3	45	10	9	10	206	65	19	48	313	211	270	131	13	8	1	2	14	4	10	71	1	10	28	70	65	38	103	0	4	12	25	19	15	135	68	107	30	24	40	19	42	28	11	31	12	11	5	2	4	10	3	1	10	6	11	1	14	62	82	0	7	24	80	0	9	33	32	1	3	14	40	0	10	19	14	0	4	4	20	0
67	060670008	9	6	5	2	306	0	0	0	0	0	0	0	0	54	44	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	20	46	36	44	162	0	0	0	0	18	59	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	240	0	0	0	0	0	0	0	19	42	56	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	70	150	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1132	6336	64238	1132	1116	54	10	4	1	93	67	24	5	363	229	66	158	529	603	590	377	15	2	0	4	3	4	8	129	3	22	102	101	117	54	130	13	22	69	58	79	60	302	115	181	86	58	150	54	122	58	35	108	7	5	0	0	2	3	1	0	4	2	1	1	53	111	87	1	46	92	195	5	42	64	69	2	25	29	139	7	14	38	26	0	13	14	23	1
67	060670009	9	6	5	2	39	0	0	0	0	0	0	0	0	6	4	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	2	7	4	6	19	0	0	0	0	4	6	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4	32	0	0	0	0	0	0	0	2	5	7	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	11	17	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	176	739	7819	176	175	12	3	3	1	13	7	2	3	63	13	18	32	95	81	94	45	5	1	0	1	1	3	2	24	1	7	26	22	16	9	15	1	12	22	14	12	7	13	22	33	13	9	16	11	14	7	5	8	0	1	0	0	1	1	0	0	0	0	0	0	14	21	14	1	17	16	12	0	11	8	6	0	9	5	6	0	6	6	3	0	5	3	1	0
67	060670010	9	6	5	2	26	0	0	0	0	0	0	0	0	3	4	0	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	3	4	4	6	10	0	0	0	0	4	3	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2	23	0	0	0	0	0	0	0	1	3	4	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	9	13	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	178	660	8782	178	178	19	3	2	2	15	3	3	3	66	17	11	20	103	75	100	33	4	2	0	1	4	4	5	27	1	6	19	26	19	11	21	0	8	14	14	10	6	23	24	39	13	9	15	8	11	5	2	7	2	2	1	0	1	1	0	0	1	1	2	0	11	23	20	0	13	14	18	0	5	9	7	0	2	4	7	0	6	6	4	0	4	3	4	0
67	060670011	9	6	5	2	132	0	0	0	0	0	0	0	0	10	11	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	11	28	20	20	55	0	0	0	0	4	13	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	16	102	0	0	0	0	0	0	0	8	10	16	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	42	57	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	632	2345	24544	632	628	43	7	6	5	53	14	16	10	242	37	61	105	348	284	349	107	12	7	2	6	5	22	12	108	0	44	132	70	53	20	25	2	47	106	53	34	14	27	93	129	47	30	50	25	39	17	8	16	1	1	0	0	2	0	0	1	0	0	0	0	78	66	27	0	86	61	29	0	35	23	7	0	20	10	6	0	39	18	6	0	31	9	4	0
67	060670012	9	6	5	2	410	0	0	0	0	0	0	0	0	49	38	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	33	80	68	60	185	0	0	0	0	32	52	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	348	0	0	0	0	0	0	0	20	39	58	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	130	182	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2075	7725	86178	2075	2062	130	26	29	21	157	64	49	36	786	127	213	356	1123	952	1125	409	60	19	5	24	18	67	39	308	5	120	358	251	184	90	114	7	168	275	172	133	76	120	281	431	152	92	169	112	139	62	35	62	6	6	3	0	9	4	2	1	3	2	2	0	204	248	123	4	235	185	119	5	99	81	44	1	84	50	50	3	100	70	22	0	66	35	16	0
67	060670013	9	6	5	2	484	0	0	0	0	0	0	0	0	33	37	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	44	88	84	48	237	0	0	0	0	18	39	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	407	0	0	0	0	0	0	0	16	36	55	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	174	182	0	0	0	0	0	0	0	114	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2131	8629	80273	2131	2113	153	22	26	17	166	44	53	28	738	136	257	430	1078	1053	1242	347	39	26	5	26	11	87	35	313	7	116	406	262	175	76	37	11	193	403	198	129	54	64	319	475	140	107	200	63	153	43	29	59	11	4	1	0	10	2	2	0	8	6	5	0	249	264	74	4	331	234	82	3	99	74	24	3	81	36	23	6	97	53	7	0	110	34	9	2
67	060670014	9	6	5	2	428	0	0	0	0	0	0	0	0	39	42	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	33	72	62	61	207	0	0	0	0	18	41	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	353	0	0	0	0	0	0	0	19	31	56	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	146	189	0	0	0	0	0	0	0	101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1837	9434	80015	1837	1806	97	15	10	9	162	49	41	27	570	177	199	344	855	982	1034	339	32	16	7	23	9	67	30	280	11	86	311	174	114	55	107	21	132	304	123	106	57	239	206	353	138	114	225	57	110	48	30	95	4	2	0	0	12	4	0	2	1	1	2	3	173	158	97	7	243	155	188	12	66	59	42	4	54	26	82	9	92	47	9	0	81	32	18	0
67	060670015	9	6	5	2	1003	0	0	0	0	0	0	0	0	212	105	0	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	29	164	115	136	533	0	0	0	0	72	205	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	81	746	0	0	0	0	0	0	0	69	171	200	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	263	365	0	0	0	0	0	0	0	411	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3364	30687	142066	3364	3160	145	43	13	6	259	136	45	21	876	600	284	594	1441	1923	1835	1030	42	9	3	13	3	45	24	360	68	93	397	317	315	118	132	136	123	517	361	369	130	288	220	412	225	194	785	124	248	141	97	420	15	7	5	0	11	4	0	1	12	6	2	0	189	348	124	40	341	483	230	81	187	169	110	28	155	164	163	55	79	81	10	0	104	65	22	0
67	060670017	9	6	5	2	818	0	0	0	0	0	0	0	0	115	83	0	0	0	0	0	0	0	0	0	0	0	37	0	0	0	0	0	0	0	60	81	112	121	464	0	0	0	0	53	130	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	67	636	0	0	0	0	0	0	0	62	72	149	0	0	0	0	0	0	0	0	0	0	50	0	0	0	0	0	0	0	241	321	0	0	0	0	0	0	0	280	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2953	29765	136933	2953	2817	185	29	30	15	264	102	41	22	647	619	186	492	1211	1742	1791	698	51	9	7	20	3	36	25	314	50	90	284	280	217	75	216	87	101	352	369	273	120	443	232	377	197	179	806	87	159	91	58	305	7	6	5	0	16	3	2	1	3	2	2	1	166	278	174	37	258	453	363	61	101	127	88	13	93	100	154	25	72	64	22	0	66	62	28	1
67	060670018	9	6	5	2	492	0	0	0	0	0	0	0	0	38	35	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	33	67	62	114	240	0	0	0	0	11	32	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	48	440	0	0	0	0	0	0	0	13	28	41	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	160	230	0	0	0	0	0	0	0	84	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2324	16124	96302	2324	2257	265	20	36	21	229	34	31	26	620	345	201	364	1045	1279	1511	322	56	24	4	13	21	35	42	298	20	121	249	273	214	70	100	46	164	321	304	197	90	158	264	449	175	155	470	52	101	45	31	93	15	1	0	1	6	4	4	0	4	0	3	0	177	317	115	14	298	353	197	40	68	77	31	5	47	60	26	6	70	61	16	1	80	50	18	0
67	060670019	9	6	5	2	425	0	0	0	0	0	0	0	0	43	33	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	37	96	66	67	160	0	0	0	0	28	45	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	342	0	0	0	0	0	0	0	20	33	57	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	133	180	0	0	0	0	0	0	0	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1833	10399	71131	1833	1779	150	20	25	12	143	45	31	29	583	157	204	328	882	951	1091	314	38	22	4	16	13	43	38	253	21	105	281	217	146	57	54	33	156	278	194	152	60	79	224	362	147	110	247	53	99	49	25	87	13	4	5	2	21	4	2	0	20	6	9	1	192	220	73	15	241	239	95	18	69	68	19	6	61	44	33	14	76	39	15	0	78	39	6	1
67	060670020	9	6	5	2	204	0	0	0	0	0	0	0	0	31	18	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	16	40	23	30	91	0	0	0	0	22	33	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	18	153	0	0	0	0	0	0	0	11	25	34	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	91	77	0	0	0	0	0	0	0	63	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1107	6736	43794	1107	1059	100	15	19	15	83	14	14	17	339	125	118	151	543	564	625	185	39	23	3	14	8	25	14	171	18	65	172	118	78	25	66	29	91	158	116	72	30	69	139	229	67	55	134	26	51	36	11	62	32	16	16	5	18	11	7	2	46	40	26	7	109	99	56	11	145	124	64	17	29	41	20	5	30	23	24	13	59	31	12	2	40	23	6	0
67	060670021	9	6	5	2	194	0	0	0	0	0	0	0	0	19	12	0	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	18	36	31	38	76	0	0	0	0	12	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	14	164	0	0	0	0	0	0	0	6	16	19	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	69	81	0	0	0	0	0	0	0	46	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	963	5966	38565	963	918	95	18	16	13	65	15	17	20	302	110	97	133	466	497	545	155	29	12	8	8	8	22	22	154	17	58	133	111	66	21	61	29	71	120	113	72	31	60	113	179	67	44	143	26	47	35	11	35	15	11	9	1	32	10	5	2	30	22	18	2	78	103	47	14	95	121	64	23	32	24	20	2	34	20	18	5	50	24	9	1	37	25	6	0
67	060670022	9	6	5	2	532	0	0	0	0	0	0	0	0	54	35	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	27	77	60	60	281	0	0	0	0	36	58	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	32	420	0	0	0	0	0	0	0	39	47	66	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	150	197	0	0	0	0	0	0	0	149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1913	18256	79718	1913	1772	157	19	20	19	141	34	20	19	429	360	163	272	777	1136	1213	367	47	23	2	4	6	19	25	205	56	70	165	181	124	65	113	83	134	253	242	163	75	184	192	300	146	112	462	46	94	37	43	146	23	14	9	7	98	20	8	0	63	33	16	11	118	176	106	38	224	306	184	61	59	68	47	13	53	46	57	21	28	41	18	6	62	36	14	0
67	060670023	9	6	5	2	783	0	0	0	0	0	0	0	0	108	70	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	22	154	63	67	483	0	0	0	0	36	120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	62	594	0	0	0	0	0	0	0	49	107	128	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	184	296	0	0	0	0	0	0	0	264	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2290	24867	95824	2290	2092	123	30	14	8	185	77	27	19	549	464	155	375	991	1299	1326	650	23	9	3	13	4	32	21	208	66	58	219	238	231	75	103	133	81	265	283	275	83	180	154	240	150	158	623	73	160	71	49	298	14	9	3	0	51	11	4	0	16	9	5	0	123	264	97	41	189	387	146	81	98	132	61	26	93	98	96	49	33	51	18	0	44	53	9	2
67	060670024	9	6	5	2	1114	0	0	0	0	0	0	0	0	253	100	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	41	220	95	96	673	0	0	0	0	87	229	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	79	822	0	0	0	0	0	0	0	76	221	238	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	218	419	0	0	0	0	0	0	0	544	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3292	41535	141970	3292	2928	128	41	11	9	237	168	36	15	736	803	179	479	1428	1865	1733	1186	25	10	2	15	1	41	20	262	129	97	255	301	324	158	167	237	96	275	375	394	159	332	193	263	190	176	913	88	208	123	117	651	17	8	3	0	63	18	5	0	27	7	5	0	137	313	158	62	192	494	264	111	137	214	145	59	106	191	209	124	44	73	15	5	48	56	14	4
67	060670025	9	6	5	2	473	0	0	0	0	0	0	0	0	62	38	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	8	51	41	39	352	0	0	0	0	17	64	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	422	0	0	0	0	0	0	0	23	46	49	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	93	224	0	0	0	0	0	0	0	122	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1229	13131	51273	1229	1129	53	4	5	2	147	32	21	7	300	215	54	251	563	666	809	257	10	3	1	6	1	17	12	113	35	29	97	148	158	50	46	64	33	103	186	174	50	55	86	120	100	97	405	22	44	29	27	133	4	2	0	2	11	0	2	0	7	0	2	1	51	210	65	18	84	275	70	35	42	52	24	17	24	41	28	29	21	31	6	1	20	28	5	0
67	060670026	9	6	5	2	511	0	0	0	0	0	0	0	0	63	31	0	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	28	74	46	75	304	0	0	0	0	23	55	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	29	447	0	0	0	0	0	0	0	21	54	59	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	135	230	0	0	0	0	0	0	0	141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1614	13686	65728	1614	1525	143	18	19	11	124	37	24	20	410	253	100	293	723	891	1024	279	27	13	3	15	10	44	13	187	35	71	157	186	174	52	48	54	90	188	229	178	66	86	156	246	115	111	395	38	65	26	20	129	5	1	1	1	17	2	1	0	11	3	3	1	105	236	56	23	165	288	111	41	41	62	31	11	40	51	31	12	41	41	9	1	44	43	8	1
67	060670027	9	6	5	2	348	0	0	0	0	0	0	0	0	32	20	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	28	42	50	99	144	0	0	0	0	12	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	36	293	0	0	0	0	0	0	0	14	23	37	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	101	168	0	0	0	0	0	0	0	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1596	10930	64234	1596	1529	160	14	28	20	170	38	28	25	418	247	152	239	693	901	1070	218	44	10	3	9	18	27	21	174	21	79	170	181	135	45	64	45	124	227	218	132	64	91	210	319	91	103	350	47	70	22	16	65	1	2	4	0	7	0	0	0	5	2	0	0	113	209	82	16	227	261	128	36	47	45	16	5	44	41	12	9	56	29	4	0	46	31	9	0
67	060670028	9	6	5	2	247	0	0	0	0	0	0	0	0	12	12	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	18	7	39	108	66	0	0	0	0	14	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	208	0	0	0	0	0	0	0	9	12	11	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	86	109	0	0	0	0	0	0	0	38	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1221	10057	50425	1221	1142	186	16	22	10	153	15	27	15	272	216	128	127	509	712	880	104	30	13	2	3	13	6	23	146	25	57	106	126	84	35	75	54	100	138	158	107	57	96	146	237	83	87	327	11	38	18	8	29	4	3	0	1	6	0	1	0	1	0	2	1	88	136	89	22	157	206	131	49	23	26	6	3	16	18	9	3	23	29	11	0	44	28	9	2
67	060670029	9	6	5	2	775	0	0	0	0	0	0	0	0	96	78	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	44	89	88	88	527	0	0	0	0	38	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	60	630	0	0	0	0	0	0	0	44	94	114	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	246	289	0	0	0	0	0	0	0	234	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2701	30862	110633	2701	2393	268	48	41	13	201	85	35	18	572	624	173	410	1101	1600	1708	583	42	9	2	14	5	40	23	275	118	91	221	248	207	69	147	191	122	282	358	264	106	275	186	330	160	178	854	52	142	77	62	249	8	4	1	1	14	7	1	1	7	2	0	0	135	260	141	93	228	432	266	154	92	105	59	25	80	93	92	36	51	62	10	0	64	69	18	0
67	060670030	9	6	5	2	950	0	0	0	0	0	0	0	0	206	121	0	0	0	0	0	0	0	0	0	0	0	28	0	0	0	0	0	0	0	74	111	103	151	578	0	0	0	0	91	153	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	91	703	0	0	0	0	0	0	0	85	166	191	0	0	0	0	0	0	0	0	0	0	40	0	0	0	0	0	0	0	289	429	0	0	0	0	0	0	0	408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3414	42020	140397	3414	2986	431	66	70	26	228	113	36	25	710	858	234	360	1458	1957	2081	815	59	19	4	12	12	34	20	359	173	132	236	319	248	118	229	254	176	318	405	314	138	346	224	365	164	225	1102	64	180	108	103	362	16	7	5	2	28	6	3	0	10	6	10	1	170	311	207	130	270	487	296	208	94	143	102	43	106	131	155	45	64	83	31	0	83	72	28	2
67	06067003101	9	6	5	2	384	0	0	0	0	0	0	0	0	69	58	0	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	28	50	22	58	265	0	0	0	0	33	56	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	30	301	0	0	0	0	0	0	0	28	76	63	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	128	168	0	0	0	0	0	0	0	148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1609	19039	61637	1609	1390	293	38	28	16	113	42	15	13	359	438	101	146	705	903	1016	356	37	11	2	9	2	7	10	159	82	67	154	144	108	62	89	137	108	153	170	159	72	105	98	225	63	116	513	21	90	35	36	173	2	2	1	1	21	1	1	0	5	2	1	1	109	140	97	71	153	210	122	114	58	63	40	7	54	67	43	22	38	30	9	3	35	36	6	1
67	06067003102	9	6	5	2	346	0	0	0	0	0	0	0	0	81	50	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	30	35	48	47	211	0	0	0	0	44	64	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	27	259	0	0	0	0	0	0	0	31	54	88	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	93	163	0	0	0	0	0	0	0	174	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1423	17978	57812	1423	1238	211	26	21	10	105	55	20	10	310	375	96	143	601	821	857	370	33	9	1	6	2	9	6	128	68	34	129	129	102	44	95	117	65	134	186	125	68	128	88	165	61	92	453	28	78	44	41	179	0	3	1	0	3	0	1	0	1	6	1	0	68	116	87	49	116	199	137	87	57	68	46	19	34	63	53	30	25	31	4	0	28	34	5	0
67	06067003201	9	6	5	2	442	0	0	0	0	0	0	0	0	49	33	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	27	48	53	92	213	0	0	0	0	32	43	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	345	0	0	0	0	0	0	0	34	38	55	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	147	204	0	0	0	0	0	0	0	100	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2033	15727	81667	2033	1916	327	44	46	20	155	17	15	12	543	411	182	180	919	1114	1304	333	57	30	4	6	14	7	15	264	49	121	178	236	161	78	96	68	157	239	264	172	91	122	185	341	145	116	517	35	83	80	40	94	32	14	22	5	10	3	2	4	46	41	29	14	152	226	128	43	228	296	165	65	57	105	27	6	44	61	29	3	60	42	14	0	82	52	14	0
67	06067003202	9	6	5	2	483	0	0	0	0	0	0	0	0	92	64	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	45	33	34	70	315	0	0	0	0	54	89	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	346	0	0	0	0	0	0	0	39	72	121	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	154	212	0	0	0	0	0	0	0	198	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1850	22059	84852	1850	1673	249	30	30	11	142	54	25	7	391	526	131	175	762	1089	1143	448	31	16	1	5	4	8	11	185	65	55	125	143	132	69	173	113	109	150	167	158	107	287	143	226	68	119	585	40	95	50	46	219	8	4	3	4	5	2	2	2	15	8	6	4	92	150	154	46	143	218	253	88	43	70	70	19	42	71	111	22	32	30	16	1	55	25	22	3
67	060670033	9	6	5	2	921	0	0	0	0	0	0	0	0	212	110	0	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	36	204	95	105	481	0	0	0	0	89	177	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	51	701	0	0	0	0	0	0	0	72	164	218	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	241	352	0	0	0	0	0	0	0	415	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2756	42899	119518	2756	2328	126	23	11	8	187	117	16	9	539	769	144	257	1221	1536	1550	913	28	7	1	14	1	19	14	206	174	75	143	240	246	111	233	256	83	164	255	297	120	363	111	190	122	133	993	44	123	96	75	575	30	17	13	4	148	50	13	2	80	65	13	4	86	255	187	101	129	365	274	152	82	154	135	69	67	123	183	102	35	57	14	5	36	45	13	2
67	060670034	9	6	5	2	891	0	0	0	0	0	0	0	0	199	89	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	44	133	132	182	383	0	0	0	0	79	171	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	81	639	0	0	0	0	0	0	0	68	174	162	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	191	380	0	0	0	0	0	0	0	423	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2675	38486	115868	2675	2257	163	32	23	8	213	98	24	11	465	776	160	232	1150	1525	1585	823	33	7	0	1	5	9	20	192	174	99	119	207	211	113	229	245	105	164	224	264	140	384	156	236	96	120	977	45	116	71	63	530	35	26	8	0	77	32	5	1	57	46	12	2	105	241	171	103	156	343	308	160	60	114	150	65	61	102	189	82	34	44	12	6	44	32	19	3
67	06067003501	9	6	5	2	406	0	0	0	0	0	0	0	0	74	35	0	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	26	51	54	68	186	0	0	0	0	47	56	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	315	0	0	0	0	0	0	0	29	49	65	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	116	151	0	0	0	0	0	0	0	148	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1449	17841	60579	1449	1291	157	21	19	9	106	31	25	10	308	353	102	171	626	822	898	323	16	11	4	4	10	11	17	155	55	68	108	129	122	48	99	102	85	130	166	133	46	159	119	174	87	86	433	23	57	37	32	173	17	15	5	0	36	4	4	0	27	21	9	1	72	150	92	37	130	210	127	79	44	55	40	16	29	54	62	23	39	29	10	1	40	24	11	0
67	06067003502	9	6	5	2	487	0	0	0	0	0	0	0	0	93	44	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	40	59	55	90	232	0	0	0	0	39	79	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	39	373	0	0	0	0	0	0	0	43	62	99	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	137	186	0	0	0	0	0	0	0	194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1597	22847	64434	1597	1356	214	24	14	4	91	31	13	4	330	428	122	163	693	903	1020	381	16	9	1	7	2	4	14	144	100	64	126	122	117	49	112	141	80	129	180	129	65	179	90	161	69	103	598	32	62	52	33	203	18	8	2	1	49	23	8	0	36	24	24	2	85	147	103	80	123	210	164	109	60	55	42	18	44	62	68	33	34	30	15	2	33	25	9	1
67	060670036	9	6	5	2	321	0	0	0	0	0	0	0	0	40	14	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	22	37	44	69	154	0	0	0	0	10	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	254	0	0	0	0	0	0	0	24	22	38	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	96	147	0	0	0	0	0	0	0	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1076	10535	43422	1076	988	261	28	26	15	73	26	16	7	232	246	91	144	419	658	745	176	24	7	2	5	3	6	9	100	27	42	89	100	81	36	44	61	77	141	151	92	49	87	90	187	66	85	317	22	39	35	20	59	4	3	0	3	3	1	0	0	9	1	2	2	70	124	56	25	140	174	104	52	26	35	16	2	32	31	23	9	16	11	5	0	31	30	6	0
67	060670037	9	6	5	2	260	0	0	0	0	0	0	0	0	8	16	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	33	31	39	78	91	0	0	0	0	11	8	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	214	0	0	0	0	0	0	0	11	11	18	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	79	141	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1228	9419	50618	1228	1160	283	28	52	21	121	16	12	8	295	239	107	136	518	710	874	137	32	13	1	4	9	4	9	144	20	72	97	106	90	56	75	48	106	147	155	111	53	89	155	255	75	71	316	18	41	23	14	42	7	2	1	2	4	0	0	0	6	4	5	1	92	123	104	18	165	209	115	45	23	37	20	2	14	27	12	3	36	21	6	0	49	20	12	1
67	060670038	9	6	5	2	763	0	0	0	0	0	0	0	0	80	49	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	50	63	125	332	214	0	0	0	0	25	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	82	586	0	0	0	0	0	0	0	38	57	104	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	238	331	0	0	0	0	0	0	0	192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2494	31372	104918	2494	2190	256	35	38	14	271	67	35	11	480	684	182	239	1018	1476	1778	422	37	11	2	10	5	5	21	204	120	109	158	188	150	100	193	185	134	226	278	219	165	273	168	334	131	164	983	25	73	43	47	237	12	3	2	0	55	23	1	2	11	3	5	0	152	218	206	94	245	381	338	147	53	58	71	26	34	62	84	38	44	44	10	1	51	43	13	0
67	060670039	9	6	5	2	822	0	0	0	0	0	0	0	0	182	78	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	40	165	81	97	399	0	0	0	0	66	168	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	49	592	0	0	0	0	0	0	0	62	154	178	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	189	311	0	0	0	0	0	0	0	400	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2346	36794	103140	2346	1968	109	26	7	4	154	84	12	12	455	671	109	217	1051	1294	1349	766	23	5	0	5	2	9	13	175	152	57	124	187	197	102	231	225	67	118	209	226	115	332	110	175	98	100	866	42	110	66	64	484	34	24	8	0	128	28	12	1	65	50	24	0	79	211	170	87	109	293	259	142	57	118	143	60	42	88	179	78	29	45	14	4	26	40	10	5
67	06067004001	9	6	5	2	1145	0	0	0	0	0	0	0	0	260	132	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	68	161	158	204	519	0	0	0	0	98	240	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	91	762	0	0	0	0	0	0	0	96	201	295	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	269	422	0	0	0	0	0	0	0	598	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3573	48386	157984	3573	3109	178	34	20	9	257	129	28	10	680	1006	230	332	1564	2010	2077	1104	42	8	3	6	1	9	13	309	198	112	229	264	217	203	340	264	133	259	302	329	252	468	189	321	137	177	1253	79	163	77	94	690	69	50	15	4	226	67	20	2	142	127	43	8	154	247	304	130	226	389	450	175	119	157	203	66	82	158	235	86	49	63	34	2	62	63	31	3
67	06067004004	9	6	5	2	1267	0	0	0	0	0	0	0	0	278	135	0	0	0	0	0	0	0	0	0	0	0	23	0	0	0	0	0	0	0	89	214	143	216	538	0	0	0	0	115	262	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	69	873	0	0	0	0	0	0	0	91	273	286	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	263	479	0	0	0	0	0	0	0	620	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4102	39793	196022	4102	4016	161	54	21	7	278	150	44	13	1006	1000	213	473	1843	2259	2170	1403	31	10	2	15	5	8	23	435	37	172	222	322	516	278	296	49	195	264	454	616	297	385	193	322	202	232	1220	124	246	170	127	738	69	73	39	0	234	81	24	5	111	87	35	6	153	412	308	22	226	636	378	34	138	310	226	12	129	302	271	14	72	102	34	3	88	108	28	0
67	06067004005	9	6	5	2	827	0	0	0	0	0	0	0	0	254	78	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	38	134	85	122	425	0	0	0	0	65	213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	54	542	0	0	0	0	0	0	0	77	206	225	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	158	317	0	0	0	0	0	0	0	492	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2862	30084	134762	2862	2700	96	35	21	2	206	127	31	8	653	754	192	312	1233	1629	1423	1096	21	2	1	15	3	6	14	281	64	123	181	159	270	194	241	97	149	237	240	337	216	354	175	285	99	147	718	90	201	101	110	593	40	35	7	2	116	43	13	1	63	71	29	2	113	189	200	33	209	344	286	49	116	169	204	30	98	176	254	47	53	59	25	1	65	51	25	1
67	06067004006	9	6	5	2	833	0	0	0	0	0	0	0	0	159	72	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	36	118	85	161	390	0	0	0	0	70	170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	56	564	0	0	0	0	0	0	0	63	171	170	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	194	308	0	0	0	0	0	0	0	402	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2810	28788	120987	2810	2580	149	46	25	9	183	102	42	7	634	679	220	327	1203	1607	1570	870	35	6	1	7	7	10	20	284	95	126	206	201	231	135	208	136	177	259	284	323	170	258	195	346	140	134	754	91	152	78	69	480	37	34	9	3	133	41	20	1	89	66	29	4	145	234	180	48	233	403	249	77	108	131	140	44	101	142	149	55	52	59	18	3	74	50	25	3
67	06067004007	9	6	5	2	2054	0	0	0	0	0	0	0	0	400	218	0	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	128	276	284	393	824	0	0	0	0	134	437	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	141	1414	0	0	0	0	0	0	0	147	429	426	0	0	0	0	0	0	0	0	0	0	46	0	0	0	0	0	0	0	423	803	0	0	0	0	0	0	0	970	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	8236	50284	361573	8236	8183	477	154	81	12	520	299	97	29	2685	1746	607	1156	3696	4539	4101	2888	117	21	2	26	4	16	25	1037	27	268	713	1056	902	369	362	26	372	994	1355	979	354	457	624	1003	432	457	1584	355	744	393	346	1051	119	139	66	5	269	173	64	7	242	238	111	17	371	882	322	15	683	1368	447	14	396	777	323	10	396	684	292	11	166	258	77	2	217	249	65	1
67	06067004008	9	6	5	2	644	0	0	0	0	0	0	0	0	111	62	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	46	89	59	91	305	0	0	0	0	48	132	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	437	0	0	0	0	0	0	0	45	133	114	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	137	236	0	0	0	0	0	0	0	288	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2187	15176	98106	2187	2174	122	36	28	8	147	94	18	6	687	474	110	291	1010	1177	1109	765	35	6	0	8	1	4	7	250	8	60	181	307	254	93	106	5	82	212	383	271	102	122	123	209	107	158	513	86	148	115	94	318	30	31	18	0	90	45	12	4	48	60	23	3	97	259	95	4	143	373	132	5	95	217	81	3	90	199	78	1	34	74	20	1	46	63	13	0
67	060670041	9	6	5	2	389	0	0	0	0	0	0	0	0	62	37	0	0	0	0	0	0	0	0	0	0	0	5	0	0	0	0	0	0	0	43	34	51	94	156	0	0	0	0	29	67	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	32	307	0	0	0	0	0	0	0	25	52	51	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	124	176	0	0	0	0	0	0	0	119	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1553	15549	65564	1553	1436	275	23	41	7	118	24	12	9	377	370	127	124	701	854	1030	267	31	18	1	2	8	5	19	175	53	83	121	148	124	67	104	63	101	177	171	111	80	149	138	239	99	87	465	23	51	40	29	122	18	9	5	3	54	11	7	3	21	16	19	1	102	174	119	43	165	197	176	51	41	51	29	10	47	35	40	11	36	31	18	0	41	38	9	0
67	06067004201	9	6	5	2	656	0	0	0	0	0	0	0	0	66	44	0	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	49	51	113	278	175	0	0	0	0	29	70	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	57	531	0	0	0	0	0	0	0	30	48	88	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	233	291	0	0	0	0	0	0	0	159	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2234	24890	91180	2234	1993	235	30	25	11	273	35	24	13	439	572	175	203	928	1306	1626	325	47	13	1	2	13	4	17	187	106	101	154	209	137	89	132	135	148	218	239	230	144	193	189	333	127	142	836	32	53	30	34	176	9	4	1	0	23	7	2	0	16	7	4	2	152	232	172	81	253	377	256	103	32	63	30	21	44	46	58	31	47	33	11	2	40	35	17	1
67	06067004202	9	6	5	2	574	0	0	0	0	0	0	0	0	49	34	0	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	37	41	94	266	150	0	0	0	0	22	35	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	49	471	0	0	0	0	0	0	0	24	38	60	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	193	274	0	0	0	0	0	0	0	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2064	19447	90500	2064	1938	274	30	38	12	242	31	28	12	444	487	169	208	843	1221	1521	254	42	15	2	5	7	2	16	198	46	99	150	184	123	85	157	81	139	226	227	179	147	224	205	340	145	150	680	27	58	33	27	110	8	4	3	2	20	6	0	0	8	4	5	3	154	206	194	38	253	310	298	69	36	48	31	8	33	37	50	10	38	40	14	1	48	36	18	2
67	06067004203	9	6	5	2	323	0	0	0	0	0	0	0	0	28	14	0	0	0	0	0	0	0	0	0	0	0	6	0	0	0	0	0	0	0	25	18	47	140	88	0	0	0	0	11	21	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	31	257	0	0	0	0	0	0	0	16	20	24	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	103	157	0	0	0	0	0	0	0	51	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1305	10314	55141	1305	1263	204	27	29	15	127	19	24	13	280	282	116	145	531	774	958	149	37	12	1	6	4	3	7	130	19	61	108	133	79	56	75	24	109	174	167	120	92	87	158	247	80	102	370	19	40	18	11	60	8	2	1	0	7	0	0	0	7	5	2	2	112	138	104	12	194	230	151	19	23	33	15	6	29	22	16	4	23	26	11	0	37	22	10	1
67	060670043	9	6	5	2	554	0	0	0	0	0	0	0	0	38	26	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	64	34	102	225	136	0	0	0	0	20	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	60	439	0	0	0	0	0	0	0	24	31	51	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	177	256	0	0	0	0	0	0	0	101	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2140	17717	87270	2140	2037	270	36	38	21	228	29	31	12	514	417	228	217	929	1211	1518	266	47	21	3	4	11	10	24	234	44	162	183	205	133	91	113	58	197	244	251	169	150	142	227	357	125	165	645	45	74	33	24	91	16	15	4	1	18	2	2	0	19	5	11	2	194	217	150	37	295	327	249	48	56	59	28	6	42	44	23	9	59	42	23	1	58	37	14	1
67	06067004401	9	6	5	2	434	0	0	0	0	0	0	0	0	38	30	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	40	34	62	111	179	0	0	0	0	31	42	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	357	0	0	0	0	0	0	0	22	35	52	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	145	204	0	0	0	0	0	0	0	91	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1636	16805	69008	1636	1464	267	27	30	18	138	27	19	13	374	376	134	147	731	905	1126	258	42	17	1	6	8	6	13	159	66	78	128	157	120	61	124	106	104	142	175	127	74	179	141	287	96	95	507	31	61	41	26	96	5	6	1	2	6	0	0	0	3	3	8	3	113	175	131	55	145	219	195	93	39	57	30	11	32	35	40	14	35	26	18	0	41	28	10	0
67	06067004402	9	6	5	2	290	0	0	0	0	0	0	0	0	25	25	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	29	28	36	88	114	0	0	0	0	14	29	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	33	230	0	0	0	0	0	0	0	17	23	27	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	93	152	0	0	0	0	0	0	0	54	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1172	10693	48209	1172	1074	214	17	32	14	109	10	8	8	268	250	96	126	489	683	852	146	21	11	1	3	7	2	11	119	35	65	93	115	78	41	61	64	86	111	153	100	55	113	131	218	73	84	347	21	40	21	15	50	3	2	1	0	4	0	0	0	3	4	3	2	95	136	79	29	125	195	138	56	24	33	14	6	21	23	19	6	27	17	8	0	33	23	11	0
67	060670045	9	6	5	2	486	0	0	0	0	0	0	0	0	97	55	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	59	42	70	113	194	0	0	0	0	54	77	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	58	360	0	0	0	0	0	0	0	40	73	86	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	134	250	0	0	0	0	0	0	0	194	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2292	20819	103923	2292	2127	320	56	46	18	186	53	27	11	510	556	185	221	928	1364	1473	468	54	10	3	2	12	1	27	242	61	96	155	176	135	82	223	106	175	223	251	146	126	338	249	392	126	116	590	43	117	57	36	216	18	6	4	0	19	6	3	0	13	4	5	4	135	181	197	43	249	278	306	83	47	74	79	16	42	57	135	17	47	43	21	1	71	36	18	5
67	06067004601	9	6	5	2	575	0	0	0	0	0	0	0	0	98	59	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	73	52	68	131	270	0	0	0	0	57	82	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	66	434	0	0	0	0	0	0	0	50	65	111	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	181	282	0	0	0	0	0	0	0	210	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2493	25531	100358	2493	2239	412	58	51	24	170	49	28	18	557	569	197	267	1070	1423	1573	508	70	28	3	14	8	6	11	271	100	123	199	251	168	82	146	155	179	269	287	203	109	222	215	378	132	161	688	45	121	86	50	208	11	13	6	3	5	5	1	0	11	4	10	4	151	245	139	83	256	335	239	124	70	94	68	15	70	88	73	31	62	61	15	0	72	44	15	0
67	06067004602	9	6	5	2	369	0	0	0	0	0	0	0	0	70	47	0	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	47	30	55	79	164	0	0	0	0	43	52	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	292	0	0	0	0	0	0	0	24	48	73	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	106	178	0	0	0	0	0	0	0	145	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1607	16609	63056	1607	1437	262	30	37	22	136	39	19	13	346	380	135	164	660	947	1058	293	36	17	4	0	9	2	12	177	66	72	121	170	95	56	81	102	120	197	194	123	79	131	148	259	95	97	458	34	65	28	30	135	10	3	6	1	9	3	3	0	3	4	2	1	108	158	89	53	195	216	156	85	35	58	39	14	37	52	42	17	29	41	7	0	52	36	12	1
67	060670047	9	6	5	2	643	0	0	0	0	0	0	0	0	126	82	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	67	73	103	167	238	0	0	0	0	63	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	65	466	0	0	0	0	0	0	0	53	98	118	0	0	0	0	0	0	0	0	0	0	21	0	0	0	0	0	0	0	209	279	0	0	0	0	0	0	0	242	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2623	26505	104958	2623	2351	273	45	40	18	239	82	41	17	540	692	211	258	1062	1561	1683	555	58	16	3	6	13	7	25	255	107	124	189	223	183	76	159	164	183	325	302	231	133	221	243	414	155	132	740	42	122	57	53	280	19	2	5	1	27	9	1	0	17	10	13	2	169	222	155	75	318	372	251	121	62	111	62	29	77	83	86	43	56	51	12	3	67	53	14	0
67	06067004801	9	6	5	2	365	0	0	0	0	0	0	0	0	58	29	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	27	25	40	133	160	0	0	0	0	26	35	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	47	285	0	0	0	0	0	0	0	20	32	50	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	126	165	0	0	0	0	0	0	0	107	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1561	12246	64905	1561	1492	103	18	18	13	154	21	20	18	382	354	147	156	681	880	986	265	51	30	2	9	12	3	12	189	25	101	148	140	126	56	86	43	131	180	184	138	85	119	150	214	92	93	437	24	72	54	35	79	19	28	10	5	5	1	1	2	25	31	27	18	135	138	94	24	179	230	144	42	46	66	33	1	43	41	35	1	39	46	11	0	51	29	16	0
67	06067004802	9	6	5	2	368	0	0	0	0	0	0	0	0	97	56	0	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	44	52	52	97	142	0	0	0	0	44	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	40	258	0	0	0	0	0	0	0	41	63	83	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	143	134	0	0	0	0	0	0	0	186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1747	17082	74380	1747	1646	168	30	24	4	113	51	16	11	411	423	122	166	765	982	1045	452	43	8	1	4	5	1	6	183	44	79	151	181	115	85	110	57	118	183	207	178	98	142	137	218	84	118	488	36	92	61	50	213	13	7	4	2	9	2	1	0	13	6	5	3	117	167	109	32	168	248	160	44	68	84	67	11	63	80	66	13	32	29	13	1	49	46	11	0
67	06067004903	9	6	5	2	421	0	0	0	0	0	0	0	0	44	29	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	31	31	82	163	108	0	0	0	0	34	44	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	45	330	0	0	0	0	0	0	0	17	35	52	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	120	222	0	0	0	0	0	0	0	110	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2055	12873	91860	2055	2037	179	27	21	12	219	34	23	12	499	443	171	242	824	1230	1357	373	50	16	4	3	7	5	16	224	7	97	138	200	159	101	123	11	173	272	278	196	110	191	236	408	144	119	451	29	89	53	37	165	18	14	7	5	7	4	4	0	27	25	18	5	148	232	139	5	288	344	194	8	40	70	59	2	50	64	86	2	30	40	21	0	68	48	16	1
67	06067004904	9	6	5	2	726	0	0	0	0	0	0	0	0	179	107	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	73	99	86	162	281	0	0	0	0	57	192	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	45	465	0	0	0	0	0	0	0	180	135	160	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	246	254	0	0	0	0	0	0	0	385	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2634	31171	107113	2634	2311	231	30	18	17	228	143	38	13	562	746	158	257	1136	1498	1536	794	52	9	3	6	2	5	23	204	128	118	175	237	193	110	176	195	146	251	278	248	162	220	164	319	115	149	790	60	140	94	72	429	11	6	3	3	11	3	1	0	16	4	7	1	129	245	172	78	226	341	228	119	99	133	97	47	101	121	124	73	45	33	11	3	48	42	19	3
67	06067004905	9	6	5	2	674	0	0	0	0	0	0	0	0	103	60	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	73	74	93	215	215	0	0	0	0	58	84	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	85	513	0	0	0	0	0	0	0	39	77	114	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	209	309	0	0	0	0	0	0	0	215	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2562	22283	114093	2562	2435	282	53	41	14	239	52	43	15	549	630	206	280	1041	1521	1689	511	51	21	1	5	7	4	15	259	70	119	180	210	160	125	177	57	214	266	249	238	206	291	220	413	168	152	735	43	128	66	47	227	10	10	3	3	18	7	3	2	12	7	6	3	157	225	209	52	287	351	363	43	62	81	69	15	86	81	104	13	54	50	17	3	76	34	24	1
67	06067004906	9	6	5	2	159	0	0	0	0	0	0	0	0	33	22	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	21	21	42	52	36	0	0	0	0	22	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	13	121	0	0	0	0	0	0	0	13	30	29	0	0	0	0	0	0	0	0	0	0	5	0	0	0	0	0	0	0	49	70	0	0	0	0	0	0	0	71	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	795	4405	33960	795	795	55	17	8	2	72	19	9	1	224	182	58	93	320	476	469	205	17	4	1	3	1	3	3	89	0	32	79	95	53	21	39	0	51	125	137	76	38	48	60	123	64	81	140	20	37	48	31	69	7	5	6	1	4	1	0	0	4	13	11	3	51	75	40	0	102	137	63	0	36	46	14	0	41	50	18	0	14	19	6	0	25	21	4	0
67	06067005001	9	6	5	2	707	0	0	0	0	0	0	0	0	131	94	0	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	90	96	117	155	248	0	0	0	0	76	120	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	72	495	0	0	0	0	0	0	0	68	121	131	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	224	328	0	0	0	0	0	0	0	277	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	3125	25430	137812	3125	3029	329	81	49	22	223	86	40	16	763	757	220	328	1365	1761	1873	764	66	19	3	10	19	10	13	349	37	189	252	260	248	174	206	60	215	345	347	313	218	263	281	434	191	197	771	62	169	115	94	324	10	11	8	2	38	13	6	3	15	25	12	7	217	269	223	28	347	439	309	43	100	152	122	8	99	138	128	17	81	62	28	1	80	63	34	0
67	06067005002	9	6	5	2	471	0	0	0	0	0	0	0	0	122	65	0	0	0	0	0	0	0	0	0	0	0	7	0	0	0	0	0	0	0	32	59	82	112	169	0	0	0	0	58	105	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	56	328	0	0	0	0	0	0	0	55	62	117	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	141	195	0	0	0	0	0	0	0	223	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2135	14145	111403	2135	2105	166	33	30	6	189	80	31	11	539	542	143	265	844	1290	1318	516	43	10	0	6	3	4	15	218	11	65	148	158	106	74	280	18	119	208	192	157	127	467	196	355	135	192	439	38	142	80	88	167	8	6	4	0	8	3	2	0	15	5	11	0	106	153	204	11	205	239	386	12	51	62	116	0	42	75	164	5	34	36	28	0	58	24	37	1
67	060670053	9	6	5	2	45	0	0	0	0	0	0	0	0	4	8	0	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	3	7	6	16	13	0	0	0	0	7	4	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	8	38	0	0	0	0	0	0	0	1	4	10	0	0	0	0	0	0	0	0	0	0	1	0	0	0	0	0	0	0	13	32	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	588	2180	26061	588	580	46	7	4	4	40	6	13	25	229	60	35	48	344	245	270	85	24	13	3	2	14	4	89	85	0	19	74	125	64	22	39	8	30	47	66	28	14	52	76	108	25	17	45	18	30	17	9	12	4	4	1	2	1	2	1	0	8	4	6	0	34	77	38	0	39	37	41	5	12	31	9	0	9	7	13	3	18	31	8	0	12	9	6	0
67	06067005402	9	6	5	2	194	0	0	0	0	0	0	0	0	45	36	0	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	25	30	30	28	66	0	0	0	0	17	57	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	18	127	0	0	0	0	0	0	0	22	32	67	0	0	0	0	0	0	0	0	0	0	10	0	0	0	0	0	0	0	56	71	0	0	0	0	0	0	0	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1221	4404	48826	1221	1213	65	18	20	3	75	53	23	2	456	193	161	180	566	655	587	428	22	5	2	3	2	7	6	159	3	113	244	91	45	19	51	5	155	206	78	56	29	126	170	244	76	42	55	104	160	80	33	51	7	7	0	3	4	1	1	0	7	2	0	0	145	61	32	2	184	80	79	4	145	47	32	1	101	36	65	1	48	24	6	0	57	15	9	0
67	06067005502	9	6	5	2	396	0	0	0	0	0	0	0	0	104	67	0	0	0	0	0	0	0	0	0	0	0	22	0	0	0	0	0	0	0	50	58	68	80	147	0	0	0	0	51	106	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	51	279	0	0	0	0	0	0	0	38	77	114	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	128	182	0	0	0	0	0	0	0	207	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2122	18690	83610	2122	1932	142	32	42	14	139	72	42	15	547	472	191	262	914	1208	1104	585	59	13	7	13	6	10	19	307	82	106	215	193	148	59	112	107	158	285	226	180	87	166	191	298	109	98	409	59	173	70	47	237	8	11	1	2	3	3	1	0	6	5	5	4	129	146	89	60	218	220	164	79	102	108	59	21	94	99	75	28	61	62	19	1	89	64	11	1
67	06067006202	9	6	5	2	225	0	0	0	0	0	0	0	0	78	42	0	0	0	0	0	0	0	0	0	0	0	9	0	0	0	0	0	0	0	41	29	39	39	87	0	0	0	0	37	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	23	157	0	0	0	0	0	0	0	36	51	72	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	88	92	0	0	0	0	0	0	0	139	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1487	11730	60981	1487	1391	118	23	22	12	116	65	34	14	393	338	127	186	641	846	762	399	53	16	3	5	4	7	12	225	35	65	123	167	121	50	80	62	108	184	187	139	64	102	148	197	73	84	260	56	115	53	34	141	3	1	0	0	4	0	3	0	2	2	0	0	68	128	70	21	146	185	98	46	55	86	48	12	59	72	55	12	43	48	9	2	63	49	7	3
67	060670063	9	6	5	2	331	0	0	0	0	0	0	0	0	74	48	0	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	46	49	63	64	142	0	0	0	0	36	67	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	236	0	0	0	0	0	0	0	31	71	76	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	129	155	0	0	0	0	0	0	0	142	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1827	14875	80205	1827	1759	142	31	36	12	142	61	36	18	488	413	137	193	827	1000	1012	398	69	16	2	8	6	23	20	274	23	77	129	241	167	83	108	45	109	210	226	161	88	162	197	198	93	109	415	54	95	56	57	137	1	2	2	3	4	1	2	0	4	1	2	0	100	192	114	15	144	241	170	37	47	99	57	9	63	60	57	8	29	79	13	0	72	64	17	0
67	060670064	9	6	5	2	366	0	0	0	0	0	0	0	0	82	59	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	66	36	72	70	133	0	0	0	0	44	78	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	46	251	0	0	0	0	0	0	0	42	51	88	0	0	0	0	0	0	0	0	0	0	31	0	0	0	0	0	0	0	154	143	0	0	0	0	0	0	0	166	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2093	15989	90753	2093	2009	151	32	38	8	169	45	36	32	495	453	146	211	923	1170	1230	418	70	18	6	14	11	13	34	278	29	93	192	238	163	77	131	55	121	238	269	206	97	183	245	235	113	156	481	62	120	58	48	131	5	3	0	0	4	2	1	1	2	0	1	0	113	222	140	25	182	277	221	52	63	91	42	3	73	103	41	3	65	58	17	0	64	60	15	0
67	060670065	9	6	5	2	377	0	0	0	0	0	0	0	0	60	35	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	48	37	103	107	91	0	0	0	0	41	53	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	44	287	0	0	0	0	0	0	0	22	58	52	0	0	0	0	0	0	0	0	0	0	11	0	0	0	0	0	0	0	133	172	0	0	0	0	0	0	0	109	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2188	14591	93029	2188	2112	129	36	29	18	259	51	39	28	568	458	164	221	946	1242	1428	329	70	22	3	11	8	7	38	276	30	120	186	273	140	74	126	47	156	252	306	199	116	169	287	368	128	143	504	56	99	47	48	81	17	8	1	1	1	0	1	1	1	3	3	0	147	238	142	27	233	355	243	44	63	83	30	2	59	67	25	3	56	56	15	1	71	63	14	0
67	060670066	9	6	5	2	329	0	0	0	0	0	0	0	0	52	48	0	0	0	0	0	0	0	0	0	0	0	19	0	0	0	0	0	0	0	42	40	66	64	109	0	0	0	0	35	63	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	36	231	0	0	0	0	0	0	0	46	46	66	0	0	0	0	0	0	0	0	0	0	17	0	0	0	0	0	0	0	130	131	0	0	0	0	0	0	0	128	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2110	14963	89352	2110	2008	172	24	29	20	185	62	43	29	554	429	184	250	911	1199	1277	398	70	22	3	11	19	8	28	271	37	107	165	237	169	81	111	64	137	254	295	159	113	175	252	362	106	133	423	67	115	44	36	133	10	2	3	0	4	0	1	0	1	1	0	0	114	216	126	27	215	301	225	49	60	92	39	10	68	67	43	15	61	63	18	0	64	55	9	0
67	06067006701	9	6	5	2	483	0	0	0	0	0	0	0	0	149	60	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	73	60	101	106	166	0	0	0	0	59	108	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	53	360	0	0	0	0	0	0	0	59	81	122	0	0	0	0	0	0	0	0	0	0	29	0	0	0	0	0	0	0	186	203	0	0	0	0	0	0	0	239	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2629	14906	108190	2629	2613	228	56	57	13	200	96	53	14	801	567	204	268	1195	1434	1438	694	66	15	3	12	4	9	23	365	4	146	297	326	227	94	100	12	172	394	404	234	108	109	263	350	155	224	445	71	183	105	117	217	16	4	4	0	3	6	2	0	7	5	1	2	188	273	102	4	312	403	145	9	122	184	66	0	122	144	52	3	93	77	19	0	94	67	15	0
67	06067006702	9	6	5	2	334	0	0	0	0	0	0	0	0	29	11	0	0	0	0	0	0	0	0	0	0	0	2	0	0	0	0	0	0	0	32	21	80	118	91	0	0	0	0	14	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	47	262	0	0	0	0	0	0	0	12	12	26	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	123	143	0	0	0	0	0	0	0	44	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1803	12833	73135	1803	1727	140	8	33	11	223	18	23	19	414	362	182	183	741	1062	1288	165	68	27	4	7	17	4	24	198	23	102	156	185	133	56	85	52	169	241	248	138	89	123	230	342	103	131	482	17	63	23	20	40	24	9	1	9	0	2	0	0	1	0	0	0	153	231	111	21	252	294	182	45	29	32	15	2	35	26	17	7	41	35	9	0	63	40	9	0
67	060670068	9	6	5	2	372	0	0	0	0	0	0	0	0	57	42	0	0	0	0	0	0	0	0	0	0	0	16	0	0	0	0	0	0	0	45	44	53	79	161	0	0	0	0	37	58	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	37	277	0	0	0	0	0	0	0	26	53	64	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	121	179	0	0	0	0	0	0	0	126	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2100	16667	85598	2100	1976	342	45	60	25	157	53	26	25	491	443	180	229	887	1213	1288	378	66	27	5	8	37	9	23	259	49	121	177	210	144	89	99	76	175	250	280	183	89	162	240	341	140	104	463	53	102	62	34	129	5	3	1	3	3	0	2	1	2	3	5	1	145	195	115	38	235	311	189	61	59	74	55	10	52	69	45	15	53	51	14	0	84	47	11	0
67	060670069	9	6	5	2	500	0	0	0	0	0	0	0	0	112	60	0	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	37	58	75	108	262	0	0	0	0	42	96	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	63	367	0	0	0	0	0	0	0	48	88	96	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	162	196	0	0	0	0	0	0	0	216	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2246	19676	100690	2246	2105	186	33	27	15	186	70	28	16	585	468	166	273	1002	1244	1298	555	68	14	4	11	10	14	16	256	49	75	171	230	205	119	152	92	103	232	242	210	120	244	206	350	115	116	510	67	130	65	52	240	5	3	0	0	6	1	2	0	4	4	2	1	107	222	158	32	184	288	240	66	62	116	84	16	56	96	99	25	42	65	25	0	57	49	18	0
67	06067007001	9	6	5	2	203	0	0	0	0	0	0	0	0	33	26	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	37	23	26	37	95	0	0	0	0	18	32	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	19	179	0	0	0	0	0	0	0	14	26	33	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	57	113	0	0	0	0	0	0	0	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1037	7723	43707	1037	991	289	37	38	18	44	27	17	9	286	203	86	102	485	552	641	196	36	10	3	5	8	4	18	119	17	52	104	124	76	52	60	29	77	121	119	81	41	84	111	172	57	57	245	32	52	33	28	50	1	1	1	1	2	0	0	0	0	2	1	0	69	105	77	14	123	134	95	26	34	51	21	3	28	37	22	3	27	30	12	0	26	19	4	0
67	06067007004	9	6	5	2	476	0	0	0	0	0	0	0	0	91	64	0	0	0	0	0	0	0	0	0	0	0	13	0	0	0	0	0	0	0	56	55	75	93	208	0	0	0	0	46	83	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	34	393	0	0	0	0	0	0	0	28	66	93	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	122	239	0	0	0	0	0	0	0	187	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2534	11754	99227	2534	2531	244	59	60	16	213	64	48	14	802	431	246	361	1110	1424	1428	626	68	17	3	4	2	9	23	356	2	113	339	361	171	56	67	2	208	458	397	210	79	72	298	450	171	171	337	117	190	87	71	162	8	5	5	1	5	6	3	0	6	13	10	1	186	277	69	2	401	387	104	2	135	152	44	0	131	132	33	0	89	86	10	0	89	73	12	0
67	06067007005	9	6	5	2	1047	0	0	0	0	0	0	0	0	176	111	0	0	0	0	0	0	0	0	0	0	0	27	0	0	0	0	0	0	0	84	126	147	168	487	0	0	0	0	90	175	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	62	832	0	0	0	0	0	0	0	94	139	179	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	292	442	0	0	0	0	0	0	0	408	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4373	22515	176593	4373	4366	409	101	79	23	321	142	72	17	1359	730	368	739	1893	2480	2422	1231	102	14	1	22	6	29	21	520	3	191	483	605	382	126	104	4	337	668	733	452	164	125	406	671	329	341	675	181	379	183	132	356	11	17	6	1	14	10	3	3	16	19	7	1	300	526	124	2	532	759	177	2	216	318	86	1	253	266	88	2	109	104	12	0	161	113	20	0
67	06067007006	9	6	5	2	1164	0	0	0	0	0	0	0	0	214	122	0	0	0	0	0	0	0	0	0	0	0	35	0	0	0	0	0	0	0	128	149	181	221	466	0	0	0	0	110	201	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	99	889	0	0	0	0	0	0	0	86	170	235	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	316	577	0	0	0	0	0	0	0	433	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	4763	29101	196150	4763	4671	615	105	88	46	367	166	66	25	1358	927	394	745	2053	2710	2703	1224	98	29	8	21	8	23	44	609	39	199	468	567	433	177	168	53	330	657	745	529	198	195	439	765	299	307	894	193	377	173	119	360	16	4	7	0	23	14	10	3	20	7	6	5	284	526	215	30	560	775	270	39	197	306	92	8	197	311	98	12	129	121	27	1	166	140	22	0
67	06067007007	9	6	5	2	605	0	0	0	0	0	0	0	0	74	51	0	0	0	0	0	0	0	0	0	0	0	12	0	0	0	0	0	0	0	60	71	106	111	248	0	0	0	0	48	73	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	496	0	0	0	0	0	0	0	49	50	73	0	0	0	0	0	0	0	0	0	0	18	0	0	0	0	0	0	0	164	315	0	0	0	0	0	0	0	170	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2086	20174	90742	2086	1996	484	51	62	22	130	44	18	8	470	496	149	201	904	1182	1342	426	41	11	4	6	4	7	12	229	37	94	169	216	167	80	143	52	123	229	260	231	111	174	154	262	112	138	675	34	109	57	60	168	9	2	1	1	7	4	6	0	3	7	0	1	129	222	151	29	213	328	230	42	70	107	50	5	56	87	41	10	44	40	16	3	59	56	11	2
67	06067009601	9	6	5	2	594	0	0	0	0	0	0	0	0	64	62	0	0	0	0	0	0	0	0	0	0	0	8	0	0	0	0	0	0	0	35	36	133	194	187	0	0	0	0	33	83	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	41	468	0	0	0	0	0	0	0	44	66	81	0	0	0	0	0	0	0	0	0	0	15	0	0	0	0	0	0	0	189	270	0	0	0	0	0	0	0	179	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	2434	14989	104307	2434	2427	265	67	34	12	227	48	21	14	726	536	174	241	1102	1332	1559	502	41	14	5	6	11	5	14	277	2	145	193	300	251	104	106	5	160	260	400	294	96	116	213	372	181	211	582	61	110	65	63	202	26	12	15	3	6	2	5	1	35	28	18	6	186	315	140	2	266	487	158	5	63	162	45	0	82	114	34	0	67	53	19	0	46	75	16	0
67	06067009602	9	6	5	2	1115	0	0	0	0	0	0	0	0	158	113	0	0	0	0	0	0	0	0	0	0	0	20	0	0	0	0	0	0	0	104	101	208	340	354	0	0	0	0	70	186	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	106	837	0	0	0	0	0	0	0	107	115	202	0	0	0	0	0	0	0	0	0	0	24	0	0	0	0	0	0	0	344	529	0	0	0	0	0	0	0	373	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	5157	31359	214325	5157	5079	589	94	97	32	490	128	85	33	1343	1088	434	609	2179	2978	3225	1056	114	39	3	18	15	16	37	634	39	303	458	560	387	190	242	39	479	693	738	482	258	289	560	948	403	362	952	123	268	189	124	352	38	17	14	3	30	8	5	0	48	36	24	8	410	550	271	31	731	824	381	27	163	239	114	8	185	220	116	12	120	115	36	0	186	138	40	0