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67	060670001	34	100	10	5	5	2368	1405	645	673	898	411	909	375	824	454	482	729	808	424	774	454	920	323	973	268	526	697	635	624	651	674	337	770	536	678	699	566	343	829	266	1011	670	532	479	746	435	750	187	447	1	2	283	382	2	2	24	2	2	0	2	0	1	16	2	1	0	3	0	1	2	834	10	9	269	14	8	72	31	14	16	8	7	9	2	2	983	0	0	0	0	0	0	0	0	273	0	0	0	0	0	0	0	0	0	0	28	0	16	0	9	0	0	0	0	0	664	0	0	0	0	0	0	0	0	495	0	0	0	0	0	0	0	0	0	0	0	0	48	0	0	0	0	0	0	0	689	0	0	0	0	0	0	0	0	112	357	0	0	0	0	0	0	0	0	0	0	0	46	0	11	0	0	0	0	0
67	060670002	34	200	10	5	5	2530	1486	764	605	947	437	921	436	845	515	530	770	797	509	837	460	902	407	977	326	559	743	704	633	609	798	365	833	512	792	734	608	397	856	302	1056	662	631	466	852	417	842	209	473	2	2	294	384	3	4	29	5	3	0	0	0	4	22	2	3	0	3	0	3	4	842	13	5	267	19	10	83	42	19	37	2	12	7	8	2	1002	0	0	0	0	0	0	0	0	272	0	0	0	0	0	0	0	0	0	0	37	0	22	0	18	0	0	0	0	0	688	0	0	0	0	0	0	0	0	516	0	0	0	0	0	0	0	0	0	0	0	0	65	0	0	0	0	0	0	0	719	0	0	0	0	0	0	0	0	153	314	0	0	0	0	0	0	0	0	0	0	0	57	0	16	0	0	0	0	0
67	060670003	34	300	10	5	5	2323	1392	675	627	920	368	897	388	831	457	502	735	741	489	772	460	826	413	904	342	509	725	634	631	548	788	323	821	529	687	699	558	338	836	283	1002	657	541	505	729	432	754	198	516	3	3	219	326	2	1	26	4	1	0	1	0	3	33	1	0	0	4	0	1	3	844	16	9	227	24	8	60	22	16	32	6	8	6	11	3	972	0	0	0	0	0	0	0	0	239	0	0	0	0	0	0	0	0	0	0	45	0	20	0	13	0	0	0	0	0	712	0	0	0	0	0	0	0	0	414	0	0	0	0	0	0	0	0	0	0	0	0	47	0	0	0	0	0	0	0	764	0	0	0	0	0	0	0	0	104	275	0	0	0	0	0	0	0	0	0	0	0	42	0	12	0	0	0	0	0
67	060670016	34	1600	10	5	5	3615	1969	959	882	1200	615	1227	590	1102	698	632	1095	1055	677	1111	600	1232	507	1327	417	766	964	986	808	830	1047	535	1075	733	993	913	885	502	1142	410	1406	920	775	618	1134	539	1135	229	614	6	3	434	529	3	5	22	4	4	0	1	0	6	40	1	2	0	3	0	3	7	1067	25	7	405	27	12	97	64	25	45	10	8	13	10	4	1293	0	0	0	0	0	0	0	0	421	0	0	0	0	0	0	0	0	0	0	55	0	34	0	19	0	0	0	0	0	847	0	0	0	0	0	0	0	0	773	0	0	0	0	0	0	0	0	0	0	0	0	62	0	0	0	0	0	0	0	927	0	0	0	0	0	0	0	0	180	501	0	0	0	0	0	0	0	0	0	0	0	74	0	21	0	0	0	0	0
67	06067005101	34	5101	10	5	5	1620	660	412	222	358	263	353	264	329	287	236	371	398	208	300	284	452	154	437	168	319	282	428	182	435	192	202	337	224	374	295	307	235	337	221	375	358	237	136	462	166	422	48	265	5	1	164	102	2	1	24	3	6	1	0	0	0	2	2	0	0	1	4	2	0	338	21	6	102	10	5	49	36	11	5	2	12	1	7	0	438	0	0	0	0	0	0	0	0	128	0	0	0	0	0	0	0	0	0	0	11	0	11	0	7	0	0	0	0	0	337	0	0	0	0	0	0	0	0	220	0	0	0	0	0	0	0	0	0	0	0	0	25	0	0	0	0	0	0	0	344	0	0	0	0	0	0	0	0	74	148	0	0	0	0	0	0	0	0	0	0	0	28	0	4	0	0	0	0	0
67	06067005102	34	5102	10	5	5	2008	867	486	331	462	353	485	314	432	356	326	436	516	262	428	323	618	153	619	154	417	340	531	260	583	218	222	460	279	484	368	406	277	458	274	500	401	369	198	565	181	558	45	319	0	1	224	178	3	1	20	4	4	0	0	1	0	8	4	0	0	3	0	1	2	438	28	5	131	15	3	80	42	16	5	5	2	1	9	1	536	0	0	0	0	0	0	0	0	197	0	0	0	0	0	0	0	0	0	0	11	0	19	0	15	0	0	0	0	0	406	0	0	0	0	0	0	0	0	313	0	0	0	0	0	0	0	0	0	0	0	0	33	0	0	0	0	0	0	0	427	0	0	0	0	0	0	0	0	123	176	0	0	0	0	0	0	0	0	0	0	0	29	0	11	0	0	0	0	0
67	06067005103	34	5103	10	5	5	402	223	109	93	108	93	118	82	95	100	74	123	126	70	109	82	155	36	154	40	113	80	148	53	158	44	59	120	63	134	95	102	72	112	75	122	98	92	39	155	36	151	13	78	1	1	68	40	0	0	3	0	1	0	0	0	1	3	2	0	0	0	0	0	0	108	6	4	34	0	0	28	20	1	1	0	2	0	3	0	128	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	0	0	0	2	0	4	0	5	0	0	0	0	0	92	0	0	0	0	0	0	0	0	88	0	0	0	0	0	0	0	0	0	0	0	0	4	0	0	0	0	0	0	0	97	0	0	0	0	0	0	0	0	37	57	0	0	0	0	0	0	0	0	0	0	0	3	0	2	0	0	0	0	0
67	06067005201	34	5201	10	5	5	1290	490	272	188	330	129	328	126	309	148	179	244	261	166	255	170	284	141	306	117	239	193	223	220	213	263	173	233	186	248	268	179	156	255	89	355	222	196	149	283	139	284	49	202	2	0	80	104	0	0	17	4	0	0	2	0	0	9	1	0	0	0	0	1	3	265	9	3	60	18	1	32	16	12	11	5	2	1	5	1	322	0	0	0	0	0	0	0	0	84	0	0	0	0	0	0	0	0	0	0	17	0	12	0	2	0	0	0	0	0	247	0	0	0	0	0	0	0	0	140	0	0	0	0	0	0	0	0	0	0	0	0	31	0	0	0	0	0	0	0	263	0	0	0	0	0	0	0	0	44	88	0	0	0	0	0	0	0	0	0	0	0	26	0	8	0	0	0	0	0
67	06067005202	34	5202	10	5	5	2294	1154	594	486	674	393	681	381	627	446	414	626	636	403	672	349	813	236	840	206	523	525	657	419	652	454	332	630	389	657	517	552	345	644	286	794	571	465	318	726	286	706	103	353	3	5	298	280	3	2	47	5	1	0	0	0	2	18	2	1	0	1	0	1	1	581	18	4	224	15	10	100	53	14	9	9	14	5	6	3	705	0	0	0	0	0	0	0	0	290	0	0	0	0	0	0	0	0	0	0	28	0	23	0	13	0	0	0	0	0	475	0	0	0	0	0	0	0	0	500	0	0	0	0	0	0	0	0	0	0	0	0	50	0	0	0	0	0	0	0	499	0	0	0	0	0	0	0	0	163	322	0	0	0	0	0	0	0	0	0	0	0	39	0	8	0	0	0	0	0
67	06067005203	34	5203	10	5	5	4014	2106	1076	899	1183	742	1197	720	1094	831	762	1105	1191	680	1189	691	1457	418	1498	388	914	979	1212	718	1239	768	612	1130	707	1161	925	999	650	1159	529	1418	973	895	545	1360	503	1338	199	638	5	1	567	525	3	2	52	6	3	0	0	0	2	19	1	0	1	3	0	5	0	1083	38	12	449	28	22	150	87	22	9	15	11	10	15	5	1311	0	0	0	0	0	0	0	0	523	0	0	0	0	0	0	0	0	0	0	30	0	39	0	25	0	0	0	0	0	804	0	0	0	0	0	0	0	0	962	0	0	0	0	0	0	0	0	0	0	0	0	79	0	0	0	0	0	0	0	917	0	0	0	0	0	0	0	0	266	596	0	0	0	0	0	0	0	0	0	0	0	49	0	19	0	0	0	0	0
67	06067005403	34	5403	10	5	5	1837	1004	455	493	633	305	682	248	634	303	389	517	614	288	630	272	692	210	725	179	400	509	523	394	485	470	226	593	388	512	516	412	272	603	195	724	479	417	349	571	309	579	93	247	1	2	286	313	1	0	18	2	1	0	0	0	0	7	0	3	0	1	0	1	2	490	7	2	290	14	9	50	33	10	11	1	4	6	2	1	597	0	0	0	0	0	0	0	0	282	0	0	0	0	0	0	0	0	0	0	15	0	14	0	7	0	0	0	0	0	356	0	0	0	0	0	0	0	0	491	0	0	0	0	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	391	0	0	0	0	0	0	0	0	97	367	0	0	0	0	0	0	0	0	0	0	0	24	0	8	0	0	0	0	0
67	06067005404	34	5404	10	5	5	3890	2044	825	1126	1199	733	1320	607	1188	739	777	1102	1194	689	1254	606	1481	404	1515	370	832	1041	1167	747	1135	826	491	1231	771	1108	982	914	566	1213	413	1493	959	883	586	1281	567	1240	175	415	2	5	665	645	3	2	46	5	6	0	0	0	1	10	6	1	1	7	0	1	1	866	15	12	726	22	22	137	77	14	17	5	4	10	5	3	1107	0	0	0	0	0	0	0	0	722	0	0	0	0	0	0	0	0	0	0	27	0	31	0	13	0	0	0	0	0	589	0	0	0	0	0	0	0	0	1183	0	0	0	0	0	0	0	0	0	0	0	0	56	0	0	0	0	0	0	0	684	0	0	0	0	0	0	0	0	285	814	0	0	0	0	0	0	0	0	0	0	0	44	0	6	0	0	0	0	0
67	06067005503	34	5503	10	5	5	2976	1098	657	372	670	359	655	365	641	393	400	575	638	350	584	384	752	242	750	249	543	441	642	373	605	450	358	551	371	614	501	475	381	552	331	657	538	412	275	695	236	690	84	383	6	2	259	244	1	4	27	6	6	0	1	0	1	10	9	0	1	1	0	1	1	537	21	9	183	30	10	82	54	28	17	12	12	7	15	0	652	0	0	0	0	0	0	0	0	256	0	0	0	0	0	0	0	0	0	0	30	0	33	0	18	0	0	0	0	0	467	0	0	0	0	0	0	0	0	434	0	0	0	0	0	0	0	0	0	0	0	0	59	0	0	0	0	0	0	0	492	0	0	0	0	0	0	0	0	157	253	0	0	0	0	0	0	0	0	0	0	0	53	0	9	0	0	0	0	0
67	06067005504	34	5504	10	5	5	4281	1598	907	605	1025	465	1048	435	991	492	626	789	925	496	881	526	1009	415	1078	357	734	691	865	612	722	812	503	839	633	801	883	554	487	860	344	1121	772	602	485	928	450	904	171	540	0	2	355	368	4	2	45	3	8	0	1	2	2	28	2	1	1	1	0	1	7	850	34	14	291	21	14	87	50	37	21	21	9	4	14	4	965	0	0	0	0	0	0	0	0	363	0	0	0	0	0	0	0	0	0	0	39	0	42	0	26	0	0	0	0	0	703	0	0	0	0	0	0	0	0	576	0	0	0	0	0	0	0	0	0	0	0	0	64	0	0	0	0	0	0	0	733	0	0	0	0	0	0	0	0	197	333	0	0	0	0	0	0	0	0	0	0	0	78	0	14	0	0	0	0	0
67	06067005601	34	5601	10	5	5	2656	1189	629	502	708	404	725	388	641	469	428	637	707	365	654	411	830	239	832	254	550	520	696	407	665	466	358	638	457	626	570	530	352	673	314	771	588	457	355	711	325	706	113	377	4	4	298	291	4	2	25	3	1	0	0	0	0	8	0	0	0	5	0	5	2	612	26	19	233	17	17	86	45	15	4	6	7	1	6	3	720	0	0	0	0	0	0	0	0	314	0	0	0	0	0	0	0	0	0	0	18	0	18	0	13	0	0	0	0	0	508	0	0	0	0	0	0	0	0	492	0	0	0	0	0	0	0	0	0	0	0	0	53	0	0	0	0	0	0	0	543	0	0	0	0	0	0	0	0	148	316	0	0	0	0	0	0	0	0	0	0	0	41	0	14	0	0	0	0	0
67	06067005605	34	5605	10	5	5	1756	748	438	271	433	271	429	265	402	289	251	411	409	258	386	277	535	144	512	165	341	331	460	231	399	317	239	389	266	408	359	321	251	386	249	443	372	285	190	480	179	469	64	247	3	1	200	167	0	0	18	1	0	1	1	0	2	9	3	0	0	1	0	1	1	364	17	12	145	18	2	66	33	12	9	3	4	4	4	1	446	0	0	0	0	0	0	0	0	211	0	0	0	0	0	0	0	0	0	0	13	0	16	0	10	0	0	0	0	0	299	0	0	0	0	0	0	0	0	316	0	0	0	0	0	0	0	0	0	0	0	0	37	0	0	0	0	0	0	0	331	0	0	0	0	0	0	0	0	106	191	0	0	0	0	0	0	0	0	0	0	0	35	0	5	0	0	0	0	0
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67	06067005702	34	5702	10	5	5	3234	1947	793	1043	1092	744	1126	688	1104	734	701	1056	1077	684	1141	606	1366	385	1372	388	674	1070	1012	780	989	877	422	1196	667	1080	910	873	473	1178	367	1413	881	820	556	1183	523	1135	218	454	1	0	554	577	1	1	40	3	5	0	1	0	2	19	1	2	0	7	0	7	7	959	16	9	551	20	15	126	54	23	19	6	6	4	8	1	1204	0	0	0	0	0	0	0	0	523	0	0	0	0	0	0	0	0	0	0	37	0	31	0	11	0	0	0	0	0	704	0	0	0	0	0	0	0	0	961	0	0	0	0	0	0	0	0	0	0	0	0	58	0	0	0	0	0	0	0	776	0	0	0	0	0	0	0	0	214	669	0	0	0	0	0	0	0	0	0	0	0	57	0	9	0	0	0	0	0
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67	06067008907	34	8907	10	5	11	2220	1038	615	374	616	368	595	372	545	423	403	540	637	316	575	372	762	202	745	218	521	423	677	300	636	360	330	556	338	607	430	513	358	536	340	612	513	414	239	705	224	683	98	328	1	1	268	233	1	4	33	5	2	2	0	0	0	12	2	1	1	1	0	2	1	503	28	18	221	14	5	74	40	21	18	6	8	4	4	3	287	118	0	0	0	0	0	0	0	469	0	0	0	0	0	0	0	0	0	0	0	0	30	0	25	0	0	0	0	0	409	0	0	0	0	0	0	0	0	494	0	0	0	0	0	0	0	0	0	0	0	0	36	0	0	0	0	0	0	0	470	0	0	0	0	0	0	0	0	142	265	0	0	0	0	0	0	0	0	0	0	0	41	0	6	0	0	0	0	0
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67	06067009109	34	9109	10	5	5	3129	1634	828	730	818	718	888	641	844	686	583	880	871	604	803	656	1174	325	1207	298	750	734	1027	495	1028	554	449	925	537	931	686	812	451	984	475	1039	780	654	392	1090	356	1062	117	497	2	1	515	325	2	4	79	4	4	1	0	0	2	25	2	0	2	1	0	5	2	737	35	18	338	30	16	177	89	20	18	10	6	7	7	2	936	0	0	0	0	0	0	0	0	501	0	0	0	0	0	0	0	0	0	0	25	0	26	0	12	0	0	0	0	0	609	0	0	0	0	0	0	0	0	774	0	0	0	0	0	0	0	0	0	0	0	0	54	0	0	0	0	0	0	0	657	0	0	0	0	0	0	0	0	244	495	0	0	0	0	0	0	0	0	0	0	0	53	0	10	0	0	0	0	0
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67	06067009401	34	9401	10	5	11	3975	2166	1085	980	849	1195	857	1177	843	1199	663	1324	1094	908	1003	958	1676	335	1571	431	999	973	1438	581	1577	511	704	1115	638	1328	637	1375	765	1102	713	1299	1018	930	421	1568	388	1524	110	390	2	6	967	518	6	2	71	2	1	0	0	0	1	11	5	1	1	3	0	4	0	644	24	30	591	38	14	298	253	46	9	11	5	11	12	9	315	128	0	0	0	0	0	0	0	1432	0	0	0	0	0	0	0	0	0	0	0	0	47	0	37	0	0	0	0	0	508	0	0	0	0	0	0	0	0	1372	0	0	0	0	0	0	0	0	0	0	0	0	88	0	0	0	0	0	0	0	729	0	0	0	0	0	0	0	0	382	788	0	0	0	0	0	0	0	0	0	0	0	57	0	18	0	0	0	0	0
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