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67	06067005804	34	5804	5	6	5	2020	1130	464	624	659	409	722	343	674	401	451	582	653	369	707	323	837	186	845	174	443	576	613	417	614	470	273	657	393	635	575	482	280	703	226	820	529	472	355	677	322	678	118	238	0	0	354	354	0	1	21	2	2	2	0	0	1	6	1	0	0	0	0	0	1	495	13	3	376	10	14	75	48	7	4	2	2	5	1	0	643	0	0	0	0	0	0	0	0	385	0	0	0	0	0	0	0	0	0	0	7	0	14	0	8	0	0	0	0	0	0	0	0	0	0	0	0	0	0	792	0	0	0	0	0	0	0	0	0	0	0	0	141	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067005901	34	5901	5	6	3	3815	2146	958	1082	1202	811	1208	785	1137	878	813	1125	1175	779	1156	779	1549	406	1577	378	843	1091	1204	767	1277	770	501	1291	654	1298	951	1023	574	1267	555	1408	1016	893	546	1390	513	1336	179	517	3	5	714	571	3	1	49	4	1	1	0	0	4	14	3	4	0	2	0	5	1	926	30	15	553	19	21	217	140	15	15	8	19	14	4	2	628	0	0	0	0	0	0	0	0	1261	0	0	0	0	0	0	0	0	0	0	0	0	32	0	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1403	0	0	0	0	0	0	0	0	0	0	0	0	325	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067005902	34	5902	5	6	3	4207	2165	1029	1028	1164	865	1193	816	1120	909	759	1165	1177	767	1105	834	1534	413	1517	435	961	1003	1270	718	1281	800	638	1156	696	1267	970	1009	664	1177	601	1386	964	923	536	1415	530	1347	162	599	4	3	634	561	7	3	70	2	3	1	1	0	4	17	7	2	1	3	1	6	1	928	47	22	485	12	22	236	133	27	25	18	19	5	12	8	664	0	0	0	0	0	0	0	0	1194	0	0	0	0	0	0	0	0	0	0	0	0	43	0	30	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1347	0	0	0	0	0	0	0	0	0	0	0	0	424	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067006001	34	6001	5	6	3	3695	1885	935	855	1118	655	1152	600	1049	728	702	1001	1118	593	1077	620	1352	369	1372	336	823	872	1037	707	1088	724	515	1053	681	1037	867	878	567	1071	501	1242	939	734	546	1175	472	1168	174	511	4	1	551	475	4	7	62	4	2	3	0	1	1	23	4	2	0	4	0	7	3	885	31	16	437	19	19	181	77	25	16	14	4	14	2	6	625	0	0	0	0	0	0	0	0	973	0	0	0	0	0	0	0	0	0	0	0	0	50	0	35	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1169	0	0	0	0	0	0	0	0	0	0	0	0	368	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067006002	34	6002	5	6	5	2624	1320	685	575	780	465	778	458	713	527	500	692	716	479	725	465	946	250	939	256	604	589	763	445	720	537	419	673	436	752	587	629	422	730	361	852	617	543	363	820	352	805	90	373	1	1	363	356	4	0	48	2	2	1	1	0	1	21	0	0	1	2	0	8	0	586	32	11	227	17	18	145	88	33	18	10	7	7	8	2	722	0	0	0	0	0	0	0	0	397	0	0	0	0	0	0	0	0	0	0	30	0	36	0	19	0	0	0	0	0	0	0	0	0	0	0	0	0	0	759	0	0	0	0	0	0	0	0	0	0	0	0	294	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007003	34	7003	5	6	5	2496	1022	520	445	599	355	592	351	534	416	375	544	544	369	571	346	715	221	709	214	448	474	626	322	522	461	311	546	347	563	487	447	310	572	239	703	495	399	303	622	299	592	84	292	3	0	272	288	2	1	31	2	2	0	0	0	7	2	0	2	0	0	1	3	1	472	15	9	214	16	10	115	38	12	8	3	5	4	5	1	554	0	0	0	0	0	0	0	0	311	0	0	0	0	0	0	0	0	0	0	10	0	21	0	8	0	0	0	0	0	0	0	0	0	0	0	0	0	0	571	0	0	0	0	0	0	0	0	0	0	0	0	211	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	060670071	34	7100	5	6	3	487	295	154	122	130	144	125	146	146	132	89	170	142	123	144	114	206	60	199	64	154	106	174	85	187	98	89	147	108	153	93	170	106	143	102	161	133	122	72	191	61	199	20	89	0	1	89	74	0	1	9	1	0	0	0	0	0	3	1	0	0	0	0	1	0	111	20	0	62	2	2	34	25	9	1	5	0	1	2	1	101	0	0	0	0	0	0	0	0	160	0	0	0	0	0	0	0	0	0	0	0	0	7	0	2	0	0	0	0	0	0	0	0	0	0	0	0	0	0	178	0	0	0	0	0	0	0	0	0	0	0	0	66	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007201	34	7201	5	6	3	3798	1763	958	737	796	880	757	908	777	899	520	1123	912	733	844	776	1238	389	1171	475	862	773	1152	510	1237	460	552	963	549	1092	573	1078	636	945	694	976	865	735	423	1210	391	1174	107	423	3	1	630	434	3	9	48	6	1	3	1	1	2	16	7	6	0	2	0	4	3	611	59	22	373	25	18	212	158	52	14	17	17	9	15	9	510	0	0	0	0	0	0	0	0	985	0	0	0	0	0	0	0	0	0	0	0	0	62	0	34	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1113	0	0	0	0	0	0	0	0	0	0	0	0	378	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007202	34	7202	5	6	3	1676	729	425	275	314	371	327	358	331	358	208	458	367	308	362	295	526	150	487	193	372	305	483	211	507	197	237	393	221	447	263	416	258	393	275	408	381	280	181	495	156	504	50	230	0	1	225	164	1	3	20	1	0	0	0	0	1	5	3	0	0	0	0	2	2	316	22	11	121	4	6	79	72	19	3	4	9	10	7	1	248	0	0	0	0	0	0	0	0	379	0	0	0	0	0	0	0	0	0	0	0	0	26	0	8	0	0	0	0	0	0	0	0	0	0	0	0	0	0	457	0	0	0	0	0	0	0	0	0	0	0	0	149	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007203	34	7203	5	6	3	3482	1591	939	581	695	806	710	779	654	849	467	997	826	638	799	651	1155	306	1080	400	839	642	1024	455	1088	433	495	850	506	958	537	949	568	842	641	845	781	668	381	1085	378	1039	105	409	2	2	521	390	6	1	46	6	1	2	0	2	5	14	2	1	0	3	0	5	2	578	62	24	307	11	13	213	120	55	13	12	22	6	9	9	485	0	0	0	0	0	0	0	0	866	0	0	0	0	0	0	0	0	0	0	0	0	54	0	23	0	0	0	0	0	0	0	0	0	0	0	0	0	0	1001	0	0	0	0	0	0	0	0	0	0	0	0	334	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007204	34	7204	5	6	5	1877	777	458	274	397	335	413	304	365	349	272	426	419	280	381	321	536	169	520	194	392	322	500	223	480	268	258	386	249	458	324	402	294	396	260	480	392	318	217	505	193	490	57	280	4	0	211	147	3	1	23	1	1	2	1	0	2	3	1	1	0	0	1	0	2	379	29	5	112	9	11	83	38	18	11	2	7	4	7	3	463	0	0	0	0	0	0	0	0	208	0	0	0	0	0	0	0	0	0	0	21	0	14	0	5	0	0	0	0	0	0	0	0	0	0	0	0	0	0	406	0	0	0	0	0	0	0	0	0	0	0	0	208	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	060670073	34	7300	5	6	3	175	53	29	20	30	22	29	23	30	21	16	34	27	21	27	22	36	12	34	16	24	24	33	17	38	12	17	26	17	29	26	22	18	28	14	33	24	23	13	34	11	34	3	16	0	0	16	11	0	0	2	0	0	1	0	0	0	0	0	0	0	0	0	0	0	20	3	0	7	2	1	5	3	1	0	0	0	1	1	0	17	0	0	0	0	0	0	0	0	26	0	0	0	0	0	0	0	0	0	0	0	0	5	0	1	0	0	0	0	0	0	0	0	0	0	0	0	0	0	32	0	0	0	0	0	0	0	0	0	0	0	0	14	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007402	34	7402	5	6	3	2749	1163	717	396	641	455	646	439	592	503	407	648	687	374	582	461	826	230	810	254	592	476	699	381	762	344	381	593	394	668	494	571	435	593	405	649	619	430	296	769	258	785	66	408	3	2	320	259	2	3	24	5	0	0	0	0	2	6	8	1	0	2	0	1	4	549	43	14	208	6	9	105	56	39	11	8	11	10	5	7	446	0	0	0	0	0	0	0	0	543	0	0	0	0	0	0	0	0	0	0	0	0	40	0	17	0	0	0	0	0	0	0	0	0	0	0	0	0	0	640	0	0	0	0	0	0	0	0	0	0	0	0	323	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
67	06067007403	34	7403	5	6	3	1896	787	477	275	459	293	440	292	390	355	273	436	461	257	417	291	561	147	552	163	404	319	500	230	534	219	266	384	245	473	351	364	292	394	277	443	418	280	181	527	176	510	46	297	3	1	212	149	0	0	18	2	1	0	1	2	1	3	2	2	0	0	0	2	1	360	39	6	128	7	6	76	43	31	4	1	7	4	5	3	313	0	0	0	0	0	0	0	0	350	0	0	0	0	0	0	0	0	0	0	0	0	32	0	9	0	0	0	0	0	0	0	0	0	0	0	0	0	0	447	0	0	0	0	0	0	0	0	0	0	0	0	213	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0	0
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